Attachment 2 - Preventative Maintenance Checklist.docx

Preventative Maintenance Checklist All maintenance shall be performed in accordance with the applicable Original Equipment Manufacturer (OEM) specifications and manuals. Use only OEM-approved lubricants, parts, and procedures.

I. Pumping System — Inspection and Maintenance

1. Roughing Pump

a. Change oil and lubricants per OEM recommendations.

b. Inspect for leaks, abnormal noises, and proper operation.

2. Booster Pump

a. Change oil as specified by OEM.

b. Inspect for wear, alignment, and secure mounting.

3. Diffusion Pump

a. Change oil/lubricant per OEM guidelines.

b. Verify pump performance and operation.

4. Holding Pumps

a. Change oil and replace filters as required by OEM.

b. Inspect for proper function and condition.

5. Pump Belts

a. Inspect belts for wear, cracking, and proper tension; replace if necessary.

6. Pump Heaters and Electrical Connections

a. Inspect heaters, wiring, and connections for damage or corrosion; ensure tightness.

II. Hot Zone, Vessel, and Structures — Inspection and Maintenance

1. Inspect hot zone heating elements and shielding for signs of wear or damage.

2. Clean vacuum chamber, chamber door, hinges, lip seals, inner tank, and head surfaces.

- Apply graphite powder and/or vacuum grease to lip seals and O-ring seals as recommended by OEM.

3. Inspect molybdenum nuts and other fasteners for integrity; replace if damaged.

4. Inspect shield retaining pins for tightness and verify washers and cotter pins are intact.

5. Verify chamber pressure switch settings conform to OEM specifications.

III. Water System — Inspection

1. Inspect water lines, fittings, and hoses for leaks, corrosion, and overheating; replace as needed.

2. Test water flow switches and safety interlocks for proper operation.

IV. Electrical System and Controls — Inspection and Maintenance

1. Measure element resistance to ground; report deviations.

2. Inspect vacuum gauges for accuracy and function.

3. Verify control panel and indicator operation.

4. Inspect power feed-through bars, secondary power cables, and electrical connections for corrosion or looseness.

5. Inspect cabinet and junction box wiring and connections.

6. Clean control cabinet interior and power supply units.

7. Test fuse continuity; replace defective fuses.

8. Inspect transformer secondary cables, resistors, and wiring for damage or overheating.

9. Verify Power Control Unit (PCU) voltage output meets OEM specifications.

V. Gas Cooling, Backfill, and Pneumatic Systems — Inspection and Maintenance

1. Verify backfill valve switch settings.

2. Inspect cooling blowers for operation and cleanliness.

3. Inspect pneumatic system components including regulators, lubricators, and filters.

4. Lubricate air line lubricators per OEM or supplier instructions.

5. Inspect pressure switches for correct operation.

6. Inspect backfill gas lines, fittings, and connections for leaks or damage.

7. Verify blank-off pressure on vacuum pumps as specified by OEM.

8. Inspect cooling motor and gas blower motor bearings per OEM instructions.

- Note: Some motors may have sealed bearings requiring replacement only; confirm with OEM.

9. Inspect pressure relief valves for proper operation.

10. Perform an annual helium leak check of the complete furnace using helium supplied by the Government.

VI. Lubricants and Consumables

· Use only OEM-approved lubricants and consumables per the manufacturer’s manuals.

· Document all lubricants used and parts replaced in maintenance records.