Attachment 1- Statement of Work.pdf

STATEMENT OF WORK

Title: Custom semi-automated probe station (dry)**

Lab: GCPN 5.03, Reliability Test Platform

I. BACKGROUND INFORMATION

Silicon carbide field effect transistors (FETs) have emerged as a superior solution to silicon FETs for high power semiconductor applications. In recent years, the silicon carbide FET industry has grown at a significant rate with applications in photovoltaics, the power grid, electric vehicles, energy storage, and more. Despite the commercial success of these devices, the industry is plagued by reliability problems, often leading to the need for redundancy in integrated systems. Arguably most important among these issues is the extrinsic breakdown characteristics of the FET gate oxide. Studying this problem requires a deep statistical understanding of device behavior, and innovative solutions for pre-screening from the factory. A large-scale, multifaceted reliability testing platform is required in order to find solutions.

The CHIPS R&D Program Office intends to purchase a 200 mm, ultra-dry, semiautomatic wafer probing station which will facilitate the study of ultra-low gate leakage currents through silicon carbide FET gate dielectrics. This purchase aligns with the CHIPS R&D Programs Office’s mission to standardize new materials, processes, and equipment for microelectronics research. The resulting data will be compared to statistical breakdown data obtained through our effort to create a massively parallel testing platform. The data will also be compare to that of industry standard pre-screening tests on identical samples in order to verify or dispute their accuracy. The ability to conduct these measurements in an ultra-dry environment will ensure that leakage current paths do not form due to adsorbed water on the silicon carbide surface.

Similar methodology should be applied to other gate oxide reliability problems in the future.

II. PURPOSE

NIST intends to deliver verified test methods for wide-bandgap semiconductor power device breakdown and threshold instability. One aspect of this effort is the exploration of ultra-low leakage currents through gate oxides. This equipment procurement will directly facilitate this effort.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: 200 mm, ultra-dry, semiautomatic wafer probing station Quantity: 1

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A. Technical Specifications

a. Must be a semiautomatic wafer probing station capable of probing wafers up to 200 mm in diameter

b. Must be capable of probing via pattern recognition on individual, pre-diced dies

c. Must be capable of probing pad sizes as small as 40 µm x 40 µm, with a pitch of 60 µm using blade-style, coaxial probe tips

d. Must include a heated wafer chuck capable of reaching temperatures of

200 degrees Celsius

e. Must include digital microscope capable of imaging 10 µm features

f. Must include user-friendly software for control of probing and microscope manipulation

g. Must be isolated in an ultra-dry environment defined as having less than 1 part per million H2O at the time of measurement

h. Must be isolated from vibration due to equipment supporting the maintenance of the ultra-dry environment

i. The ultra-dry environment:

i. Must be capable of reaching ultra-dry conditions, as defined above, within 8 hours (or less) from ambient laboratory conditions/humidity

ii. Must allow for samples to be loaded into and unloaded from the environment with tweezers in a user-friendly and ergonomic manner

iii. Must have a sample staging area large enough to fit at least two additional 200 mm diameter wafers

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 200 mm, ultra-dry, semiautomatic wafer probing station

No later than 24 weeks after receipt of order.

NIST (Gaithersburg)

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 4 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for

3 | P a g e acceptances (e.g., draft plans, drawings, etc.). We request to review a draft plan and technical drawings for the ultra-dry environment, and any other non-standard components within 8 weeks of the contractor’s acceptance of this task.

PLACE OF PERFORMANCE

Manufacturing of the product will take place solely at the contractor’s site. Final assembly and setup may occur at either the contractor’s or government’s site. Training and any continued contractor support must occur at the government’s site.

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Seven months from the date of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 225 Gaithersburg, MD 20899 ATTN: Stephen Moxim

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than two weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 225.)

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VII. TRAINING

The contractor shall conduct training session for up to 3 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8am to 5pm Eastern Standard Time immediately after installation and demonstration of specifications and must be completed no later than 7 days after installation. Further training requirements are identified below:

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Reaching ultra-dry conditions (<1 ppm H2O) within 8 hours starting from ambient

2. Whole-wafer semiautomatic probing of SiC wafer

3. Demonstration of pattern-recognition-based semiautomatic probing

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance

5 | P a g e specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY (Remove if no warranty is required) The contractor shall warranty the entire system for a period of a minimum of three years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

Warranty shall commence upon acceptance of the system by the Government.

X. PAYMENT SCHEDULE

A payment of 25% of the total award amount can be processed upon the Government’s acceptance of draft plans and technical drawings (approx. 8-10 weeks after the date of award

A payment of 50% of the total award amount can be processed upon delivery of the complete system (approx. 24 weeks after the date of award)

A payment of 25% of the total award amount can be processed upon the Government’s acknowledgement that the system passed all performance tests (approx. 28 weeks after the date of award)

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

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• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL (Remove if not applicable) Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

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Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.