Attachment 1-XRD_SOW .docx

STATEMENT OF WORK

TITLE: X-Ray Diffractometer April 25, 2023

*Paragraphs in red font with brackets are for response clarification and will be removed in the final award.

I. BACKGROUND INFORMATION

The Precision Imaging Facility (PIF) at the National Institute of Standards and Technology (NIST) is a multiuser facility for the characterization of materials and devices in support of multiple projects. Materials characterization allows NIST scientists to make direct correlations between material processing, (nano)structure, and resulting properties. This work includes the use of an x-ray diffractometer (XRD) to characterize solid state samples, such as thin films and epitaxial layers. Physical and material properties of interest include phase identification, film thickness, lattice constants, rocking curves, reciprocal space maps, and stress.

An XRD instrument includes the following core components and subsystems: (1) A stage or cradle for mounting the sample of interest (2) A goniometer (3) An x-ray source (4) A detector (5) Optics for both the incident and diffracted beams (6) Additional hardware and software to interface with the XRD for collection and analysis of measurement data. XRD measurement modalities include conventional thin film θ/2 θ measurements, thin film high-resolution x-ray diffraction (HR-XRD), X-ray reflectivity (XRR), grazing incidence diffraction (GID) with both in-plane and out-of-plane measurements, pole figures, texture analysis, rocking curves, reciprocal space maps, in-plane diffraction, and small angle x-ray scatting (SAXS).

II. SCOPE

The Contractor shall deliver and install one XRD instrument with features as defined in the “Minimum Requirements” section inclusive of FOB Destination. Control and support computers will also be included, as well as all software as defined in the “Minimum Requirements” section. At least two days of in-person, on-site training will be provided for personnel and the system will be covered under warranty for at least one (1) year to include all parts, software, labor, and travel.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below.

CLIN 0001 X-Ray Diffractometer (XRD) Instrument Description: XRD instrument, including all necessary hardware and software for full operation; Quantity: one (1) each.

General Description:

The XRD Instrument shall:

· Accept solid-state samples, including thin films (as thin as 1 nm), epitaxial layers, powders, and nanostructures (supported by and arrayed on wafers or chips)

· Illuminate the sample with x-rays

· Detect and measure x-rays diffracted by samples

· Collect and analyze the measured data to characterize the material and crystallographic properties of the samples.

Technical Specifications:

A. Instrument Configuration:

· The XRD Instrument shall be capable of the following types of measurements: x-ray diffraction (including high-resolution x-ray diffraction), x-ray reflectivity (XRR), grazing incidence diffraction (GID) (including in-plane and out-of-plane), transmission and reflection small angle x-ray scattering (SAXS), pole figures, texture analysis, reciprocal space mapping, and in-plane diffraction.

· The XRD Instrument shall be capable of measuring the following material and crystallographic properties: crystal phase, film thickness (for film thicknesses ranging from less than 3 nm to greater than 400 nm, with sub-nm resolution for films less than 5 nm thick), stress (ranging from ~1 MPa to ~1 GPa), surface roughness (including for films with roughness equal to or lower than 0.5 nm), interfacial roughness, in-plane and out-of-plane lattice constants, and rocking curves, as well as particle size and distribution (for powders and nanostructures).

· The XRD Instrument will be operated in a multi-user environment. To facilitate ease-of-use by multiple users, the XRD instrument shall:

· Have modular components that are reconfigurable for different measurements

· Be self-aligning or have automated alignment capabilities.

· The XRD Instrument shall include a suitable enclosure.

· The XRD Instrument shall meet conventional standards for operator safety, including those for the electrical system, x-ray radiation, and mechanical hazards. The XRD instrument shall comply with relevant federal safety regulations.

· The XRD Instrument shall consist of all new, commercially available items. Prototypes, first-article systems, demonstration models, used or refurbished instruments will not be considered for award.

B. X-Ray Source:

· The XRD Instrument shall include a Cu-anode, sealed-tube source of K-alpha x-rays.

· The source shall have a beam voltage of at least 40 kV with at least 1.5 kW operational x-ray tube power.

· The source shall be operable and reconfigurable as both a point or a line source, as needed for the suite of measurement capabilities detailed in section III.A. Reconfiguration between point and line source modes should be straightforward and should not require significant realignment.

· Note that CLIN 0002 below is an option to replace the sealed-tube source with a rotating anode source.

C. Goniometer and Sample Stage:

· The XRD Instrument shall include a goniometer for adjustment of the source angle (source theta) and detector angle (detector theta).

· The goniometer shall have a precision of 0.0002 degrees or better.

· The XRD Instrument shall include a sample stage (or cradle) that accepts thin films (as thin as 1 nm), epitaxial layers, powders, and nanostructures (supported by and arrayed on wafers or chips).

· The sample stage shall accommodate sample sizes ranging from 4” (100 mm) diameter wafers down to single chips with lateral dimensions as small as a few mm.

· The sample stage shall translate in the lateral (x and y) directions at least ±38 mm.

· The sample stage shall be capable of full 360-degreee sample azimuthal rotation (phi), and tilt (chi or psi) of at least a quarter circle. The sample stage shall have additional tilt axes, as needed, to maintain alignment such that once the sample tilt is aligned, phi rotations do not significantly alter the sample tilt alignment.

· If any additional, exchangeable sample stages (or cradles) are required for the suite of measurement capabilities detailed in section III.A, the XRD system shall include such stages.

· The sample stage shall include attachments to accommodate a variety of substrates and/or sample configurations, such as: wafer chucks (vacuum or clamped) of various diameters, thin film holders, etc.

· Note that CLIN 0003, CLIN 0004, and CLIN 0005 below are options for inclusion of additional, variable-temperature stages.

D. Detector:

· The XRD instrument shall include an area detector. If any additional, exchangeable detectors are required for the suite of measurement capabilities detailed in section III.A, the XRD system shall include such detectors.

· The detector(s) shall include at least one area detector and any additional, necessary detectors such that the XRD instrument can operate in 0D, 1D, and 2D modes.

· The area detector shall have an active area of at least 2500 mm2, shall have a pixel size no larger than (100 µm x 100 µm), and a maximum count rate of 1,000,000 cps/pixel or better. Preference will be given for area detectors that exceed these specifications.

· The detector shall suppress/minimize background noise.

E. Optics and Configuration:

· The XRD instrument shall include all incident and diffracted beam optics required for the suite of measurements detailed in III.A. The instrument shall include all necessary beam masks, slits (e.g. anti-scatter slits, divergence slits, height limiting slits, receiving slits, and/or beam shaping slits), mirrors, attenuators, filters, and other optical modules. Specific examples of the types of measurements required by the government are given in a table in paragraph L below. For example, the XRD instrument shall include all optics required for XRR thickness measurements of films with thickness ranging from less than 3 nm to greater than 400 nm.

· All beam optics shall be easily re-configured as required for different measurement scenarios, without realignment or with self-alignment or with automated re-alignment.

· The system shall include optical module(s) for tight focusing of the incident beam to spot sizes or 100 µm or better for local measurements. Software and/or hardware shall be included that enables navigation to areas of interest on the sample with lateral positioning accuracy on the order of 100 µm or better, e.g. with an in situ camera showing the sample and/or map of the sample.

F. Enclosure and Utilities:

· The XRD instrument shall include an enclosure with easy and open access. The enclosure shall meet all relevant federal safety regulations, including all relevant regulations related to X-ray radiation.

· If a water-cooled chiller or heat exchanger is required, the contractor shall supply it. If a water-cooled chiller or heat exchanger is required, the contractor shall provide the cooling power (in kW) that is required for the XRD system. This is to allow future replacement chillers to meet the XRD system’s cooling power requirements.

· The XRD instrument shall include any required high-voltage supplies.

· The system and all of its components shall be able to be powered by either 120 V/60 Hz single phase power or 208 V/60 Hz single phase or three phase power. If the instrument requires power other than those describe above, the contractor shall provide a suitable transformer that can be powered using the above electrical specifications.

G. Control Hardware and Software:

· The XRD instrument shall include a computer that interfaces with the system to control all measurements, collect data, and analyze results. This computer shall not require internet/wide area networking for full operation.

· The XRD instrument shall include all software required for instrument control, automated alignments, data collection, and analysis. The software shall be capable of recognizing when the hardware configuration (e.g. installed optics modules) is incompatible with a requested measurement.

· The software shall allow the user to export the data into an open-source, non-proprietary file format.

· The XRD Instrument shall include a powder diffraction database.

· The XRD Instrument shall include an additional site-license (as needed) for post-measurement analysis on a computer not connected to the XRD instrument.

H. Accessories

· The XRD Instrument shall include any and all accessories required to perform the suite of measurements detailed in III.A. Necessary accessories will include any required sample holders (e.g. for 1 cm x 1 cm or smaller chips, 3 inch wafers, 4 inch wafers, powders, and 150 mm (6 inch) wafers), spacers, optical modules, small tools for adjustments or reconfiguration, sample alignment accessories, and/or a fluorescent screen, as needed.

· The XRD Instrument shall include any and all compressors, chillers, power supplies, computers, and other electronics required for full operation.

· The XRD Instrument shall include a silicon reference standard.

I. Warranty and Service:

· One (1) year warranty (to cover parts, labor, and travel) shall be included with the base instrument.

· Warranty start date is the date of site acceptance.

· The warranty shall cover the entire system and include on-site, telephone, and e-mail support. The contractor shall respond to support requests from NIST within two (2) business days of the request.

· The contractor shall perform preventative maintenance on the XRD instrument at least once during the one (1) year warranty period.

· The warranty shall include software updates necessary for proper tool operation and accurate data analysis.

· All costs including parts, labor, travel, and other expenses necessary to repair the system (including all Contractor supplied hardware) shall be borne solely by the contractor at no additional cost to the U.S. Government.

· Additional option years of warranty or service agreements shall be supplied by the Contractor as detailed in CLIN 1001, CLIN 2001, CLIN 3001, and CLIN 4001 below.

J. Delivery:

· Upon successful factory testing, the contractor shall be responsible for delivering the XRD Instrument to its final location in a NIST-designated laboratory at 325 Broadway, Boulder, Colorado, 80305. This is to include all required rigging from the delivery truck to final tool placement in the NIST-designated laboratory.

· During transport to final location, the system components shall be able to pass through a freight elevator with doors that are 7 feet 11 inches tall and 8 feet wide, a platform with an entrance door to back length of 9 feet and a width of 13 feet, a cab height of 7 feet 11 inches, and a weight limit of 10,000 pounds.

· The contractor shall provide personnel that pass required government background checks to be issued badges for work on site.

· The contractor shall schedule all visits to NIST for US citizens or permanent residents with the TPOC at least 2 weeks before arriving at the site. The contractor shall schedule all visits to NIST for non-US citizens or non-permanent residents with the TPOC at least 6 weeks before arriving at the site.

K. Installation:

· The system shall be installed by the Contractor and meet contract specifications no later than six (6) weeks after delivery. Installation, at a minimum, shall include (i) uncrating/unpackaging of all equipment, rigging, set-up, and connection of the system to all necessary utilities, gas lines, etc., (ii) demonstration of all specifications, and (iii) removal and disposal of all associated crating, packing materials, and associated debris. Onsite installation and demonstration shall be done at NIST, 325 Broadway, Boulder, CO - Building 81.

L. Acceptance:

· Factory Acceptance: Before shipping the system, the contractor shall provide the Government a standard factory acceptance report demonstrating that the XRD Instrument performs according to the contractor’s standard factory acceptance test.

· Site Acceptance: The Contractor shall conduct their standard site acceptance test on standard reference samples, e.g. on a silicon reference sample. In addition, at the NIST site the Contractor shall acquire data on the XRD instrument on NIST-supplied test specimens including thin films and epitaxial layers. The specimens and the measurements required for acceptance are described in the table below. The data shall be required to demonstrate conformance with the performance specifications defined in the Minimum Requirements section of this document.

· Site Acceptance Table

M. Travel

· The contractor shall be responsible for all travel expenses for their personnel.

N. Contractor Supplied Materials

· The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

O. Materials Safety

· If the any components of the XRD system contain Beryllium, the contractor shall provide information about safe operating procedures and safety controls/mitigation related to exposure to Beryllium, including but not limited to inhalation of particulates.

P. Training:

· The contractor shall conduct at least two days of on-site training sessions, for up to five (5) users at NIST (Boulder).

· The training shall provide a thorough demonstration of all system/solution functions, basic system maintenance, data analysis, data administration, as well as basic troubleshooting.

· The training shall include an overview of all safety features of the instrument and safe operating procedures.

· Note that an option for extended applications training is described below in CLIN 0006.

IV. OPTIONS FOR X-Ray Diffractometer Instrument (XRD) – Options for XRD Instruments. The following options if exercised, shall be exercised in accordance with the below:

Option Contract Line Item (CLIN)

CLIN 0002 Rotating Anode Source OPTION Description: Rotating Anode X-Ray Source in lieu of a Sealed Tube Source Technical Specifications:

A. Rotating Anode X-Ray Source

· The XRD instrument shall be configured with a rotating anode X-ray source. To be clear, if the Government executes this option, the rotating anode source shall be provided in lieu of the sealed tube source (See CLIN 0001, III.B).

· The rotating anode shall be a Cu source.

· The source shall have at least 6.0 kW operational power. Preference will be given to output powers that exceed these specifications.

· This option shall include any modifications to the beam optics, sample stage/cradle, or other components that are necessitated by switching from a sealed tube source to a rotating anode source.

· This option shall include any pumps, compressors, chillers, or other equipment required to fully operate the rotating anode source.

Furthermore:

· The Government will exercise this option within thirty (30) days of the award of the Contract.

· Delivery, installation, acceptance, and training shall be simultaneous with CLIN 0001

· If this option is exercised, the Warranty on CLIN 0001 shall also cover this all components that are included in this option.

· [The contractor shall include details in their quote of how the base warranty and any subsequent extended warranty/service contract options (CLIN 1001, 2001, 3001, and 4001) need to be revised in order to cover the rotating anode, including options for pre-purchase of a second anode that can be rotated into the instrument during anode maintenance, to provide uninterrupted operation of the XRD instrument.]

CLIN 0003 High Temperature Sample Stage/Cradle OPTION Description: Additional Sample Stage for Variable High Temperature (25 ͦC to 1100 ͦC) Measurements Technical Specifications:

A. Variable High Temperature Sample Stage

· The system shall include an exchangeable variable-temperature sample stage/cradle in addition to the sample stage supplied with the base configuration (see CLIN 0001, IIIC).

· The temperature range of the variable temperature stage shall span room temperature (about 25 ͦC) to 1100 ͦC. Preference will be given to stages with temperature ranges that exceed this range, e.g. up to 1500 ͦC.

· The temperature of the stage shall be software controlled. Preference will be given for automation of temperature-dependent measurements.

· Preference will be given if the variable high-temperature stage allows for non-ambient environments, such as vacuum, nitrogen, and inert gas.

· Preference will be given to sample stages that do not have exposed Beryllium as part of the construction. If the sample stage contains Beryllium, the contractor shall include information about safe operating procedures and safety controls/mitigation related to exposure to Beryllium, including but not limited to inhalation of particulates.

Furthermore:

· The Government will exercise this option within thirty (30) days of the award of the Contract.

· Delivery, installation, acceptance, and training shall be simultaneous with CLIN 0001

· If this option is exercised, the Warranty on CLIN 0001 shall also cover this high temperature stage.

CLIN 0004 Cryogenic Temperature Sample Stage/Cradle OPTION Description: Additional Sample Stage for Variable Cryogenic Temperature (77 K to 293 K) Measurements Technical Specifications:

· The system shall include an exchangeable variable-temperature sample stage/cradle in addition to the sample stage supplied with the base configuration (see CLIN 0001, IIIC).

· The temperature range of the variable temperature stage shall span liquid nitrogen temperature (about 77 K) to room temperature (about 293 K). Preference will be given to stages with temperature ranges that exceed this range.

· The temperature of the stage shall be software controlled. Preference will be given for automation of temperature-dependent measurements.

· Preference will be given if the variable high-temperature stage allows for non-ambient environments, such as nitrogen or inert gas.

Furthermore:

· The Government will exercise this option within thirty (30) days of the award of the Contract.

· Delivery, installation, acceptance, and training shall be simultaneous with CLIN 0001

· If this option is exercised, the Warranty on CLIN 0001 shall also cover this cryogenic transfer system.

CLIN 0005 Cryogenic Ultra-Low Temperature Sample Stage/Cradle OPTION Description: Additional Sample Stage for Variable Cryogenic Ultra-Low Temperature (Below 15 K) Measurements

Technical Specifications:

· The system shall include an exchangeable variable-temperature sample stage/cradle in addition to the sample stage supplied with the base configuration (see CLIN 0001, IIIC).

· The temperature range of the variable temperature stage shall be able to cool a sample to below 15 K.

Furthermore:

· The Government will exercise this option within thirty (30) days of the award of the Contract.

· Delivery, installation, acceptance, and training shall be simultaneous with CLIN 0001

· If this option is exercised, the Warranty on CLIN 0001 shall also cover this cryogenic transfer system.

CLIN 0006 Extend Applications Training OPTION Description: Extended on-site applications training on the XRD Instrument Technical Specifications:

· The Contractor shall provide applications engineer for five business days on site at NIST in Boulder, CO

· The applications engineer shall be responsible for training of NIST users as well as advanced applications training.

· The cost of this option shall be inclusive of all travel, lodging, and living expenses for the applications engineer.

· Please see the table of site acceptance test measurements above for typical applications of interest to NIST.

Furthermore:

· The Government will exercise this option within thirty (30) days after contract award.

· Extended applications training will be completed within one year of site acceptance

CLIN 0007 Re-Install Tool in New Location OPTION Description: Re-install and validate tool after it has been relocated to a new laboratory at NIST Boulder Technical Specifications:

· The system shall be de-installed by the Contractor and prepared for a relocation from one laboratory to another. Both the origin and destination laboratories shall be on the NIST Boulder site (325 Broadway, Boulder, Colorado).

· The system shall be re-installed by the Contractor in the destination laboratory. The contractor shall confirm that the system meets contract technical specifications (see CLIN 0001) in the destination laboratory.

· The cost of this option shall be inclusive of all travel, lodging, and living expenses for the Contractor staff.

Furthermore:

· The Government will exercise this option within thirty (30) days after site acceptance.

· Tool re-installation in the destination location will be completed within one year of site acceptance

IV. Maintenance and Warranty –

CLIN 1001 Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service Technical Specifications:

A. Extended Warranty and Service Contract

· Quantity one (1) Year – Extended Warranty and Service Contract that starts at the end of the base warranty and service contract in CLIN 0001. This service associated with this contract shall meet or exceed the initial one (1) year warranty and service included with the base instrument. To be clear, executing this option would result in NIST having a total of at least two (2) years of warranty and service.

· NIST can execute this option at any time so long as the tool (CLIN 0001) is still under an active warranty agreement.

CLIN 2001 Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service Technical Specifications:

A. Extended Warranty and Service Contract

· Quantity one (1) Year – Extended Warranty and Service Contract that starts at the end of the warranty and service contract in CLIN 1001. This service associated with this contract shall meet or exceed the initial one (1) year Warranty and Service included with the base instrument. To be clear, executing this option would result in NIST having a total of at least three (3) years of warranty and service.

· NIST can execute this option at any time so long as the tool (CLIN 0001) is still under an active warranty agreement or service contract.

CLIN -3001 Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service Technical Specifications:

A. Extended Warranty and Service Contract

· Quantity one (1) Year – Extended Warranty and Service Contract that starts at the end of the warranty and service contract in CLIN 2001. This service associated with this contract shall meet or exceed the initial one (1) year Warranty and Service included with the base instrument. To be clear, executing this option would result in NIST having a total of at least four (4) years of warranty and service.

· NIST can execute this option at any time so long as the tool (CLIN 0001) is still under an active warranty agreement or service contract.

CLIN 4001 Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service Technical Specifications:

A. Extended Warranty and Service Contract

· Quantity one (1) Year – Extended Warranty and Service Contract that starts at the end of the warranty and service contract in CLIN 3001. This service associated with this contract shall meet or exceed the initial one (1) year Warranty and Service included with the base instrument. To be clear, executing this option would result in NIST having a total of at least five (5) years of warranty and service.

· NIST can execute this option at any time so long as the tool (CLIN 0001) is still under an active warranty agreement or service contract.

VI. DELIVERABLES

Complete manuals for all third-party components shall be provided in the format that is available to the Contractor.

52 Weeks ARO (with delivery of instrument)

OPTION: CLIN 0002

Rotating Anode Source One (1)

52 Weeks ARO (with delivery of instrument)

OPTION: CLIN 0003

High-Temperature Stage One (1)

52 Weeks ARO (with delivery of instrument)

OPTION: CLIN 0004

Low-Temperature Stage

OPTION: CLIN 0005

Ultra-Low-Temperature Stage One (1)

52 Weeks ARO (with delivery of instrument)

OPTION: CLIN 0006

Extended Applications Training

OPTION: CLIN 0007

Re-Install

VI. PLACE OF PERFORMANCE

All work shall be completed at the Contractor’s facility. Installation of the instrument and training shall be performed at the customer’s site, NIST, 325 Broadway, Boulder, Colorado.

VII. PERIOD OF PERFORMANCE

The period of performance for all deliverables is 62 weeks from award offer (see IV Deliverables above), except for OPTION CLIN 0006 (Extended Applications Training) which shall be completed within one year after site acceptance and OPTION CLIN 0007 (R-Install in New Location) which shall be completed within one year after site acceptance. The base warranty shall last one (1) year after site acceptance. If executed, Extended Warranty/Service options (CLIN 1001, 2001, 3001, and 4001) will last up to four (4) additional years.

VIII. OPERATING HOURS

Delivery, Installation, and Training shall be completed at NIST, Monday – Friday during the normal operating hours of 8:00 a.m. - 6:00 p.m. (with the exception of Federal holidays and unanticipated closures).