Attachment 1 SOW.pdf

STATEMENT OF WORK

High-Speed IR Camera System

MML / 643

I. BACKGROUND INFORMATION

The success of US semiconductor manufacturing relies on the ability of the industry to out innovate competitors with new technology and outperform foreign manufacturers with high-yield processing.

NIST’s CHIPS Metrology program is tasked with assisting industry by creating new measurement capabilities that enable the development of next generation devices and help manufacturers with metrology solutions that improve the yield of manufacturing processes. The Nanocalorimetry for Semiconductors Hz integration into processing tools for plasma and atomic layer deposition processes.

To validate thermal models and perform calibrations, the nanocalorimetry project requires a high-speed IR camera. This camera will be operated in two modes: (a) the stroboscopic mode where full sensor images are captured using short integration times and the sensor is cycled with delayed triggers to build up a high pixel count and high frame rate themographic video, and (b) in high frame-rate mode where the camera’s sensor will be windowed to a smaller number of pixels to allow for faster frame rates to monitor a experiment happening in once. This system will be used to measure metals including Pt (emissivity of apx 0.22) in the temperature range of 25 °C to 1200 °C.

II. SCOPE

The contractor is responsible for delivering one high-speed IR camera system and providing a hardware and software warranty. NIST is responsible for integrating the camera into existing instrument control hardware and software including creating trigger signals for the IR camera system.

III. MINIMUM REQUIREMENTS

Line Item 0001 Description: High Speed IR Camera System Quantity: One Technical Specifications:

1. Sensor Size – Sensors must have at least 320 × 256 pixels and additional value will be given to systems with at least 640 × 512 pixels. Only native sensor resolution will be considered, meaning pixel resolutions gained through digital enhancement or mechanical shifting of sensors relative to optics will be ignored.

2. Acquisition Rates

2.1. Frame rate must exceed 3,000 frames per second at 320 × 256 pixels. Additional value will be given to systems that can exceed this specification.

2.2. Minimum Integration Time of 1 µs or less

3. Spatial Resolution

3.1. Camera system (detector and optics combined) must have a spatial resolution between 5 µm and 10 µm.

3.2. The optics must have a free working distance of at least 20 mm. Additional value will be given to systems that can exceed this specification.

4. Trigger

4.1. Camera system must provide at least one hardware trigger input available by BNC or SMA connection on the camera body. An included dongle between a camera body connector and BNC or SMA meets this requirement.

4.2. Camera must accept 5 V or 3.3 V trigger signals.

4.3. Camera control software must be able to configure the camera to perform the following actions when receiving a hardware trigger:

4.3.1. Execute the preprogramed acquisition (see software requirements)

4.3.2. Begin acquisition when the trigger goes high and end an acquisition when the trigger goes low using preprogramed acquisition settings

4.4. Trigger delay (time between ext trigger in going high and the preprogramed integration beginning) must be less than 2.5 µs.

4.5. Trigger jitter (inconsistency in trigger delay) must be less than 250 ns.

5. Spectral Range – MWIR system that includes wavelengths from 3 µm to 5 µm.

6. Calibration – The camera and optical system must be calibrated for the black body temperature range from 25 °C to 500 °C without extrapolation.

7. The software controlling the camera must include the following capabilities:

7.1. At least one perpetual “seat” of analysis software licensing must be included. Online (preferred) or USB dongle type licensing is acceptable.

7.2. Setting of all user-settable operational parameters including integration time, sensor windowing, filter wheel position, trigger types, trigger arming.

7.3. Display of real time images from the camera for operations including focusing

7.4. Capturing of data from the camera to the control PC. Both real-time streaming of data to the

PC and local storage on the camera that can be transferred to the control PC meet this requirement.

7.5. Exporting of data from any proprietary formats to open formats. Inclusion of a software development kit (SDK) that would enable access from other programming languages can meet this requirement if the SDK can read the raw data and any required metadata including temperature calibration information.

7.6. Defining a region of interest using a rectangle or a circle and creating a time vs temperature plot that is the mean temperature within that region.

8. Physical

8.1. Connections from the camera to the control PC must be made via USB (2, 3, or C are all acceptable) or by copper gigabit ethernet (RJ45) or 10 gigabit SFP+ ethernet (SR optic or copper)

8.2. Must operate from a NEMA 5-15R (standard US outlet – 120 V, 15 A)

8.3. Camera module with optics must weigh less than 12 kg

IV. DELIVERABLES

V.

Milestone Description Due Date Format

1 High-speed IR Camera System 14 weeks after award

Physical Instrument and control software

VI. PLACE OF PERFORMANCE

All work shall be completed at the contractor’s facility. NIST staff will install and verify performance of the system at NIST’s Gaithersburg, MD facility.

VII. PERIOD OF PERFORMANCE/LEAD TIME

14 weeks after receipt of order (ARO). See Deliverables above.

VIII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: Will Osborn, 223/A345 Gaithersburg, MD 20899

IX. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Basic functions will be tested including:

a. Installing the control software on a NIST owned PC

b. Connecting the high speed IR camera system to the control PC

c. Using a “live view” display on the camera control software to position and focus the camera on a test sensor

2. Stroboscopic Operation: the camera system will be trigger at full resolution and short integration time during an experiment to capture a single frame during a heating and cooling cycle.

3. High-speed Operation: the camera system will be configured to window the detector and provide higher frame rate operation to observe the entire heating and cooling cycle of a sensor.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST Technical point of contact (TPOC). to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 1 week of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

X. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

XI. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.