Attachment 1-Statement of Work.docx

STATEMENT OF WORK

High-Throughput High-Resolution X-ray Laminography/Tomography System

I. BACKGROUND INFORMATION

The CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem. This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas. For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program

CHIPS Metrology researchers at NIST Gaithersburg require high-throughput high-resolution non-destructive three-dimensional (3D) X-ray imaging to support research within grand challenges for Advanced Metrology for Future Microelectronics Manufacturing, Enabling Metrology for Integrating Components in Advanced Packaging, and Standardizing New Materials, Processes, and Equipment for Microelectronics.

II. SCOPE

The Contractor must deliver one analytical instrument system meeting the specification provided below. Additionally, the Contractor must install the instrument as well as providing training, warranty, and service.

III. MINIMUM REQUIREMENTS

Contract Line Item Number (CLIN): 0001 Description: X-ray Laminography/Tomography System Quantity: One analytical instrument system

1. System Resolution and Scan Speed: The system must be able to resolve 1 µm Metal/Non-metal line and space pattern while operating with a scan speed of at least 0.5 mm3/min. Exceeding the resolution and scan speeds increases the value to the government and additional consideration will be given to systems that can exceed one or both parameters. The government anticipates this specification to be met in laminography mode.

1.1. Spatial resolution is defined as the minimum line pair thickness that can be resolved. For example, a 1 µm line pair is composed of a 500 nm-thick line of dark intensity and 500 nm-thick line of bright intensity in reconstructed three-dimensional (3D) images. Spatial resolution is not equivalent to voxel size. For this requirement, spatial resolution is assessed by the modulation of intensity along a line that is perpendicular to the metal/non-metal line and space pattern. The modulation of intensity between the metal voxels and non-metal voxels must exceed 10%.

1.2. Scan speed is defined as the cylindrical reconstructed volume in mm3 divided by total acquisition time not including time for reconstruction.

2. Scan mode

2.1. The system must be able to operate in XCL mode. Being able to operate in both XCL and XCT modes provides additional value to the government and a higher confidence rating will be given to a system that can operate in both modes. Systems that provide XCT using source/detector motions or sample pre-tilt holder will be considered.

2.1.1. An X-ray computed laminography (XCL) system is defined as a system that measures projection images at an oblique angle to the axis of rotation and is capable of reconstructing projection data to 3D images. The tilt angle is the angle between the central X-ray beam and the axis of rotation.

2.1.2. An X-ray computed tomography (XCT) system is defined as a system that measures projection images at 90 degrees to the axis of rotation and is capable of reconstruction projection data to 3D images.

2.2. The government expects that when operating in XCT mode, the system will provide equal or higher spatial resolution at slower scan speed compared to XCL mode. A higher confidence will be given for higher spatial resolution and faster scan speeds in XCT mode.

3. X-ray source

3.1. X-ray source must have spot size small enough for sub-micrometer spatial resolution scans.

3.2. X-ray source must have voltage range between 30kV and 160kV at minimum and maintain spot sizes for sub-micrometer resolution scans at any voltage within this range.

4. X-ray detector

4.1. X-ray detector must have at least 13 megapixels.

5. Samples Handling and Automation

5.1. The system must provide automatic (e.g. robot loading) for samples up to 100 mm × 100 mm × 20 mm. The sample cassette must hold at least 5 samples and the system must automatically load the sample from the cassette, perform the measurement, and unload the sample back to the cassette without user intervention. The sample handling robot is only required to load samples for XCL measurements.

5.2. The system must be capable of measuring any region of 300 mm diameter sample; however, the sample handling automation requirements do not apply to 300 mm diameter samples (e.g. the user loading each sample by hand is acceptable). The government expects that 300 mm wafers will be measured in XCL mode. The measurable region of a 300 mm diameter sample may be as small as 100 mm × 100 mm as long as the measurable region can be aligned anywhere on the 300 mm sample (e.g. by having the user offset the sample on the sample holder prior to loading).

6. Instrument Control Capabilities

6.1. The software must provide the capability to save a set of parameters known as a “recipe” that enable a user to load, perform, and save measurements for repeated studies.

6.2. The control software must offer built-in tiling capabilities to collect a series of adjoining volumes that can be stitched together into a single volume during reconstruction.

6.3. The instrument must allow user control of custom stage motions and image acquisitions. Graphical User Interface (GUI), Scripting, or Application Program Interface (API) implementations that meet this requirement are acceptable.

6.4. The instrument control PC and software must be controllable through Windows Remote Desktop to allow remote control of the instrument.

6.5. The system must include any scripting or application programming interface (API) options that are available from the manufacturer, including any documentation of these features.

7. Reconstruction Computers and Software

7.1. The computers systems included must allow for simultaneous data collections and reconstruction of previous scans. The government anticipates this requirement being met with an instrument control PC, and a separate reconstruction PC.

7.2. The system must include two identical PCs for reconstruction and data analysis. These PCs must be capable of generating 3D stitched volumes from at least 7 fields of view. The reconstruction PCs must be capable of visualizing 3D stitched volumes up to 1TB of size. A monitor, a keyboard, and a mouse must be provided with these workstations. One of these PCs can be used to control the instrument (the “control PC” listed in requirement 7.1).

7.3. The provided reconstruction software must provide the following options:

7.3.1. Radiograph (projections) pre-processing functions (e.g., flat field correction/gain correction)

7.3.2. Phase retrieval algorithm

7.3.3. Filtered backprojection algorithm (e.g., Feldkamp Davis Kress)

7.3.4. Iterative reconstruction algorithm

7.3.5. Ring artifact correction

7.3.6. Beam hardening correction

7.3.7. Capable of importing data from simulation software or from other XCT systems in standard image format (e.g., .tiff) for reconstruction

7.4. The provided analysis software must provide the following options:

7.4.1. Deep learning-based segmentation (e.g., u-net)

7.4.2. Manual labeling capability for segmentation and training data preparation

7.4.3. 3D visualization

7.5. The reconstruction PC and all of the software licenses used to meet these requirements must be accessible through Windows Remote Desktop to enable remote analysis of datasets.

8. Resolution Target Sample: The Contractor must supply one unit of either JIMA RT RC-02 Micro Resolution Chart for X-ray or equivalent. The resolution target must include features at the instrument specified resolution.

9. A standard prefilter kit shall be provided for manual insertion or pre-installed on automated filter changer.

10. Facility Requirements

10.1. Contractors must include a site requirements documents in their solicitation response.

10.2. Footprint of the system must not exceed 1.5 m × 2.5 m.

10.3. Electrical: The instrument may use any of the following power types: 208 VAC 60 Hz 3 phase power, 208 VAC 60 Hz single phase, 120 VAC 60 Hz single phase. NIST will provide outlets/disconnects to match Contractor specifications detailed in the site requirements document.

10.4. High-pressure air: Contractor must supply a compressor to provide high-pressure air to their system if the system requires high pressure air.

11. Safety: The instrument must include appropriate shielding and interlocks protect users from unintentional exposure to ionizing radiation.

12. Warranty

12.1. 1 year warrant covering the delivered hardware

12.2. Must include software updates released during the warranty period (1 year)

13. Training covering the essential functions and any required maintenance for up to 4 NIST staff (simultaneously). Training can occur at the completion of installation, but must be scheduled in coordination with the TPOC.

14. Installation of the analytical instrument system in building 216 on NIST’s Gaithersburg campus.

CLIN: 1001 – Option 1 Description: Service Contract for X-Ray Laminography/Topography System – Year 2 Quantity: 1 year Timeframe to Exercise Option: Anytime within the Period of Performance or at time of award Contractor must extend all coverages offered under the included warranty beginning at the end of the included warranty and continuing for one additional year.

CLIN: 1002 – Option 2 Description: Service Contract for X-Ray Laminography/Topography System – Year 3 Quantity: 1 year Timeframe to Exercise Option: Anytime within the Period of Performance or at time of award Contractor must extend all coverages offered under the included warranty beginning at the end of year 2 and continuing for one additional year.

CLIN: 1003 – Option 3 Description: Service Contract for X-Ray Laminography/Topography System – Year 4 Quantity: 1 year Timeframe to Exercise Option: Anytime within the Period of Performance or at time of award Contractor must extend all coverages offered under the included warranty beginning at the end of year 3 and continuing for one additional year.

CLIN: 1004 – Option 1 Description: Service Contract for X-Ray Laminography/Topography System – Year 5 Quantity: 1 year Timeframe to Exercise Option: Anytime within the Period of Performance or at time of award Contractor must extend all coverages offered under the included warranty beginning at the end of year 4 and continuing for one additional year.

IV. DELIVERABLES

Standards of Acceptance: The NIST COR or Technical Point of Contact (TPOC) shall review the deliverable and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 14 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

All work shall be completed at the contractor’s facility. Installation of the detector system and training shall be performed at NIST, Gaithersburg, MD facility. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m. with the exception of Federal holidays.

VI. DELIVERY TERMS

Delivery shall be F.O.B Destination or equivalent INCOTERMS of Deliveries duty paid (DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: TBD Gaithersburg, MD 20899

VII. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 2 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 216.

VIII. TRAINING

Training covering the essential functions and any required maintenance for up to 4 NIST staff (simultaneously). Training can occur at the completion of installation, but must be scheduled in coordination with the TPOC.

IX. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Scan resolution and speed: Scans of the provided resolution target will be used to verify the speed and spatial resolution of the system.

2. Sample handling robot: Samples on carriers will be loaded and measured in sequence without user intervention.

3. 300 mm wafer and stitching: A 300 mm wafer will be loaded by hand and measured in XCL mode. Seven adjacent fields of view will be acquired and stitched.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The Contractor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 2 weeks of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

X. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and in accordance with the descriptions in CLIN 0001.

XI. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with Contractor’s response to the RFQ for consideration.

XII. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XIII. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XIV. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

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