Attachment B - SPEC.pdf

Brookhaven National Laboratory Number: NSLSII-8BM-SPC-002

Brookhaven Science Associates Version: 1

National Synchrotron Light Source II (NSLS-II) Effective: 23 JUL 2025

NSLS-II Tender Energy X-Ray Spectroscopy (TES) Beamline

Microscope Endstation Motion Assemblies

Technical Specification QA Category: A2

Document Reviewed and Approved By:

Prepared By David (Scott) Coburn NSLS-II Principal Mechanical Engineer, Beamline Engineering

ESH Approval Robert Lee NSLS-II ESH Manager

Approved By Steven Moss NSLS-II Authorization Basis Manager

Approved By Dominik Wierzbicki NSLS-II TES Beamline Scientist

Approved By Lindsay Garske NSLS-II Quality Assurance Engineer

Approved By Yonghua Du NSLS-II Spectroscopy Program Director

Approved By Jeff Keister NSLS-II Data Sci & System Integration

Approved By John Sinsheimer NSLS-II Instruments & Controls

This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99

Technology.

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VERSION CONTROL SHEET

VERSION DESCRIPTION DATE AUTHOR APPROVED BY

1 First Issue 23JUL2025 S. Coburn See cover page.

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Contents

1 Introduction and Overview

2 References

3 Conflicts

4 Motion Control Terms

4.1 Range

4.2 Resolution

4.3 Repeatability

4.4 Accuracy

4.5 Stability

5 Coordinate System

6 Packaging

7 Technical specifications

7.1 Scope of Supply

7.2 Common Mechanical Specifications

7.3 Horizontal Mirror Motions Assembly Specifications

7.4 Vertical Mirror Motions Assembly Specifications

7.5 Detector Motions Assembly Specifications

7.6 Microscope Motions Assembly Specifications

7.7 Electrical Specifications

7.8 Cabling

7.9 Vacuum Specifications

7.10 Acceptance Testing

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Definitions/Acronyms

BNL Brookhaven National Laboratory

BSA Brookhaven Science Associates

COTS Commercial Off-the-shelf

GeV Giga-electronvolt

NRTL Nationally Recognized Testing Laboratory

NSLS-II National Synchrotron Light Source II

QA Quality Assurance

RMS Root Mean Square

SPC Technical Specification

TES Tender Energy X-ray Spectroscopy

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1 INTRODUCTION AND OVERVIEW

NSLS-II is a synchrotron light source that has a highly optimized 3 GeV electron storage ring, full-energy injector, experimental beamlines and optics, and appropriate support equipment. This Technical Specification is the basis for the procurement of four Microscope Endstation Motion Assemblies, which will be used on the Tender Energy X-ray Spectroscopy (TES) beamline at the National Synchrotron Light Source II (NSLS-

II) at Brookhaven National Laboratory (BNL).

The Motion Assemblies described in this document will be used as a vital part of the TES Microscope

Endstation, ensuring that several critical devices can be correctly positioned relative to the incident X-ray beam.

This Specification outlines the Contractor’s responsibilities and obligations necessary for completing the requirements as set forth herein.

2 REFERENCES

The following documents are an integral part of this Specification; the applicable revision level will be the latest that is in effect at the time of award:

Document Number Document Title

BNL-81715-2008-IR Vacuum Systems Consensus Guideline for Department of Energy Accelerator Laboratories

BNL-QA-101 BNL Supplier Quality Assurance Requirements

LT-ENG-RSI-SR-VA-002 Requirements for Design and Fabrication of Components for NSLS-II UHV Systems

NFPA 70 National Electrical Code (2020)

NSLSII-CRL-RSI-001

Experimental Facilities Requirements, Specifications and Interfaces for the Controls and Data Acquisition System

NSLSII-CRL-STD-001 Beamline Systems Instrumentation Interfacing Standard

3 CONFLICTS

In the event of a conflict between the Specification and any reference documents, the Contractor shall immediately notify the BSA contractual representative. Failure to notify the BSA contractual representative of a document conflict shall not relieve the Contractor’s responsibility to ensure full compliance with all requirements.

4 MOTION CONTROL TERMS

The following definitions shall apply to the motion control specifications.

4.1 Range

Maximum range of positions available to a motion, which is defined at both ends by potentially adjustable hard limits or non-binding end stops. (Capability for additional user-adjustable hard and soft limits must be presented.)

4.2 Resolution

Minimum average incremental step size that can be resolved by the encoder or achieved by the mechanical and motion control system.

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4.3 Repeatability

RMS difference between absolute position reached for a given identical, commanded position regardless of history (motion from either limit).

4.4 Accuracy

Maximum difference between absolute position travelled to and the commanded position.

4.5 Stability

RMS deviation in absolute position with no change in input position over an extended period of time

(24 hours).

5 COORDINATE SYSTEM

This document uses a Cartesian coordinate system to specify various orientations and directions. The Cartesian axes (X, Y, Z) are shown in Figures 1 through 4. The tri-colored XYZ icon shown is located at the origin of the coordinate system (0, 0, 0). The arrows point in the positive direction.

A set of rotation axes is defined as rotation about each of the Cartesian axes. The designation is (ax, ay, az), meaning “angle about x,” etc. The sign of these rotations is strictly right-handed.

6 PACKAGING

▪ The Motion Assemblies shall be packed to ensure that they remain clean and free from damage during both storage and shipping.

▪ In preparation for shipping, the assemblies shall be sealed for protection against weather elements, dust, and damage to projections, shock loads, impacts, and rubbing. The assemblies shall be properly braced and cushioned within the packing so that they will not shift during handling and shipment.

▪ Durable materials, such as clean wood, bubble wrap, or similar noncontaminating materials, are to be used to support and protect the assemblies from one another during transit and storage. Peanut-type material shall not be used for packaging.

▪ All assemblies or sub-assemblies shall be secured to prevent damage due to unwanted motion or vibration. The packaging must be designed to withstand acceleration loads more than twice the acceleration due to gravity (>2g0).

▪ Each packing crate shall be fitted with ShockWatch® and TiltWatch® sensors or an equivalent approved by BSA.

▪ The container shall be appropriately labeled with the listing of contents, destination, gross weight, location of center of gravity, purchase order number, and contact information.

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7 TECHNICAL SPECIFICATIONS

This section defines the technical specifications for the Motion Assemblies.

7.1 Scope of Supply

The vendor shall provide one of each of the following four Motion Assemblies:

▪ Vertical Mirror Motions Assembly

▪ Horizontal Mirror Motions Assembly

▪ Detector Motions Assembly

▪ Microscope Motions Assembly

The following list of components denotes the scope of supply for each of the listed Motion Assemblies:

▪ All individual motion stages.

▪ Adapter plates between individual stages, as needed.

▪ Stepper motor with Type K thermocouple for each motion.

▪ Gear reducer (if required) for each motion.

▪ Absolute position encoder for each motion.

▪ Cables for motors and encoders of the required length.

▪ Travel limit switches for each motion.

▪ All items integrated into their respective assembly.

7.2 Common Mechanical Specifications

Each of the Motion Assemblies shall meet the following mechanical specifications:

▪ It shall be clean and free of dirt, corrosion, oil, and grease, except for the appropriate lubrication on bearing surfaces.

▪ It shall be designed to operate in the temperature range of 24˚C (75˚F) to 35˚C (95˚F) and under humidity range of 20% to 80%.

▪ It shall be designed to operate in the pressure range of 750 Torr to 1E-5 Torr.

▪ Each motion stage stepper motor shall be sized to provide a speed of ≥ 1000 full-steps per second.

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7.3 Horizontal Mirror Motions Assembly Specifications

The Horizontal Mirror Motions Assembly shall meet the following mechanical specifications:

▪ Figure 1 shows a conceptual model of the Horizontal Mirror Motions Assembly. The assembly shall fit completely within an envelope with dimensions given in the following table. Note that the dimensions are all relative to the location of the origin. The top surface of the top-most stage shall be at the top surface of the envelope (when all motions are at their nominal zero positions).

Figure 1: Horizontal Mirror Motions Conceptual Model

Table 1: Horizontal Mirror Motions Assembly Envelope Dimensions

Parameter Value

X dimension -125 mm to +200 mm

Y dimension, origin to envelope top -75 mm to -50 mm

Y dimension, origin to envelope bottom -225 mm to -175 mm

Z dimension -275 mm to +100 mm

The Horizontal Mirror Motions Assembly shall meet the following motion specifications:

▪ The assembly shall have four degrees of freedom: (X, Z) linear motions, and (ay, az) rotation motions.

▪ The four motion stages shall be stacked in a linear fashion.

▪ The motion stage at the bottom of the stack shall be the X motion (shown in Figure 1 in blue).

▪ The motion stage on top of the X motion shall be the Z motion (blue).

▪ The motion stage on top of the Z motion shall be the az rotation (orange).

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▪ The motion stage on top of the az rotation shall be the ay rotation (yellow).

▪ The (ay, az) rotation axes shall have a common intersection point (located at the coordinate system origin) with a sphere-of-confusion of ≤ 20 µm over the full range of all rotations.

▪ The load capacity shall be ≥ 15 kg, centered at the coordinate system origin.

▪ The individual motion performance specifications are given in the following Tables.

Table 2: (X, Z) Motion Travel Range Specifications

X & Z Range ± 20 mm (minimum)

Table 3: (X, Z) Motion Performance Specifications

Resolution ≤ 5 µm (1 full step)

Repeatability ≤ 5 µm

Accuracy ≤ 15 µm, over full range

Trajectory Straightness ≤ 5 µm, over full range

Trajectory Roll, Pitch, and Yaw ≤ 30 µrad, over full range

Table 4: (ay, az) Motion Travel Range Specifications

(ay, az) Range ± 5 degree (minimum)

Table 5: (ay) Motion Performance Specifications

Resolution ≤ 0.005 degree (1 full step)

Repeatability ≤ 0.002 degree

Accuracy ≤ 0.010 degree

Table 6: (az) Motion Performance Specifications

Resolution ≤ 0.05 degree (1 full step)

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7.4 Vertical Mirror Motions Assembly Specifications

The Vertical Mirror Motions Assembly shall meet the following mechanical specifications:

▪ Figure 2 shows a conceptual model of the Vertical Mirror Motions Assembly. The assembly shall fit completely within an envelope with dimensions given in the following table. Note that the dimensions are all relative to the location of the origin. The top surface of the top-most stage shall

Figure 2: Vertical Mirror Motions Conceptual Model

Table 7: Vertical Mirror Motions Assembly Envelope Dimensions

X dimension -100 mm to +200 mm

Y dimension, origin to envelope top -110 mm to -90 mm

Y dimension, origin to envelope bottom -250 mm to -210 mm

Z dimension -200 mm to +100 mm

The Vertical Mirror Motions Assembly shall meet the following motion specifications:

▪ The assembly shall have three degrees of freedom: (Y) linear motion, and (ax, az) rotation motions.

▪ The three motion stages shall be stacked in a linear fashion.

▪ The motion stage at the bottom of the stack shall be the Y motion (blue).

▪ The motion stage on top of the Y motion shall be the az rotation (orange).

▪ The motion stage on top of the az rotation shall be the ax rotation (orange).

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▪ The (ax, az) rotation axes shall have a common intersection point (located at the coordinate system origin) with a sphere-of-confusion of ≤ 20 µm over the full range of all rotations.

Table 8: (Y) Motion Travel Range Specifications

Y Range ± 3 mm (minimum)

Table 9: (Y) Motion Performance Specifications

Resolution ≤ 2 µm (1 full step)

Repeatability ≤ 2 µm

Accuracy ≤ 10 µm, over full range

Trajectory Straightness ≤ 10 µm, over full range

Trajectory Roll, Pitch, and Yaw ≤ 60 µrad, over full range

Table 10: (ax, az) Motion Travel Range Specifications

(ax, az) Range ± 5 degree (minimum)

Table 11: (ax) Motion Performance Specifications

Resolution ≤ 0.005 degree (1 full step)

Table 12: (az) Motion Performance Specifications

Resolution ≤ 0.05 degree (1 full step)

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7.5 Detector Motions Assembly Specifications

The Detector Motions Assembly shall meet the following mechanical specifications:

▪ Figure 3 shows a conceptual model of the Detector Motions Assembly. The assembly shall fit completely within an envelope with dimensions given in the following table. Note that the dimensions are all relative to the location of the origin. The top surface of the top-most stage shall

Figure 3: Detector Motions Conceptual Model

Table 13: Detector Motions Assembly Envelope Dimensions

X dimension -125 mm to +225 mm

Y dimension, origin to envelope top 0 mm

Z dimension -150 mm to +300 mm

The Detector Motions Assembly shall meet the following motion specifications:

▪ Each assembly shall have three degrees of freedom: (X, Y, Z) linear motions.

▪ The three motion stages shall be stacked in a linear fashion.

▪ The motion stage at the bottom of each stack shall be the Z motion (blue).

▪ The motion stage on top of the Z motion shall be the X motion (orange).

▪ The motion stage on top of the X motion shall be the Y motion (yellow).

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Table 14: (X, Y, Z) Motion Travel Range Specifications

X Range ± 50 mm (minimum)

Z Range ± 75 mm (minimum)

Table 15: (X, Z) Motion Performance Specifications

Resolution ≤ 10 µm (1 full step)

Repeatability ≤ 5 µm

Accuracy ≤ 10 µm, over full range

Table 16: (Y) Motion Performance Specifications

Resolution ≤ 2 µm (1 full step)

Repeatability ≤ 2 µm

Accuracy ≤ 10 µm, over full range

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7.6 Microscope Motions Assembly Specifications

The Microscope Motions Assembly shall meet the following mechanical specifications:

▪ Figure 4 shows a conceptual model of the Microscope Motions Assembly. The assembly shall fit completely within an envelope with dimensions given in the following table. Note that the dimensions are all relative to the location of the origin. The top surface of the top-most stage shall

Figure 4: Microscope Motions Conceptual Model

Table 17: Microscope Motions Assembly Envelope Dimensions

X dimension -225 mm to +150 mm

Y dimension, origin to envelope top 0 mm

Z dimension -150 mm to +300 mm

The Microscope Motions Assembly shall meet the following motion specifications:

▪ Each assembly shall have three degrees of freedom: (X, Y, Z) linear motions.

▪ The three motion stages shall be stacked in a linear fashion.

▪ The motion stage at the bottom of each stack shall be the Z motion (blue).

▪ The motion stage on top of the Z motion shall be the X motion (orange).

▪ The motion stage on top of the X motion shall be the Y motion (yellow).

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Table 18: (X, Y, Z) Motion Travel Range Specifications

X Range ± 50 mm (minimum)

Z Range ± 75 mm (minimum)

Table 19: (X) Motion Performance Specifications

Resolution ≤ 10 µm (1 full step)

Repeatability ≤ 5 µm

Accuracy ≤ 10 µm, over full range

Table 20: (Z) Motion Performance Specifications

Resolution ≤ 1 µm (1 full step)

Repeatability ≤ 5 µm

Accuracy ≤ 10 µm, over full range

Table 21: (Y) Motion Performance Specifications

Resolution ≤ 2 µm (1 full step)

Repeatability ≤ 2 µm

Accuracy ≤ 10 µm, over full range

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7.7 Electrical Specifications

Controls interface requirements are documented in BSA document NSLSII-CRL-RSI-001, Experimental Facilities Requirements, Specifications and Interfaces for the Controls and Data

Acquisition System. Motor interfacing standards are found in BSA document NSLSII-CRL-STD-001, Beamline Systems Instrumentation Interfacing Standard.

Each of the motion stages shall have the following:

▪ Stepper motor actuators. (See NSLSII-CRL-RSI-001 Section 2.1.1)

▪ Absolute encoders. (BiSS-C, see NSLSII-CRL-RSI-001 Section 2.1.2)

▪ Limit switches with adjustable actuation settings. (Normally-closed, dry-contact, see NSLSII-CRL-

RSI-001 Section 2.1.3)

▪ Thermocouple temperature sensor for each stepper motor. (Type K, see NSLSII-CRL-STD-001

Section 4.5.2)

7.8 Cabling

All the cabling is in-vacuum cabling. The cabling shall meet the following requirements:

▪ The cable length from the motor or encoder to its connector shall be 2 m.

▪ All cabling and connector materials shall be compatible with the lowest operating pressure listed in

Section 7.2.

▪ All cables shall be sized (conductor gauge) to safely carry the expected current load at the lowest operating pressure listed in Section 7.2.

▪ Each connector shall have an appropriate back shell with strain relief.

▪ Each connector shall be permanently labeled in a vacuum-compatible manner with its axis designation (X, Y, Z, ax, ay, az).

▪ Each motion shall have its motor, limit switches, and thermocouple cabled to a single DB9 connector. The connector shall have socket contacts (The vacuum feedthrough for these connectors has pin contacts). The connector shall use the pinout shown in Table 22.

▪ Each encoder shall have its signals cabled to a single DB9 connector. The connector shall have socket contacts (The vacuum feedthrough for these connectors has pin contacts). The connector shall use the pinout shown in Table 23.

▪ All commercial off-the-shelf (COTS) components shall be certified by a Nationally Recognized

Testing Laboratory (NRTL) and bear the NRTL mark, https://www.osha.gov/nationally-recognized-testing-laboratory-program/current-list-of-nrtls. (CE is not an approved NRTL and is not considered acceptable.)

▪ If there is any deviation from these requirements, the contractor must notify BSA immediately.

https://www.osha.gov/nationally-recognized-testing-laboratory-program/current-list-of-nrtls https://www.osha.gov/nationally-recognized-testing-laboratory-program/current-list-of-nrtls

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Table 22: Motor Cable Pinout

Signal Pin Pin Signal

Limit Switch Common 1 6 Thermocouple (-)

Motor Phase B- 2 7 Thermocouple (+)

Motor Phase B+ 3 8 Limit (-)

Motor Phase A- 4 9 Limit (+)

Motor Phase A+ 5

Note that this pinout is a (1-5:5-1, 6-9:9-6) mirror image of the expected air-side pinout.

Table 23: Encoder Cable Pinout

Signal Pin Pin Signal

Encoder +5 VDC 1 6 Encoder GND

Encoder +5 VDC 2 7 Encoder GND

Encoder MA(-) 3 8 Encoder SLO(-)

Encoder MA(+) 4 9 Encoder SLO(+)

Inner Shield 5

Note that this pinout is a (1-5:5-1, 6-9:9-6) mirror image of the expected air-side pinout.

7.9 Vacuum Specifications

The Sample Motions Assembly shall comply with the criteria described in BSA document LT-ENG-

RSI-SR-VA-002, Requirements for Design and Fabrication of Components for NSLS-II UHV Systems, except for the following:

▪ Lowest operating pressure as specified in Section 7.2, Common Mechanical Specifications.

7.10 Acceptance Testing

At the Contractor’s facility, the following tests shall be performed and documented by the Contractor for each of the assemblies:

▪ Dimensional check: Verify that the assembly meets all the specified dimensions.

▪ Features check: Verify that the assembly provides all the specified features.

▪ Gross Motions check: Verify that each of the motion stages moves smoothly through the required range of motion.

▪ Limits check: Verify that all limit switches activate correctly.

▪ Encoders check: Verify that each of the encoders reads correctly through the required range of motion.

▪ Fine Motions check: Verify that each of the motion stages performs to their respective specifications given in Sections 7.3, 7.4, 7.5, and 7.6.

▪ Sphere-of-confusion check: Verify that the spheres-of-confusion are within specification.

All the tests listed above will be repeated for each assembly at BNL by BSA personnel after receipt of the assemblies as part of the procurement acceptance testing. The Contractor is responsible for ensuring that each assembly meets all specifications for the tests performed at BNL.