Responses to Vendor Questions.docx

1. On the above RFQ on page 2 the following specifications appear in section 3 C:

· The sample stage shall accommodate sample sizes ranging from 4” (100 mm) diameter wafers down to single chips with lateral dimensions as small as a few mm.

· The sample stage shall translate in the lateral (x and y) directions at least ±38 mm.

One of the systems we are considering for response will carry up to 6 inch wafers however only 3 inch wafers can be fully mapped. 4 and 6 inch wafers are stationary. We don’t see wafer mapping specifically mentioned in the specifications. Will this configuration be acceptable?

It is acceptable for the system to carry 4 inch (~100 mm) or 6 (~150 mm) inch wafers, but only map a 3 inch (~76 mm) subsection of the wafer.

2. Additionally section 3 A mentions transmission and reflection small angle x-ray scattering (SAXS). From the description of the sample types transmission SAXS seems inconsistent. Can you please clarify the applications / samples for transmission SAXS?

The capability to do transmission SAXS was included by mistake and is NOT required. To be clear, our applications require SAXS to characterize nanoparticles and nanowires on substrates/supports. The system is NOT required to be characterize with nanoparticles in suspension with SAXS.

3. Finally, section 3 D specifies The area detector shall have an active area of at least 2500 mm2, shall have a pixel size no larger than (100 µm x 100 µm). We would offer a smaller detector area with higher resolution pixel rating that can be placed near to the sample to cover a comparable angular range of detection. This configuration offers the advantage that there is less extraneous scatter from air in the beam path so higher sensitivity is achievable. Will that configuration be acceptable or will the area of the detector be an absolute requirement?

No, the area of the detector is not an absolute requirement. Area detectors with comparable fields of view will be evaluated on their technical merits using a trade off method (angular range of detection, esolution, etc.). Therefore, a smaller detector placed closer to the sample to achieve a comparable angular range of detection will be considered equivalent, on this basis only, to the specified area (of at least 2500 mm2) detector placed further away.

4. I have been told by the OEM that they do not offer the rotating anode for this instrument, is this a must for your application needs?

The SOW is structured such that the Rotating anode is an option (CLIN 0002), but is not required as part of the base system (CLIN001).

NIST would encourage the vendor to respond to RFQ if they can provide a system that meets the specs of the base system, even if they can’t provide an option for the rotating anode.