Attachment 1 - Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: Highly Accelerated Stress Test Chamber

Lab: EL, 731.07

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST) Infrastructure and Materials Group within the Engineering Laboratory is seeking a Highly Accelerated Stress Test (HAST) Chamber capable of meeting the JESD22A11E standard to perform accelerated aging experiments as part of a study of long-term reliability of materials used in advanced packaging of semiconductor chips. This work is in support of the CHIPS Metrology program.

The CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem. This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas. For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program.

II. PURPOSE

The Infrastructure and Materials Group requires the acquisition of a highly accelerated stress test (HAST) chamber. This HAST chamber is essential to our CHIPS project focused on reliability of advanced packaging in heterogeneously integrated semiconductor devices. This capability directly supports the CHIPS R&D Metrology Program’s Grand Challenge to enable metrology for long-term aging studies of integrating components in advanced packaging. By providing the semiconductor industry with an accurate material property database of polymeric packaging components throughout long-term aging and a new, more accurate reliability model, long-term reliability design efficiency (both time and cost savings) will be greatly improved.

This HAST chamber will allow for accelerated aging at variable temperature, humidity, and pressure to study the effect of thermal environment, including direct in-situ temperature and resistance monitoring throughout samples, of polymeric components (e.g., underfills, redistribution layers, and thermal interface materials) used in advanced packaging of heterogeneously integrated semiconductors. This is a critical requirement to study the impact of different long-term aging environment (e.g. the impact of different thermal history) experienced by real-world semiconductor devices. This will allow for material properties to be measured throughout the aging process. The measured material properties will be provided as part of an open-source database and will also be used as inputs for developing a new reliability model, both of which will be provided to industry stakeholders.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental or prototype items will not be considered. The use

2 | P a g e of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: HAST Chamber Quantity: 1

A. Technical Specifications

a. Size

i. Must accommodate multiple samples up to 300 mm in diameter (i.e., 300 mm wafers).

ii. Must have a minimum of two shelves (not including bottom shelf).

iii. Minimum of 21 L interior volume.

b. Accelerated Stress Testing

i. Temperature

1. Minimum temperature of 105 °C or lower.

2. Maximum temperature of 142 °C or higher.

ii. Pressure

1. Minimum testing pressure of 0.020 MPa or lower.

2. Maximum testing pressure of 0.392 MPa or higher.

iii. Humidity

1. Minimum relative humidity of 75% RH or lower.

2. Maximum relative humidity of 100% RH.

c. Must have built in water supply tank. Size must be provided.

d. Must comply with JESD22A11E standard testing.

e. Power requirements, required receptacle, and plug (if required) must be provided.

Option Line Item 0002:

Description: Terminal Bias Panel (Option can be exercised at time of award) Quantity: 1

A. Technical Specifications

a. Side connection panel to accommodate wires for in-situ monitoring (data acquisition) and low-current bias application.

i. Connection panel must be located on oven side (not the rear) to provide wire access.

ii. The monitored test vehicles will have 300-400 resistance-based wired connections. Ideally the connection panel will be able to accommodate all 300-400 wires (for resistance-based measurements). Fewer connections will still be considered, although preference will be given to instruments that can accommodate a higher number of connections.

iii. Provide current and bias limits to allow for in-situ bias application during testing.

IV. SCHEDULE OF DELIVERABLES

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Deliverable

Number Description Quantity Due Date

Place of Delivery 1 HAST Chamber 1

No later than 27 weeks after receipt of order.

NIST (Gaithersburg)

2 Terminal Bias Panel, if option exercised

1 No later than 27 weeks after receipt of order.

NIST (Gaithersburg)

PLACE OF PERFORMANCE

Onsite at NIST Gaithersburg, Building 226.

Regular Business Hours Regular business hours are Monday through Friday, 8:30 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

8 months from the date of award for instrument delivery to include training. This does not include warranty.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ Ashlee Aiello/226

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than three weeks after delivery to install. Installation, at a minimum, shall include

4 | P a g e uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 226. All installation requirements are identified below:

System start up, operation verification, overview of controls and safety features. Site preparation including electrical receptacle will be handled by NIST prior to installation.

VII. TRAINING

The contractor shall conduct an onsite training session for up to five users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:30 am to 5:00 pm immediately after installation and demonstration of specifications and must be completed no later than 14 days after installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST Contracting Officer’s Representative (COR) or Technical Point of Contact (TPOC) to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 days of the completed installation of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

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IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 12 months after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

Replacement parts, on-site labor

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the COR of fully installed system

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, 6 | P a g e secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

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The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.