Attachment 1-SPEC..pdf

Attachment 1- SPEC

RFQ 448417

Line-Item Requirements:

Item No. Description Part No. Qty. UOM Delivery Date *

1 1025440 1 EA

neaSCOPE (Near-Field Scanning Optical Microscope Platform)

- Optimized SPM Platform for nano-optical, -mechanical & -electrical measurements

- Ready-to-use SPM measurement modes with guaranteed performance

- Upgradable with full s-SNOM, AFM-IR, Raman, Ultrafast measurement capabilities

- Accepts visible, infrared, and even THz illumination wavelength NOTE: PTE and PTE+ measurement modes not available in the US Atomic Force Microscope (AFM)

- High-stability AFM optimized for nanoscale optical imaging & spectroscopy AFM Sample Positioner and Scanner Motorized Sample X, Y, Z Coarse Positioner

- Easy sample loading and selection of region of interest

- Coarse positioning ranges: X = 60 mm, Y = 15 mm, Z = 6 mm

- X, Y, Z step size < 200nm X-Y Sample Scanner

- Scanning sample design to allow AFM, p illumination

- 100 μm x 100 μm X, Y closed-loop scan range

- X, Y resolution: 0.2 nm (open-loop), 0.4 nm (closed-loop)

- Scan-speed: up to 20 μm/s

- Scan-,me for e.g. 100 x 100 pixel = 1 x 1 μm image: 60s

- Maximum sample size: 40 x 50 x 15 mm (X, Y, Z) NOTE: Depending on sample table max height can be reduced Z-Axis Sample Scanner

- = 0.2 nm noise-limited z-resolution (RMS) on certified optical table

- Max. 2.5 μm z-range (upgradeable to 8 μm) AFM Probing Head

- Accepts standard AFM cantilevers up to 500 kHz resonance frequency

- Ultra-high optical access to AFM ,p (180° horizontal, 60° vertical)

- Motorized positioning (X, Y, Z) for easy AFM-,p alignment

- Head positioning ranges: X = 30 mm, Y = 3 mm, Z = 4 mm

- X, Y, Z step size < 200nm Optical High-Resolution BrightField Microscope

- Sample inspection with < 0.8 μm spatial resolution

- Ca. 0.75 mm field of view diagonal

- 5 Mpixel high-speed CCD-camera Standard AFM modes supported

- Intermittent contact mode & contact-mode -Mechanical topography & Phase Imaging, Error-signal -Photothermal Expansion mode (PTE) -Requires certified light source NOTE: PTE not available in the US AFM-Tip Illumination & Light Collection Unit (s-SNOM) -Patented parabolic mirror design for focusing & collection of light

Standard parabolic mirror

-Patented Dual-Port design for two simultaneous light-beams on tip -Compatible with most measurement modes* -Standard optical aperture NA = 0.39 -Motorized XYZ-positioner of parabolic mirror for precise focusing -Mirror positioning ranges: X, Y, Z = 4 mm, Resolution < 100nm -Accepts visible, infrared & even THz illumination wavelength

NOTE: Might require additional detection modules depending on the measurement mode

Position Sensors for Motorized Parabolic Mirror Axes -Enables alignment-free focusing of laser to AFM-tip -Enables automated one-click switch of imaging & spectroscopy mode neaSCOPE Microscope User-Kit neaspec certified contamination free AFM-tips -One pack of recommended tips provided with each measurement mode -Additional optimized contamination-free tips available as consumables

Controller, User-PC, Software and Manual neaSCOPE Scan Controller and Optical Signal Processing Unit -Synchronization of AFM mechanics with optical signals -Patented signal processing for optical background suppression -Two custom ADC inputs for internal signal analysis -Two custom DAC outputs -Two digital I/Os for external signal analysis neaSCOPE User PC -Real-time signal visualization -2 x 24” displays for user-friendly operation neaSCAN Control and Data Acquisition Software -Control and scan software for AFM and optical signals -Optical imaging and spectroscopy software modules -Supports 1D, 2D and 3D scans -Includes neaSCAN interactive user help with task-oriented tutorials, smart tips, and video instructions

Data Visualization and Analysis Software -Pre-installed state-of-art data visualization and analysis software

- Suited for AFM topography data as well as optical near-field data Hardware & software manual incl. technical specifications (English) neaSCOPE placing into operation (incl. free 2-day basic user training) -Placing into operation & validation of performance by neaspec engineer -2-day basic user training for instant operation after installation 1 Year Warranty for Complete System -Full one year warranty of complete system including neaSCOPE and illumination units covering all hardware failures -Premium support (by phone, by e-mail, remote/online) -All services required to restore functionality after hardware failures included (remote or on-site)

2 1020783 1 EA

1020784 1 EA

Upgrades for neaSCOPE system

Item # 1020783 – Position sensors for motorized parabolic mirror axes -Enables alignment-free focusing of laser to AFM-tip -Enables automated one-click switch of imaging & spectroscopy mode

Item #1020784 – High NA parabolic mirror objective -Patented Dual-Port design for two simultaneous light-beams on tip -Provides maximum compatibility with near-field & AFM-IR measurement modes* -Improves S/N-ratio by higher numerical aperture (NA=0.46) -Accepts visible, infrared & even THz illumination wavelength -Patented dual-port design for nanoscale imaging & spectroscopy -Recommended for light-source systems with low S/N-ratio NOTE: Might require additional detection modules depending on the measurement mode

3 1022602 1 EA

Measurement modes for neaSCOPE system Item # 1022602 – Ps-Het Nano-imaging software module -High performance amplitude & phased resolved s-SNOM imaging -Spectral resolution up to 1 cm-1 (max.)

-Requires detection module

* NOTE: actual spectral resolution could vary depending on the illumination source

4 1023655 1 EA

1023657

Detection modules for dual-port parabolic mirror system Item #1023655 White light Reflection-Mode Detection Module for VIS, NIR & MIR -PsHet detection for high-performance near-field imaging -Enables simultaneous detection of optical near-field amplitude & phase* -Patented background-free detection technology -Supports near-field imaging & spectroscopy in white light position -Supports PsHet Point Spectroscopy via laser sweeping technology** -Suited for visible & infrared detection -Exchangeable beam-splitter mount included -Supported AFM scan-speed: up to 20 µm/s @ highest spatial resolution -Reflective AFM-tip illumination

* Requires PsHet Nano-Imaging software module (PH-1) ** Requires PsHet P-Spec software module (PHS-1) and compatible neaspec illumination source

High spectral resolution nano-FTIR Reflection-Mode Detec on Module Item #1023657 -Patented broadband background-free detection of optical amplitude & phase -Enables simultaneous detection of reflectivity & absorption spectra* -Patented background-free detection technology -Enables spectrally integrated (white light) nano-imaging -Based on optimized asymmetric Fourier-Transform spectrometer -Up to 3 spectra per second -Calculated spectral resolution 3.3/cm -Exchangeable beam-splitter mount included -Reflective AFM-tip illumination

* Requires Nano-FTIR Spectroscopy Module (NSM-1), nano-FTIR software (NFIS-1) and compatible broadband mid-IR light source

5 1025206 1 EA

1016541 Near-field imaging system for neaSCOPE

Item #1025206 Near-Field Imaging Unit -Optimized for high-performance near-field imaging with neaSCOPE microscope -Provides coupling to the microscope -3 individual inputs for vis, NIR and MIR -Includes powermeter for calibration of laser power -1 optical output for customer detector

NOTE: Detectors sold separately

Item #1016541 Upgrade NIM with Mid-IR Detection -Upgrade of Near-Field Imaging Unit with MIR detection -Fully integrated into neaSCAN -Automated detector selection with supported MIR illumination units -Power control via attenuation of MIR beam -Requires liquid nitrogen supply for detector cooling

6 1016558 1 EA

Near-Field Spectroscopy System for neaSCOPE Item #1016558 nano-FTIR Spectroscopy Module (NSM)

* Quote your best lead time

Line-Item Requirements: