Attachment 1 - Statement of Work.pdf

STATEMENT OF WORK

Acoustic enclosure for environmental AFM

[Requesting Lab/Division: MML/643]

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

Developing a seamless microscale heterogeneous integration of modular dies (chiplets) in system-on-a-chip (SoC) is essential to fully harness the potential of advanced packaging. To do that, the measurement of physical properties like size, thermal, mechanical, etc. for films, surfaces, buried features, and interfaces was identified as a critical element in the “Enabling Metrology for Integrating Components in Advanced Packaging” challenge of the CHIPS R&D program at NIST. The semiconductor industry needs to understand, predict, and control the thermal management and mechanical incompatibilities among the various interfaces and building blocks of an SoC. These needs can be addressed through state-of-the-art nanoscale and microscale thermomechanical property measurements that are to be performed in MML/643/Group 9 on materials and structures used in advanced packaging. To perform nanoscale mechanical property measurements as a function of temperature (up to 250 °C) we will use an environmental Atomic Force Microscope (AFM) capable of performing nanoscale mechanical measurements in temperature and gas-controlled environment. The AFM must be also located inside an acoustic enclosure that will provide further mechanical and thermal isolation. The acoustic enclosure that was identified to meet our requirements shall have capabilities for ambient noise isolation, temperature regulation, and gas purge. The enclosure shall also have full-side open (vertical door/doors) access to facilitate direct and easy access to the hosted environmental AFM.

II. SCOPE

The goal of this contract is to supply, install and train new users on an acoustic enclosure for an environmental AFM system for the MML/643/Group 9 lab. The Contractor shall deliver a quantity of one (1) acoustic enclosure with full-side open access and temperature regulation that meets all the requirements included in the listed technical specifications.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below.

All items must be new. Used or remanufactured equipment will not be considered for award.

Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation.

Line Item 0001:

Description:

Quantity:

A. Technical Specifications

a. The acoustic enclosure shall have internal dimensions within few inches of an internal volume given by 40 inches x 40 inches x 40 inches.

b. The acoustic enclosure shall have side (vertical) doors for 180 degree access.

c. The acoustic enclosure shall have the inside base at a height level close to 36 inches.

d. The acoustic enclosure shall have welded steel frame to provide increased stiffness and dampen the vibrations

e. The acoustic enclosure shall provide acoustic noise isolation with sound loss of

35 to 50 dB within the range of few tens of Hz to few kHz.

f. The acoustic enclosure should provide temperature control above room temperature within half of Celsius degree.

g. The acoustic enclosure shall provide gas purge capability.

h. The acoustic enclosure shall have pass-through cable clamp for applications with cables and an inlet/outlet attached to the enclosure.

IV. DELIVERABLES

Standards of Acceptance: The NIST SME or COR shall review the above deliverables (delivery of the instrument, installation of the instrument, and training) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 14

Milestone Description Due Date Format

1 Delivery of one (1) acoustic enclosure with full-side open access and temperature regulation.

6 months after award

Hardware

2 One (1) installation Within 21 days after receipt of the instrument

Labor activity from the awarded vendor days of receipt of each deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

a. All work shall be performed at the National Institute of Standards and Technology, 100 Bureau Dr., Building 217/D115, Gaithersburg, MD 20899.

b. The government will provide access to Building 217/D115 to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

VI. PERIOD OF PERFORMANCE/LEAD TIME

The period of performance will take approximately 35 weeks ARO.

Item Description Period Date(s) Factory Acceptance 10 weeks ARO Site Visit 12 weeks ARO System Delivery 30 weeks ARO Installation / Facilitization 3 weeks post delivery Commissioning the system 2 weeks post facilitization

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: C/O/ POC/COR (Name and Building Number) POC: Gheorghe Stan, 217/B107 Gaithersburg, MD 20899

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to

NIST***

VIII. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 3 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 217/D115.) All installation requirements are identified below: No other requirements are needed.

IX. TRAINING

The contractor shall conduct a training session for up to 2 users at NIST during installation. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training shall be completed at NIST Monday – Friday during normal operating hours immediately after installation.

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

X. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. List performance tests here

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within two weeks of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XI. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

XII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

Installation docs provided 25% Factory Acceptance 20% Delivery 15% Successful Inspection and Acceptance

40%

Post Acceptance Wrap up Meeting 10%

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIII. ATTACHMENTS

a. No attachment.

XIV. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XV. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XVI. EXPERIENCE REQUIREMENTS (delete if not applicable)

a. The Contractor personnel must be knowledgeable with training and/or installation.

XVII. MISCELLANEOUS INFORMATION (delete if the requisition does not require the

Contractor to have access to Campus)

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 9:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site The visit must be planned at least 3 weeks prior to site visit.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.