Attachment A. Statement of Work.pdf

NSLS-II | FXI-TXM MOTION SYSTEM – SOW/SPC

This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99 Technology

Full Field X-Ray Imaging (FXI) Beamline

Sample Motion System

Brookhaven National Laboratory National Synchrotron Light Source II

Version 01 - June 24th, 2025

1.0 INTRODUCTION/SCOPE

The Full Field X-Ray Imaging (FXI) beamline is purchasing a customized motion system to be used within the Transmission X-Ray Microscope (TXM) end station. The motion system, hereafter referred to as “the Equipment,” will be an integral part of the FXI Laminography upgrade project.

This document serves as the Statement of Work (SOW) and Technical Specification (SPC) for the Equipment and shall be the basis for its procurement.

2.0 STATEMENT OF WORK

The vendor shall provide a complete motion system conforming to the requirements outlined in Section 3.0 of this document (Technical Specifications). The Equipment shall be assembled and tested in accordance with the vendor’s standard practices, except as noted.

3.0 TECHNICAL SPECIFICATIONS

This section defines the technical specifications for the custom motion system. Figure 3-1, below, depicts a conceptual layout of the components for the full FXI Laminography project.

3.1. Scope of Supply List

The following list comprises of the components included in the scope of supply for the Equipment.

• Motion system o High precision rotary air-bearing stage o XYZ linear motion stages and sensor module o Slip-ring and customized interface plates as needed

• Control systems and accessories

3.2. Scope of Supply Exclusions

The following list comprises of the components excluded from the scope of supply for the Equipment.

This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99 Technology

• Sample Holder

• Tilt/Goniometer Stage

3.3. Component Requirements

3.3.1. Rotary Stage

The rotary stage shall consist of LAB Motion Systems RT150AU high precision rotary air bearing stage, or equivalent. The stage shall be equipped with a slip ring and ‘SmarAct sensor module’ (or equivalent), to pass through signals from the three linear motion stages mounted to the stage, see Figure 3-1 below. The stage shall also be equipped with a lapped bottom plate, with wire exits and strain relief, that will interface with the tilt /goniometer stage (not included in this scope).

The stage shall meet or exceed the requirements listed below in table 3-1 (when supplied with air conforming to ISO 8573-1:2010 Class 1.3.1 at 5 bar and < 20 Nl/min.) Table 3-1 describes the base motion requirements for the stage without the slipring and other components installed.

Table 3-1 – Rotary Stage Motion Requirements

Parameter Value

Range Unlimited

Maximum Speed 200 RPM

Maximum Axial Load 726 N

Maximum Radial Load 264 N

Radial Error Motion < 20 nm

Axial Error Motion < 20 nm

Angular Accuracy ± 6.9 arcsec

In addition to the table of requirements above, the stage shall also meet the following runout error requirement, with the slipring installed: Runout error motion < 60nm, filter 360 UPR - measured at 95mm above the rotary stage top surface.

3.3.2. Linear Motion Stages

The linear stage stack shall consist of three linear stages, arranged in the order depicted in Figure 3-1 below.

Two of the stages shall be SmarAct CLS-5252-DS linear stages, or equivalent, and shall each conform to or exceed the requirements listed below in Table 3-2.

Table 3-2 – Linear Stage Motion Requirements

Parameter Value

Travel Range 31 mm

Blocking Force ≥ 5 N

Maximum Normal Force 20 N

Maximum Lift Force > 1 N

Sensor Resolution (Closed-Loop) 1 nm

This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99 Technology

Uni-directional Repeatability (Closed-Loop)

± 40 nm

The third stage shall consist of the SmarAct CHS-5237 high load stage, or equivalent. The stage shall meet or exceed the requirements in Table 3-3, below.

Table 3-3 – Linear Stage Motion Requirements

Parameter Value

Travel Range 10 mm

Maximum Lift Force 10 N

Sensor Resolution (Closed-Loop) 1 nm

Uni-directional Repeatability (Closed-Loop)

± 40 nm

3.3.3. Control systems and accessories

The motion control system for the equipment shall consist of the following, or equivalent.

Rotary Stage Control:

• ACS Controller (19” Rack Solution) o UDMsm-2B100-TNNNN o SpiPlusEC-02020264NNNDNDNN

Linear Stage Control (All three axes):

• SmarAct MCS2 Control System

3.4. Conceptual Layout

Figure 3-1, below, depicts the conceptual layout for the motion system assembly. The overall height of the vendor provided system shall not exceed 237mm.

This information is controlled by the U.S. Department of Commerce Export Administration Regulations 15 CFR Parts 730-774 as EAR99 Technology

Figure 3-1: Conceptual layout of the Motion System Assembly Goniometer stage and sample holder not included in scope