Attachment 2 - Statement of Work-241015 FINAL.pdf

Statement of Work (Services)

TITLE: Planar Junction Deposition System

Requesting Laboratory / Division / Group:

Communications Technology Laboratory RF Technology Division Superconductive Electronics Group (672.06)

Background:

NIST-Boulder has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) to support the most sensitive research done at NIST. This building contains an ISO5 (Class 100) micro-electronics fabrication facility called the Boulder Micro-fabrication Facility (BMF). Users of the BMF from the Superconductive Electronics Group of CTL have a system for depositing planar superconducting/normal metal/superconducting junctions that was first commissioned in 2001. Devices made using this system are the backbone of the NIST Josephson Voltage Standard program and SRI yielding ~$1M/year in SRI disseminations.

Besides SRI dissemination, devices made in this system are critical to multiple internal and external programs including qubit electronics, photonics, and magnetics. We require a new system to deposit niobium/normal metal junction layers to modernize and upgrade our capabilities for this critical process. Expanded capabilities include advanced sputter deposition sources, in-chamber metrology, improved uniformity, and advanced wafer temperature control. It is important that the new Planar Junction System be able to provide new capabilities while still being able to closely replicate the processes from the existing system.

Objective(s):

To supply, commission, and train new users on a Planar Junction System that meets the needs of the BMF community, including CTL and PML users.

Scope of Work

General Requirements:

The Contractor shall provide all support for project oversight, administration, and technical execution of this contract. The Contractor is responsible for maintaining accurate records of project activities.

The Contractor shall:

1. Provide evidence of experience in supplying, installing, and training new users on at least three systems with similar requirements to those in the statement of work. This criterion shall be met by supplying the Government with contact information of references that the Government may contact and ask if the system performs according to required system specifications. Vendors shall also provide proof of at least one previous system as part of the three that has been successfully used specifically for multi-cathode co-sputtering.

2. Provide data showing a similar configuration system with identically sized cathodes can meet uniformity and rate specifications outlined in c.ii.22.c

3. Provide all new items. Prototypes, one-off systems, demonstration models, and used or refurbished instruments will not be considered for award.

4. Provide personnel that pass required government background checks to be issued badges for work on site.

5. Provide a quotation proposal that details all planned materials, consumables, travel, labor, rigging, equipment, and expenses.

6. Supply the utility requirements, and a diagram showing the system footprint along with a quotation.

7. Provide a diagram showing how the system shall fit into the required space, as shown in Attachment 1.

Special Requirements:

The Contractor shall supply the installation manual, utility requirements, and a diagram showing the system footprint, measurements, and wall penetrations along with the quotation.

Government Responsibilities:

Government direction or supervision of contractor employee(s) in order to:

(1) Adequately protect the Government’s interest;

(2) Retain control of the function involved; or

(3) Retain full personal responsibility for the function supported in a duly authorized Federal officer or employee.

Additional Government Responsibilities None

Tasks:

Task

Number Description

1 Planar Josephson Junction System

Requirement 1-

Be constructed with materials that are compatible for use in an ISO Class 5 cleanroom.

Requirement 1-

Be designed for normal operation at an altitude of 5,500 feet above sea level.

Requirement 1-3 Have a cooling water distribution sub-system that shall:

a. Include a water-to-water heat exchanger unit that shall have sufficient capacity for all system components, excluding the cryo-compressor.

b. Have a manifold with single connections for inlet and outlet water.

c. Have appropriate flow sensors and interlocks.

Requirement 1-4 Have a gas distribution sub-system that shall:

a. Include appropriate tubing and valves for two gasses which may include Argon and

Nitrogen.

b. Have a manifold with single connections for both gasses

Requirement 1-5 Have an electrical sub-system that shall:

a. Be powered by a single feed of 208 V, three-phase power.

b. Draw less than 70 amps per feed.

Requirement 1-6 Be able to deposit metal films using techniques according to standards used in the semiconductor industry.

Requirement 1-7 The system shall be able to operate in an automated, computer-controlled manner:

a. The system must operate according to one recipe or recipe set that can control all the subsystems.

b. The system shall store and edit recipes to control the system using only software and hardware integrated into the system; no other software or hardware is required.

c. The system shall store comprehensive log files during process operation.

d. The system shall meet all requirements while not being connected to the internet or an external network. It shall be able to function as a stand-alone unit.

Requirement 1-8 Include all computer systems, power supplies, and all ancillary equipment required for the system to operate.

Requirement 1-9 Include appropriate interlocks to ensure that the system is safely operated.

Requirement 1-10 Be controlled by software that can control all aspects of the system. This software must also provide users with a Graphic User Interface (GUI) that shows users the system's state, allows users to change the system's state, allows users to create and store recipes, and allows users to run recipes to automatically run a process on the system.

Requirement 1-11 Meet the following physical requirements:

a. The system shall fit into the footprint within the cleanroom as shown in the yellow box labeled “available footprint” in Attachment 1.

i. Multiple system configurations could satisfy the footprint requirements.

ii. If necessary, the government can make a limited number of rectangular and circular cuts in the wall for the system.

iii. The system must fit in this footprint along with any required egress for system operation, user, and maintenance. This explicitly includes the space of a user to operate the system. Access doors may extend past this footprint, provided there is clearance to existing equipment and other structures.

b. During transport to the final location, the system components shall pass through a freight elevator with doors that are 7 feet 11 inches tall and 8 feet wide. The platform has an entrance door to back length of 9 feet and a width of 13 feet, a cab height of 7 feet 11 inches, and a weight limit of 10,000 pounds.

c. During transport to the final location, the system components shall pass through a corridor with a minimum width of 5 feet.

d. The system shall weigh less than 5,000 pounds.

Requirement 1-12 Be able to perform tasks, including but not limited, to RF or ion-source pre-cleaning, depositing, and co-sputtering on the following substrates:

a. 3-inch and 150 mm wafers defined by semi-spec lateral dimension.

b. Substrates made of Silicon, Gallium-Arsenide, Glass, Fused Silica, Quartz, and Sapphire.

c. Substrates with thickness in the range from 0.2 mm to 1 mm.

Requirement 1-13 Be able to accommodate 3-inch and 150-mm wafers without changing any parts within the main chamber.

Requirement 1-14 The change from 3 inches to 150 mm in the load lock shall take no more than 3 minutes.

Requirement 1-15 Contain a transfer arm capable of transferring wafers between the load lock and substrate fixture subsystems.

Requirement 1-16 Include a load lock subsystem. This subsystem must be able to accept 3-inch and 150-mm wafers with SEMI spec lateral dimensions. The load-lock subsystem shall:

a. Have a door for the operator to insert a wafer or wafer tray.

b. Have low and high vacuum gauges.

c. Utilize an appropriate turbo/dry pump configuration.

d. A pumping system capable of pumping out the load lock to a pressure below 3e-6 Torr within 20 minutes is required.

e. Have the required plumbing to admit a flow of vent gas.

Requirement 1-17 Include a main chamber subsystem. The main chamber subsystem shall:

a. Be constructed of materials and use seals consistent with achieving Ultra High Vacuum

(UHV), defined as <1E-8 Torr.

b. Include UHV chamber bake-out heaters, power supply, and control.

c. Have at least one opening large enough for all maintenance activities.

d. Include a means of accessing the main chamber for maintenance that shall not require any lifting on the part of a human operator.

e. Have a main chamber pumping subsystem that shall:

i. Be independent of load-lock pumping.

ii. Include a dry rough pump.

iii. Include all valves.

iv. Include a cryopump station for ultimate base pressure that shall be physically and electrically compatible with the “CTI Cryo-Torr 8” variety of cryopump and compressor.

v. Be able to achieve a base pressure in the main chamber of <6E-9 Torr when starting from atmospheric pressure.

vi. Have all components necessary to automatically regenerate the cryopump station through the control software.

vii. Be able to throttle the cryo-pump to regulate pressure during sputtering.

f. Have a viewport with a shutter large enough for an operator to observe processes in the main chamber.

g. Include two sets of system liners.

h. Include all vacuum gauges to monitor the whole range of pressure, including one capacitance manometer for the deposition pressure range. The specific pressure ranges will be determined during the system's design phase. Pressure shall be controlled to 1/10 of a mTorr range.

i. Have an in-situ ellipsometry subsystem that shall:

i. Be able to perform in situ ellipsometry on films on the wafer in the main chamber during deposition.

ii. Include wavelengths 370, 450, 525, 595, 660, 735, 850, 950 nm.

iv. Be able to log measurements as part of an automatic recipe.

j. Have a residual gas analyzer subsystem that shall:

i. Be able to monitor residual gasses up to 100 AMU in the main chamber.

k. Be able to interface with a load lock subsystem.

l. Be able to interface with a deposition subsystem.

m. Be able to interface with a substrate fixture subsystem.

n. Be able to interface with the substrate pre-clean subsystem

Requirement 1-18 Include a deposition subsystem. The deposition chamber subsystem shall:

a. Be able to interface with the main chamber subsystem.

b. Be able to be controlled and monitored through the control software.

c. Include all plumbing, vacuum gauges, and gas control for delivering up to two separate gas flows to the sources and chamber.

d. Have five DC sputter-up sources installed that include shutters.

e. Include 1x 2 kW DC/Pulsed power supply

f. Include 2x 1kW DC power supplies (please see updated Requirement 1-22)

g. Include 1 Bipolar HIPIMS power supply system.

h. Dedicate 1 cathode to a 1kW power supply for cosputtering. Include hardware and software to achieve co-sputtering of this source (1 source).

i. Dedicate 1 cathode to HiPIMS (1 source).

j. Include a 2-in-3-out switch to multiplex the 2kW DC/Pulsed and the other 1kW DC to 3 sources out. Include hardware and software to achieve co-sputtering of this multiplexed source (3 sources).

Requirement 1-19 Include substrate fixture subsystem. The substrate fixture subsystem shall:

a. Be able to interface with the load-lock subsystem through the transfer arm sub-system.

b. Be able to be controlled and monitored by the control software.

c. Be able to rotate the wafer at variable speeds with a maximum speed that exceeds 14 rpm.

d. Be able to accommodate 3-in and 150-mm SEMI-spec wafers with an exclusion area of

5mm or less.

e. Have wafer stage fluid cooling within range -25C – 150C.

f. Include a substrate shutter.

Requirement 1-20 Include substrate pre-clean subsystem. The substrate pre-clean subsystem shall:

a. Provide isolation and shielding to permit substrate bias up to 300 W RF.

b. Include an RF power supply for substrate bias that can supply a minimum of 300 W with an automatic matching network.

c. Include computer control of the RF pre-clean.

OR

d. Provide a gridless ion source to occupy 1 of the 5 source locations.

e. Include a discharge voltage/current of 50-300V at 5A.

f. Include power supply for ion source.

g. Include computer control of ion source pre-clean.

Requirement 1-21 Include spare items that shall:

a. Include general spares of common system parts, including chamber and viewport seals, spare gaskets, shutters, and shields.

Requirement 1-22 Meet the following performance characteristics:

a. Load-Lock pump down shall:

i. Require a duration of less than 20 min to reach a pressure below 3e-6 Torr when starting at atmospheric pressure.

ii. Not require operator intervention to complete.

b. Main chamber pump down shall:

i. Require a duration of less than 48 hours to reach a pressure 9E-9 Torr when starting at atmospheric pressure.

ii. Not require operator intervention to complete.

c. Deposited film uniformity shall: (applies to all sources)

i. Be less than plus/minus 4.5 percent providing a 5 mm exclusion area across a 150 mm wafer to be measured with 4-wire resistance, profilometry, or ellipsometry.

d. Wafer pre-clean uniformity shall: (applies to ion source or RF bias)

i. Be less than plus/minus 5.0 percent across a 150 mm wafer providing for a 5 mm exclusion area

e. Metal, specifically niobium deposition rate shall be at least 70 nm/min on sources supplied with 2kW DC/Pulsed power supplies and HiPIMS power supplies (not required on sources with 1kW power supplies)

2 Factory Acceptance Report

Requirement 2-

Before shipping the system, the Contractor shall provide the Government with a factory acceptance report demonstrating that the Planar Junction System performs according to the system specifications listed in this statement of work. The Government reserves the right to be present during the factory acceptance test.

Requirement 2-2 The Contractor shall provide the Government with a schedule of the factory acceptance test at least four weeks before the test to ensure that the Government has enough time to arrange travel to the factory. The system must meet all specifications in Task 1 before it is shipped. The Contractor shall be responsible for securing all consumables required for the demonstration.

Government-Furnished Property, Material, Equipment, or Information:

(GFP, GFM, GFE, or GFI)

The Government may provide known wafers for some of the factory acceptance tests.

Deliverables:

Reference Description Due Date Format Approving Authority

General Requirements

Provide evidence of experience in supplying, installing, and training new users on Planar Junction Systems with similar requirements to those in the statement of work. Evidence of this

With Quotation Electronic* COR/CO criterion shall be demonstrated with an appropriate reference.

Special Requirements

Provide system setup and training time for the system

One week after the system is delivered

N/A COR/CO

Special Requirements

Provide the Government with the installation manual, utility requirements, and a diagram showing the system footprint, measurements, and wall penetrations, along with a quotation. In addition, the Contractor may provide a facilitization checklist for the Government to fill out and sign.

4 weeks ARO Electronic* COR/CO

Other Unique Requirements

The Contractor shall supply a schedule for when the required work will be performed.

4 weeks ARO Electronic* CO

Government Furnished Property

The Government will provide the opportunity for the Contractor to perform a site visit.

8 weeks ARO N/A COR/CO

Requirement 2-1 The Contractor shall provide the Government with a schedule of the factory acceptance test at least 4 weeks prior to the test to ensure that the Government has enough time to arrange for travel to the factory.

4 weeks before the factory acceptance test

Electronic* COR/CO

Requirement 2-2 The Contractor shall provide the Government a factory acceptance report demonstrating that the Planar Junction System performs according to system specifications.

Before the system is shipped

Electronic* COR/CO

Task 1 The Planar Junction System is delivered to its final place in the BMF

50 weeks ARO N/A COR/CO

Installation The Contractor shall provide a working set of standard recipes.

During site acceptance

Recipes provided in the system database

COR/CO

Installation The Contractor shall demonstrate the Planar Junction System performs according to system specifications using a standard site acceptance test.

70 weeks ARO N/A COR/CO

2.c.xiv The Contractor shall supply the TPOC with a copy of a report summarizing, work done, the results of the acceptance test, and any issues identified within one week after their site visit.

71weeks ARO Electronic* COR/CO

* Electronic (e-mail, PDF, .doc, .docx, etc.)

Standards of Acceptance:

The NIST TPOC or COR shall review each submitted deliverable and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 7 days of receipt.

The Contractor shall make any needed changes to the deliverables within 7 calendar days from receipt of electronic or written comments from the TPOC or COR.

This applies to deliverables which must be reviewed and approved for acceptance (reports, draft plans, drawings, etc.).

Performance Requirement Summary (for Performance Work Statement):

~ NA ~

Experience Requirements:

Proposed key personnel shall have the following minimum education qualifications and experience:

~ NA ~

Place of Performance:

NIST-Boulder Building 81, Room 1B100 325 Broadway Boulder, Colorado 80305

Delivery Date:

71 WEEKS After Release of Order (ARO)

Delivery Terms:

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

C/O Anna Fox Building 81 Room 1B100 325 Broadway Boulder, CO 80301

Delivery is to include all required rigging from the delivery truck to final system placement in the BMF. This duration shall be at least 4 weeks and will not exceed 12 weeks, and the actual duration will be agreed upon between the Government and the Contractor. If facilitization occurs faster than the agreed upon duration, then the Contractor may start the site acceptance test on a date that is mutually agreeable between the Government and the Contractor.

Installation:

The installation and rigging shall be performed in a compatible method with the cleanliness requirements of an ISO class 5 cleanroom and NIST structural requirements. Items entering the cleanroom shall be cleaned to standards outlined in ISO 14644. The Government reserves the right to have the system delivered to its final location in the BMF and then be able to connect the required utilities to the system for a duration between system delivery and site acceptance test

During system installation, the Contractor shall provide a working set of standard recipes and system schematics.

After system installation, the Contractor shall demonstrate the system's performance according to system specifications using a standard site acceptance test. This test shall include demonstrating that the systems can meet the requirements listed in Task 1. The Government will provide the consumables required for this test. The system must meet the stated performance requirements before it is accepted.

Training:

After the system passes the site acceptance test, the Contractor shall provide on-site applications training.

The contractor shall provide at least two (2) days of system setup and training on the system.

session for up to (number of users training is for) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 7:00 am to 5:00 pm immediately after installation/set-up, inspection and acceptance. Training shall be completed no later than 30 days after acceptance.

Additional Training Requirements:

Inspection and Acceptance:

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

The Contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed as related to installation and training

Performance Tests of Equipment:

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST Technical Point of Contact (TPOC) to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within (insert working days it will take to inspect, accept, or reject) of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

Within one week of the completion of the work, the Contractor shall provide the TPOC a report of the work done, the results of the acceptance test, and any issues identified. After the Government receives the report, the systems shall be accepted.

Warranty:

The contractor shall warranty the entire system for a minimum period of two (2) years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

All parts and labor including installation

Payment Schedule:

Advance payment is not authorized.

The Contractor must invoice in arrears according to the payment schedule.

For Equipment Delivery and/or Installation:

The Contractor shall be paid, in accordance with Net 30-day payment terms, in accordance with the following schedule:

(1) After installation and acceptance by the TPOC of fully installed equipment/system, (if installation is included) AND

(2) After successful completion of the equipment/system testing requirements set forth in this document, AND

(3) After successful demonstration by the instrumentation that equipment/system performs IAW the technical requirements set forth in this document.

(4) After completion of training of Government personnel.

Additional Comments:

None.

Travel:

The Contractor shall be responsible for all travel expenses

The Contractor shall schedule all visits to the BMF with the TPOC at least 2 weeks before arriving at the site.

Special Material Requirements

The Contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed as related to installation and training.

Other Unique Requirements

After award of contract, the Contractor shall supply a schedule for when the required work will be performed.

Within 4 weeks of receipt of order (ARO), the Contractor shall submit a schedule for Contracting Officer approval. At a minimum, the schedule shall address:

(1) Period of Factory Acceptance Test

(2) Delivery date to NIST with all manuals, instructions, machine drawings and schematics

(3) Installation period

(4) Acceptance Testing Period

(5) Training Period

The Contractor shall provide status updates to the Government on a mutually agreed upon time schedule or upon request. The Government will provide the opportunity for a site visit within 4 weeks ARO.

1. The Contractor shall provide the Government with a schedule of the factory acceptance test at least 4 weeks before the test to ensure that the Government has enough time to arrange for travel to the factory. Before the system is shipped, the Contractor shall provide the Government a Factory Acceptance Report demonstrating that the system performs according to system specifications.

2. The Contractor shall ship the system within 50 weeks of award of contract. After the systems are placed in their final location in the BMF, the Government will take a minimum of 4 weeks and a maximum of 12 weeks to install and connect facilities to the system. Within 8 weeks after the Government installs the system, the Contractor shall have commissioned the system to pass the Site Acceptance Test, and users are trained on the operation of the systems.

3. Within one week of the completion of the work, the Contractor shall provide the

TPOC a report of the work done, the results of the acceptance test, and any issues identified. After the Government receives the report, the systems shall be accepted.

Security:

(1) Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

(2) Security: NIST is a restricted campus. An identification badge is required for access into buildings and must be presented to the armed Security Police when entering the campus.

(3) Regular Business Hours: Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Local Time.

(4) Identification Badges: Contractor employees shall comply with NIST identification and access requirements. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office.

(5) Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass shall be displayed on the vehicle in accordance with NIST Security Office instructions.

Other Security Considerations:

Contractor personnel must pass a required government background check to be issued badges for work on site

The Contractor shall schedule all visits to the BMF with the TPOC at least 2 weeks before arriving at the site.

Miscellaneous Information:

None.

Attachments:

3.a. Footprint Attachment 3