Attachment 1 - Specifications.pdf

Solicitation #: N00173-23-R-NJ21 Attachment 1 – Specifications

SPECIFICATIONS FOR AEROSOL JET PRINTER (AJP)

I. OVERVIEW

We seek to procure an aerosol jet printing (AJP) tool capable of high-resolution printing for metals, dielectrics, and semiconductor materials. This tool enables NRL to innovate at the forefront of additive manufacturing for novel electronics. The tool will print aerosolized nanoparticles—metals, dielectrics, resists, and semiconductors—with critical feature sizes as small as 10 microns and four degrees of movement freedom for novel assemblies over complex topologies. The system will be used to facilitate both rigid as well as flexible/stretchable assembly of microelectronic elements via bottom-up approaches with unparalleled materials flexibility.

II. BACKGROUND

NRL develops innovative microelectronic assemblies for myriad applications—photovoltaics, detectors, wearable/implantable biomedical devices, neuromorphic computing, and RF electronics as examples.

These devices and assemblies all have different requirements; however, they share a common need in bottom-up interconnect development over complex topology. The AJP system can meet these interconnect requirements and open up new research pathways. The system works via atomization of either metal, semiconductor, or insulator inks (to include both ultrasonic and pneumatic atomization). An inert carrier gas drives the particles to the nozzle and disperses them onto the target surface, creating features as small as 10 microns. The tool is programmed via direct-write functionality, in which CAD-based software is used to define the locations and sizes of particle dispersions, in addition to the nozzle path. This facilitates custom printing of materials for interconnection, structural supports, electrodes, passivation/insulation, and integrated circuit production.

III. SCOPE

This statement of work concerns the procurement of an AJP tool that meets the specifications to be described in the following section. The system must be vetted to ensure the vendor meets all specifications, facilitate installation on-site at NRL, provide training to NRL scientists, and demonstrate key acceptance tests on the installed tool. These requirements will be detailed in the sections to follow.

IV. SPECIFICATIONS

a. The AJP shall be no larger than 1200 mm x 1700 mm x 2300 mm

b. The AJP shall be powered by 200-250 VAC single-phase

c. The AJP shall be capable of ultrasonic atomization material into droplets

d. The AJP shall be capable of pneumatic atomization of material into droplets

e. The AJP shall be capable of atomizing material into droplets for printing conductive metals, carbon nanotubes, dielectrics/adhesives, resistor inks, and reactive chemistries

i. Compatible conducting metal inks shall include silver, copper, nickel, aluminum, platinum, and indium

ii. Compatible resistor inks shall include carbon

iii. Compatible dielectrics and adhesives shall include polyimide, SU-8, and Norland UV curables

iv. Compatible reactive chemistries shall include R&H Enlight and Shipley

f. The AJP shall be compatible with inks with operating viscosity in the range of at least 1-

1000 cP

g. The AJP printing platform work area shall be at least 300 mm x 300 mm in the x-,y-axes

i. The AJP printing platform work area shall be at least 100 mm in the z-axis

h. The AJP system must offer at least 3 axis range of motion

i. The AJP printing platform motion control in x-,y-axes shall be via linear motors with digital incremental encoders

j. The AJP printing platform motion control in z-axis shall be via recirculating ball screw with digital incremental encoders

k. The AJP stage shall facilitate controllable heating up to at least 85 C

l. The AJP stage shall facilitate rotation

m. The AJP shall be capable of linewidths as small as 10 microns

n. The AJP shall be capable of linewidth pitch as small as 20 microns

o. The AJP shall be capable of linewidths as wide as 800 microns

p. The AJP shall be capable of depositing material at thicknesses of 100 nm to 10 microns in a single pass

q. The AJP shall demonstrate accuracy of +/- 6 microns in x-y axis over 25 mm

r. The AJP shall demonstrate repeatability of +/- 2 microns in x-y axis over 25 mm

s. The AJP shall be capable of motion with 100 nm resolution

t. The AJP print head shall facilitate stand-off height in the range of at least 1mm to 5 mm while maintaining feature linewidths as small as 20 microns

u. The AJP shall not require mapping of 3D surfaces prior to printing

v. The AJP print head shall be capable of tilt in the range of 0-30 degrees

w. The AJP print head shall utilize an annular sheath gas of nitrogen to direct droplets, without the droplets contacting the nozzle

x. The AJP must use continuous material flow with a shutter to interrupt the write pattern

y. The AJP shall be capable of printing at least 75 wires per minute on stacked die

z. The AJP shall include a pump and local exhaust assembly

aa. The AJP shall be equipped with a high-definition camera for real-time imaging of printing

bb. The AJP shall facilitate direct-write of printing patterns via CAD-based tools that direct

2.5D motion paths

cc. The AJP system shall be provided with a parts warranty of at least 6 months and limited warranty of at least 1 year

dd. The AJP system installation shall include at least 4-days onsite with basic training

ee. The AJP system shall include an annual remote service contract that can be terminated at the discretion of the Naval Research Laboratory

V. SYSTEM INSTALLATION

It is the responsibility of NRL to identify a lab bay that is compatible with the needs of the selected AJP tool. This includes floor space, electrical requirements, ventilation requirements, and inert gas availability. It is the responsibility of the vendor to provide these quantifiable system needs to NRL well in advance of any install. It is up to the vendor whether they wish to ship the tool in advance or bring the tool with them during install. If choosing to ship in advance, NRL wishes for the vendor to schedule the installation within 30 days of the shipment’s arrival at NRL. NRL requires guidance from the vendor as to whether unpacking of the shipments is required prior to the vendor’s arrival. If choosing to ship in advance, NRL will coordinate the delivery of the shipment from NRL’s central shipping to the building and lab bay where it will be installed.

VI. ACCEPTANCE TESTS

The tool will be qualified by demonstrating the following key performance metrics:

• Deposit silver nanoparticles with 10 micron critical feature size o Demonstrate linewidth pitch of 20 microns o Demonstrate this critical feature size with print head stand-off height varying between 1 to 5 mm in the z direction

• Deposit silver nanoparticles with 800 micron feature width in a single-pass

• Deposit less than 500 nm thick silver nanoparticle trace

• Deposit more than 10 micron thick silver nanoparticle trace

• Deposit an insulating polymer with a ramp profile, followed by depositing silver nanoparticles on top of the polymer ramp o Polymer ramp should increase from ~100 nm to 10 microns in thickness over a distance of less than 1 mm.

o Demonstrate metal continuity across the deposited silver trace

• Demonstrate re-alignment to previously printed features to within +/- 2.5 microns

• Demonstrate printed silver metal conductivity at least 20% of silver’s bulk conductivity with sintering below 300 C

VII. USER TRAINING

Installation and user training shall take place over no fewer than 4 days on-site.

VIII. WARRANTY

An annual remote service contract shall be provided that can be terminated at the discretion of NRL.