Attachment 1 Statement of Work.pdf

STATEMENT OF WORK

High-temperature vacuum instrumented indenter

MML/643

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps the National Institute of Standards and Technology (NIST) will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

In the CHIPS R&D Metrology Program, the measurement of physical properties of materials, films, surfaces, buried features and interfaces has been identified as a critical element in several grand challenges (GC): GC 3 - Enabling Metrology for Integrating Components in Advanced Packaging, GC2 - Advanced Metrology for Future Microelectronics Manufacturing and GC4 - Modeling and Simulating Semiconductor Materials, Designs, and Components. The reason for that being the urgent need of the semiconductor industry for accurate data on material properties to understand, inform, predict, and control the design and performance for their devices and circuits. In particular, the reliable characterization of micro- and nanoscale thermo-mechanical properties of materials and structures is a crucial but currently unresolved challenge for the sector of Advanced Packaging.

To address these metrological needs, Material Measurement Lab/Materials Measurement Science Division (MML/MMSD) has been tasked to develop state-of-the art methodologies and perform measurements of the mechanical properties and behavior (such as hardness, modulus, fracture toughness) of semiconductor materials and chip structures at elevated temperatures (up to 350 °C).

To fulfill this mandate, NIST requires a high-temperature vacuum instrumented indentation (HTVI) system. This system shall be capable to perform instrumented indentation tests into a specimen heated to a defined elevated temperature (operation range for instrument from room temperature up to at least 400 °C). The purpose of this instrument is to obtain mechanical material properties as a function of a measured temperature above ambient conditions. The indentation tests at elevated temperature shall be performed in vacuum to avoid oxidation damage to the sample or indentation probe. Further, the HTVI system shall be capable:

To conduct static and dynamic instrumented indentations to enable efficient depth profiling of mechanical properties and rate dependent material response at elevated temperatures.

To conduct scratch testing to study delamination and adhesion behavior of materials at elevated temperatures.

To conduct imaging/profiling the residual indentation site using scanning probe microscopy (SPM).

II. SCOPE

The goal of this contract is to supply, install and train new users on the high-temperature vacuum instrumented indentation (HTVI) system for the MML/MMSD . The Contractor shall deliver a quantity of one (1) HTVI system, that meets all the requirements listed in the technical specifications of section III, and inclusive of FOB Destination delivery, installation, warranty and training.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below.

All items must be new. Used or remanufactured equipment will not be considered for award.

Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

After the installation of the HTVI system, the contractor shall perform a calibration of the components of the HTVI system as specified below.

1. General System Requirements

a. The HTVI system shall be comprised of:

i. a mechanical testing device capable of indentation and scratch testing at elevated temperatures,

ii. a vacuum enclosure in which the mechanical testing device can be installed and operated to conduct mechanical testing in controlled vacuum conditions.

b. The HTVI system shall have an automated x, y, z-axis staging system for sample manipulation and indenter-microscope alignment.

c. The HTVI system shall be fully controlled by software.

i. The control software shall also collect, display, analyze (using common methods for hardness and modulus extraction, e.g., Oliver Pharr) and store the measurement data generated by the HTVI system and the image data generated by the optical camera system.

ii. The control software shall be installed on a control PC with a Windows 10 operating system or later with Trusted Platform Module 2.0 or greater.

iii. The Contractor shall provide the control software and the control PC and any peripheral computer hardware (e.g., monitor, keyboard, mouse/keyboard).

d. The Contractor shall provide any peripheral vibration-damping equipment required to protect the HTVI system from shock and vibration and to guarantee operation of the HTVI system according to the technical specifications.

e. Further minimum technical requirements that the HTVI system shall meet are described in detail in the following paragraphs.

2. Instrumented Indentation Requirements

a. The HTVI system shall have the capability of measuring and reporting applied force, indentation displacement and time throughout the indentation cycle.

b. The HTVI system shall have the capability of applying predetermined test forces or displacements. The indentation cycle can be either force-controlled or displacement-controlled. The controlled parameters can vary either continuously or step by step and shall be customizable by the user within the operation range of the HTVI system.

c. The HTVI system shall have the capability of compensating for the machine compliance and of utilizing the appropriate indenter area function.

d. The HTVI system shall be capable to be frequently operated in ambient conditions.

e. The HTVI system shall have capable to produce indentation forces of up to 500 mN

(force resolution: < 5 µN) and to measure indentation displacements of up to 3 µm (displacement resolution: < 1 nm).

3. High-Temperature Indentation Requirements

a. The HTVI system shall have the capability of creating a local hot zone with feedback control to heat the sample to a constant temperature significantly above the ambient temperature and maintain a constant sample temperature for the duration of the measurements at elevated temperatures.

b. The HTVI system shall be capable to measure and assign a traceably calibrated temperature to the indentation contact using active tip heating and temperature sensing.

c. The HTVI system shall operate in a temperature range from room temperature (RT) up to 400 °C with a temperature control/resolution of ≤ 0.5 °C and a thermal drift of ≤ 0.2 nm/s (at RT) and ≤ 2 nm/s (at 400 °C).

d. The temperature measuring device(s) shall be calibrated over the entire operating temperature range of the HTVI system.

e. The Contractor shall provide analytical software suitable for extracting mechanical properties from high-temperature indentation tests (if offered by Contractor).

4. Vacuum Operation Requirements The vacuum enclosure of the HTVI system shall be configured in either one of the following two configurations:

a. Chamber configuration: The HTVI system shall have a vacuum chamber in which the mechanical testing device shall be installed and operated. The HTVI system in chamber configuration shall meet the following requirements:

i. The vacuum chamber shall be capable to operate at pressures ranging from 10-3 mbar to 10-6 mbar.

ii. The Contractor shall provide the vacuum chamber and any peripheral components required operating the chamber at vacuum conditions (e.g., turbo pump, ion pumps, fittings).

iii. In this configuration, the HTVI system shall have an optical camera system with a connected color camera for observation of the sample surface.

iv. The contractor shall provide the optical camera system and any needed peripheral components for its installation and operation.

b. SEM configuration: The HTVI system shall have a scanning electron microscope (SEM), in which the mechanical testing device shall be installed and operated. The HTVI system in SEM configuration shall meet the following requirements:

i. The SEM shall be equipped to operate at Low-Vacuum and ESEM modes.

ii. The Contractor shall provide the SEM and any necessary peripheral components to install and operate the mechanical testing device inside the SEM (e.g., feedthroughs, customized interface).

iii. The contractor shall provide a sample manipulation stage (e.g., tilt-rotation stage or orientation stage) to facilitate sample alignment within the SEM.

5. Dynamic Indentation Requirements

a. The HTVI system shall be able to conduct dynamic indentation testing by driving the actuator with a prescribed frequency and amplitude of oscillatory force or displacement with simultaneously measuring the resulting dynamic displacement or force. During a period of stiffness measurement, the frequency shall be constant.

b. The HTVI system shall be capable to operate in a dynamic frequency range from 0.1 Hz to 250 Hz with dynamic force amplitudes of up to 3 mN and dynamic displacement amplitudes of up to 2 µm.

c. The HTVI system shall be capable to conduct dynamic indentation testing in a temperature range from room temperature (RT) up to 400 °C.

6. Scratch Testing Requirements

a. The HTVI system shall be able to conduct scratch testing by of pressing an indenter tip onto the surface of a sample, using either a constant or an increasing load, while moving the sample or the tip at a constant speed.

b. The HTVI system shall be capable to conduct scratch tests with normal forces up to 500 mN, scratch speeds up to 50 µm/s and scratch lengths up to 25 µm.

c. The HTVI system shall be capable to conduct scratch testing in a temperature range from room temperature up to 400 °C.

7. Scanning Probe Requirements

a. The HTVI system shall be capable of scanning probe microscopy (SPM) where an indenter tip shall be used to perform line scans (up to 50 µm) and/or area scans (up to 50 µm x 50 µm).

b. The Contractor shall provide the SPM device and any needed peripheral components for its installation and operation.

8. Calibration Requirements

a. The calibration of the HTVI system shall be performed on-site after the installation of the system.

b. Instrumented Indentation: The HTVI system shall be calibrated according to the procedures set out in ISO 14577-2.

c. Dynamic Indentation: The HTVI system shall be calibrated according to ISO 14577-2 and shall be calibrated for the measurement of dynamic force, dynamic displacement, and frequency.

d. High-temperature Indentation:

i. The HTVI system shall be traceably calibrated for force, displacement, and instrument compliance over the operating temperature range.

ii. The test force and displacement calibrations and verifications at elevated temperatures shall be carried out using either of the methods described below.

Method 1: The force and displacement calibration shall be carried out by repeating the ambient temperature calibration procedures set out in ISO 14577-2 at elevated temperature.

Method 2: The verification shall be carried out by validating the ambient temperature calibrations at elevated temperature, for example, by demonstrating the influence of the indentation hot zone on the existing calibrations obtained at ambient temperature is negligible. Calibrations requiring the use of indentation into at least 2 suitable reference materials should use reference materials with values certified for the range of elevated temperatures being used.

iii. The verification of the instrument compliance shall be carried out according to ISO 14577-2 at ambient temperature. For test at elevated temperature, additional verification and calibration shall be carried out at the testing temperature using suitable reference materials, following the same procedure described in ISO 14577-2 Annex D.

iv. After calibration, the HTVI system shall pass an indirect verification according to ISO 14577-2 whilst operating at elevated test temperatures.

This shall be performed at each temperature using at least two suitable reference material certified for elastic modulus vs. T. If certified reference materials are not available, then reference materials whose dependence of elastic modulus on T is well known shall be used and its unique ID and property vs. temperature relationship reported. Young’s modulus and Poisson’s ratio values of reference materials at the testing temperature shall be used. The reference test pieces shall be mounted the same way as the test pieces, in order to have a mechanically equivalent compliance.

v. The HTVI system shall maintain its calibration over its operating temperature range.

e. Scratch testing: The HTVI system shall be calibrated according to the calibration guidelines established in international standards (e.g., ISO 20502, ASTM C1624).

9. Additional Requirements

a. The contractor shall provide 2 indenter tips (one Berkovich tip, one conospherical tip with 1 µm tip curvature) suitable for indentation testing at temperatures up to 400 °C.

b. The contractor shall provide two reference materials suitable for calibrating the HTVI system at room temperature 400 °C temperatures.

10. Warranty and Service Contract Requirements

a. The Contractor shall provide an extended warranty for the mechanical testing device of HTVI system at a minimum of 1 year with the initial award, followed by up to three option years, totaling up to a maximum of 4 years if all options are exercised.

b. The Contractor shall provide a Service Contract for Support and Maintenance at a minimum of 1 year with the initial award, followed by up to three option years, totaling up to a maximum of 4 years for the mechanical testing device of the HTVI system if all options are exercised.

c. The contractor shall provide a Service Contract for Support and Maintenance for a minimum of 1 year with the initial award, followed by up to three option years, totaling up to a maximum of 4 years for the vacuum enclosure of the HTVI system if all options are exercised. For HTVI system in SEM configuration, a Service Contract for Support and Maintenance provided by a third party (manufacturer/vendor of SEM) is acceptable but costs for Service Contract shall be included in the contract bid.

IV. DELIVERABLES

Milestone Description Due Date Format

1 Base Period: Specification of one

(1) complete set of infrastructure/site requirements for installation of HTVI system

Within 14 days of award of contract

Electronic (PDF, .doc, .docx, etc.)

2 Base Period: Delivery of one (1) HTVI system

Within 30 weeks of award of contract

Hardware and software

3 Base Period: One (1) Installation of HTVI system

Within 21 days of receipt of all

Labor activity by awarded vendor system components

4 Base Period: One (1) calibration of HTVI system

Within 7 days of installation of complete system

Labor activity by awarded vendor

5 Base Period: One (1) manual for HTVI system

Within 7 days of installation of complete system

Electronic (PDF) and paper copy

6 Base Period: One (1) training in operation of HTVI system

Within 14 days of calibration of system

Teaching activity by awarded vendor

7 Base Period: One (1) year extended warranty (Base Year)

Within 1 day of acceptance of HTVI system

Services as needed by awarded vendor

8 Base Period: One (1) year service contract

Within 1 day of acceptance of HTVI system

Services as needed by awarded vendor

9 Option Year 1: One (1) year extended warranty

Upon exercise of Option Year 1

Services as needed by awarded vendor

10 Option Year 1: One (1) year service contract

Upon exercise of Option Year 1

Services as needed by awarded vendor

11 Option Year 2: One (1) year extended warranty

Upon exercise of Option Year 2

Services as needed by awarded vendor

12 Option Year 2: One (1) year service contract

Upon exercise of Option Year 2

Services as needed by awarded vendor

13 Option Year 3: One (1) year extended warranty

Upon exercise of Option Year 3

Services as needed by

Standards of Acceptance: The NIST SME or COR shall review (list deliverable) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 21 days/weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

a. All work shall be performed at the National Institute of Standards and Technology (NIST), 100 Bureau Drive, Building 218/D012, Gaithersburg, MD 20899.

b. The government will provide access to Building 217/D015 to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

VI. PERIOD OF PERFORMANCE/LEAD TIME

Period of Performance or Lead time. This should define the period over which the project will occur. If different periods of performance apply to the different CLINs, this must be clearly stated in this section using actual dates, days, or weeks after receipt of order (ARO).

Item Description Period Date(s) Factory Acceptance 10 weeks ARO Site Visit 12 weeks ARO System Delivery 30 weeks ARO Installation / Facilitization 3 weeks post delivery Commissioning the system 4 weeks post facilitization Service contract 1-4 years after acceptance of HTVI system dependent of whether options are exercised.

Extended Warranty 1-4 years after acceptance of HTVI system dependent of whether options are exercised

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point

14 Option Year 3: One (1) year service contract

Upon exercise of Option Year 3

Services as needed by specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: POC Yvonne Gerbig (Bldg. 217/B107) Gaithersburg, MD 20899

VIII. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 4 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- 20899, Building 217/D015.

Additional installation requirements are identified below:

(1) Within 14 days of award of the contract, the Contractor shall provide all technical specifications of site/utility requirements (e.g., electrical power requirements, inert gas pressure, shelving and/or desk space) needed for the installation of the HTVI system.

IX. TRAINING

The contractor shall conduct an onsite training session for up to 2 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8 am to 5 pm immediately after installation and demonstration of specifications and must be completed no later than 14 days after installation and calibration of the HTVI system.

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system within 14 days of the award.

X. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 21 working days it will take to inspect, accept or reject after receiving training on the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XI. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

XII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

100% after receipt and acceptance by the NIST COR.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIII. ATTACHMENTS

a. No attachment.

XIV. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XV. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XVI. EXPERIENCE REQUIREMENTS

a. The Contractor personnel who will provide installation and training shall be experienced in the installation, calibration, operation and maintenance of the various components of the installed high-temperature instrumented indentation system.

XVII. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site. The visit must be planned at least 4 weeks prior to site visit.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.