Attachment 1 SOW.pdf

STATEMENT OF WORK

Title: Sub-boiling distiller to further purify ultrapure water for test material

Lab: Material Measurement Laboratory/Chemical Sciences Division

BACKGROUND INFORMATION

Semiconductor manufacturing yield enhancement requires ongoing risk analysis of cleaning chemical purity wherein critical contaminants are already at levels difficult or impossible to detect, let alone identify and quantify. Next-generation chips will require even purer materials and advanced metrological capabilities for the detection, identification, and quantification of impurities in semiconductor cleaning chemicals, necessitating a practical roadmap for assessing material purity commensurate with the needs of the next generation in semiconductor manufacturing.

The purification of water to ultrapure water is a critical process in various semiconductor and research applications, where even trace amounts of contaminants at the parts-per-billion level (ppb, 10-9 moles per mole) can compromise the integrity of the water and affect downstream processes. High molecular weight organics (a particle precursor), metallic ions and native particles can all impact chip reliability and yield at these low concentrations. Current laboratory grade ultrapure water sources using reverse osmosis, ion exchange, and ultrafiltration can readily obtain water purities with contaminants at the ppb level. However, the development of test materials requires significantly reduced contaminant concentrations of 10 to 100 parts-per-trillion (ppt, 10-12 moles per mole). Artifact based standards require even further reduced contamination concentrations approaching the 10’s of parts-per-quadrillion (ppq, 10-15 moles per mole).

The proposed method for producing this new grade of UPW, referred to as UPW0, is to further purify UPW using sub-boiling distillation in a controlled environment (i.e., glove box). The sub-boiling distillation process greatly reduces contamination carryover, versus traditional distillation, while the glove box reduces interferences from ambient molecular and particulate contaminants.

Purpose: This sub-boiling distiller will be used to further purify ultrapure water for test material and standards development.

SCOPE

The Contractor shall deliver a quantity of one (1) sub-boiling distillation system.

MINIMUM REQUIREMENTS

The Contractor shall submit a firm fixed price quotation which offers a supply/system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Sub-boiling distiller Description: Sub-boiling distillation system.

Quantity: One (1)

A. Technical Specifications

a. Does not require a fume hood for operation.

b. PTFE or PFA wetted components.

c. Automatic filling and draining with overfill and dry-running protection.

d. 120 V, 60 Hz AC

DELIVERABLES

Line-Item Number Deliverable Quantity Lead Time

0001 Sub-boiling distiller One (1) System Sixty (60) Days After Receipt of Order

Standards of Acceptance: The NIST TPOC or COR shall review (list deliverable) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

PERIOD OF PERFORMANCE

60 Days ARO

PLACE OF PERFORMANCE

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 (Receiving) Building 221, Room A117 Gaithersburg, MD 20899

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within fourteen (14) days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 12 months after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include goods to be free from defects in workmanship and material.

PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.