Attachment 1 - Statement of Work.docx

STATEMENT OF WORK

Title: Metrology of Purity and Contaminants in Solid Materials Glow Discharge Mass Spectrometer Lab: Inorganic Chemical Metrology Group (ICMG)

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, the National Institute of Standards and Technology (NIST) will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The Inorganic Chemical Metrology Group (ICMG) within the Chemical Sciences Division of the Material Measurement Laboratory at NIST performs elemental measurements using a variety of instrumental methods. With these methods, the ICMG fulfills stakeholder needs through the provision of NIST Standard Reference Materials (SRMs) and also develops such methods for the value assignment of elemental data to SRMs and for transfer to industry. For this project, the ICMG will develop new SRMs, Reference Materials (RMs), and Research Grade Test Materials (RGTMs) of high-purity solids currently lacking in chips manufacturing. This will enable more effective, efficient, and comparable characterizations of source materials, process control improvements, and further innovations in chips manufacturing.

To achieve these goals, the ICMG will develop new NIST capabilities in glow discharge mass spectrometry (GDMS). Research and development will be conducted in our laboratories on the Gaithersburg, Maryland campus. Through its efforts, the ICMG will provide the high quality purity assays and elemental contaminants quantitation information on solid materials that are important to the semiconductor industry. The results of these measurements will be transferred to industry as values assigned to new NIST SRMs and RMs, with RGTMs employed as precursors to SRMs and RMs. GDMS measurement results will be augmented with measurements performed using other methods.

II. PURPOSE

Material purity is critical to the semiconductor industry, reliable production of chips manufacturing, and future chips innovations. The industry needs the ability to characterize accurately and reproducibly the purity and to quantify contaminants in bulk solids and on otherwise clean surfaces. The ICMG will be purchasing a GDMS instrument to develop measurement methods, as well as NIST SRMs, RMs, and RGTMs, to assist industry with these measurement problems.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all minimum technical specifications identified below. Additional consideration will be given for contractors also providing some/all of the optional specifications.

All items must be new and be commercially available “off the shelf” products. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components is unacceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Glow Discharge Mass Spectrometry (GDMS) instrument Description: Instrument for elemental analysis of high-purity solid materials Quantity: One (1)

A. Minimum specifications

a. Capability to analyze electrically conductive, semiconductive, and nonconductive solids in the form of bulk pieces (including blocks, disks, wafers, wires, slugs, foils, pins) and powders directly in the solid state (i.e., without dissolution).

b. Capability to analyze solid samples with flat surfaces having a diameter of at least 40 mm.

c. Complete sampling of surface areas on the order of 80 mm2 or larger in a single analysis in a time frame on the order of 2 h or less.

d. Glow discharge source design must be optimized for analysis of high-purity samples, with easy cleaning between samples.

e. Measurement of most of the periodic table (at least 70 elements), including nonmetallic (C, N, O), semimetallic, and metallic elements, in a single analysis.

f. Provision of any peripheral equipment/features necessary to enable good analytical results for C, N, and O.

g. Mass-to-charge ratio range stretching from ≤5 amu to ≥260 amu, with rapid peak hopping and minimal hysteresis.

h. Limits of detection (LODs) for most elements on the order of 10 ng/g or better as measured in a high-purity metal matrix.

i. Wide linear dynamic range, from 100 % spanning down at least 12 orders of magnitude in a high-purity metal matrix.

j. Calibration based on measuring certified reference materials or based on instrument response tables (e.g., relative sensitivity factors).

k. Applicability of relative sensitivity factors (RSFs) developed on a VG9000.

l. Continuously variable mass resolving power from 400 (or lower) to at least 10,000; capability to hop between low, medium, and high resolving powers rapidly.

m. Equipped with detectors for isotopes at ultra-trace levels all the way to matrix levels, with automatic detector cross calibration.

n. Ability to run on Kr or another gas as an alternative to Ar to eliminate Ar related isobars that cannot be resolved even with high resolving power.

o. Minimal rate of argon consumption (e.g., ≤ 5 mL/min).

p. Cooling with liquid nitrogen for optimal temperature reduction to reduce background of atmospheric gases and enable analysis of samples with low melting points; cryogen handling equipment (e.g., Dewar) should be supplied with instrument.

q. Ability to analyze gallium.

r. Inclusion of all peripheral equipment needed for full operation (e.g., vacuum pumps, water chiller, glow discharge source cooling equipment, etc.).

s. Instrument to be supplied with compatibility with United States standard electrical power, including any needed transformers and line conditioners.

t. Instrument operation and data quality must be resistant to variations in laboratory environmental conditions.

u. Fully interlocked to protect instrument in case of power failure.

v. Dedicated computer for instrument control.

w. Fully functional software control of instrument with data acquisition and reduction and capability to download raw data, processed data, and instrument parameters in common file formats (e.g., spreadsheet, word processor) to facilitate report writing.

x. Fully documented instrument manual that describes all aspects of instrument setup and operation, data acquisition and processing, maintenance, and safety.

y. Readily available and prompt instrument repair/maintenance service.

B. Optional specifications (for which additional consideration will be given)

a. Lower limits of detection.

b. Depth profiling capability of flat surfaces to depths of a few micrometers.

c. Rapid sample throughput and analysis.

d. Maximal use of dry vacuum pumps in place of oil pumps.

e. Inclusion of consumables for high-purity materials analysis for 1 year or longer.

f. Inclusion of multiple glow discharge sources to enable uninterrupted operation while the last source used is being cleaned.

g. Inclusion of common sample preparation equipment (e.g., die and press).

h. Ability to process data on a remote computer (e.g., licenses for software to be installed on more than one computer).

i. Free access to software upgrades for a period of 5 years after installation and acceptance.

j. Instrument software provided on CD and/or other convenient media (e.g., memory stick) so that software can be reloaded in the event of computer malfunction or accidental corruption of software.

k. LIMS connectivity.

l. Service/maintenance contract for additional years beyond the first year.

m. Evidence that maintenance and repair services for the instrument will be available for at least 10 years.

n. Boxed equipment can fit through a doorway of width 48 inches.

Option Line Item 0002: Additional 12 month Consumables Kit Description: General Consumables and spare multiplier (This Option is exercisable at time of award) Quantity: One (1)

Option Line Item 1001: Option Year 1 Service/Maintenance Description: Annual service/maintenance for CLIN 0001 (This Option is exercisable any time prior to expiration of the current period) Quantity: One (1)

A. Minimum specifications

a. Warranty including labor, travel, accommodation expenses

b. Includes warranty repair and replacement on instruments parts.

Option Line Item 2001: Option Year 2 Service/Maintenance Description: Annual service/maintenance for CLIN 0001 (This Option is exercisable any time prior to expiration of the current period) Quantity: One (1)

A. Minimum specifications

a. Warranty including labor, travel, accommodation expenses

b. Includes warranty repair and replacement on instruments parts

Option Line Item 3001: Option Year 3 Service/Maintenance Description: Annual service/maintenance for CLIN 0001 (This Option is exercisable any time prior to expiration of the current period) Quantity: One (1)

A. Minimum specifications

a. Warranty including labor, travel, accommodation expenses

b. Includes warranty repair and replacement on instruments parts

Option Line Item 4001: Option Year 4 Service/Maintenance Description: Annual service/maintenance for CLIN 0001 (This Option is exercisable any time prior to expiration of the current period) Quantity: One (1)

A. Minimum specifications

a. Warranty including labor, travel, accommodation expenses

b. Includes warranty repair and replacement on instruments parts

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

(If exercised)

(If exercised)

(If exercised)

PLACE OF PERFORMANCE

NIST Gaithersburg, MD. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

6 months (4 months for delivery, up to 30 days for installation, and up to 30 days for training).

V. DELIVERY TERMS

Delivery shall be FOB Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below above.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ TPOC (Michael Winchester, Bldg. 227)

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST (Gaithersburg, MD- Building 227.)

VII. TRAINING

The contractor shall conduct an onsite training session for up to 3 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9 AM to 5 PM immediately after installation and demonstration of specifications and must be completed no later than 30 days after installation. Further training requirements are identified below:

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST Contracting Officer’s Representative (COR) and/or Technical Point of Contact (TPOC) to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the installation of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 12 months after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include all parts and labor associated with repair or replacement of defective components.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after acceptance by the COR of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted unless other-wise requested and accepted by the Contracting Officer prior to award. Proposed payment schedules and milestones shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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