Attachment 1 SOW.docx

NIST Requirements Document

“High Power, High Repetition Rate Laser System for Terahertz Spectroscopy and Imaging”

I. Background

Terahertz imaging and spectroscopy projects fall within the Nanoscale Device Characterization Division mission by providing novel measurement capabilities for 3D integrated circuits and optically determine carrier dynamics and mobility of nanoscale material features. These measurements complement other nanoscale metrologies but will advance non-contact carrier information and thermal properties within device structures.

A compact high-repetition rate, high-power femtosecond laser system for Terahertz (THz) thermal IC imaging and Near-Field Scattering-Optical Microscopy (s-SNOM) is required. System shall provide sufficient pulse power for THz probe generation and detection up to MHz repetition rates to achieve highest signal-to-noise capability for pump-probe and carrier dynamics measurements. Includes an Optical Parametric Amplifier (OPA) for tunable visible, ultraviolet and/or mid-IR pulse generation for transient absorption and fluorescence and related ultrafast spectroscopy experiments.

II. Scope

NIST requires a complete high-power, high repetition-rate near-infrared femtosecond (fs) laser system for terahertz pulse generation and spectroscopy applications. Controlled pulse repetition rate from several MHz down to single shot with <500 fs duration will be used to generate THz output while a Optical Parametric Amplifer (OPA) pumped by the high power laser will provide tunable excitation wavelengths for pump-probe experiments.

This system will be used for Division and planned NIST CHIPS R&D research.

III. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new commercial products. Used or remanufactured equipment will not be considered for award. Experimental, prototype, first-article, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following High-Power, High Repetition Rate Laser and OPA System that meets the following minimum specifications:

1. Complete high-power high-repetition rate laser system including:

a. Near infrared ultrafast pump laser with >140 W, <500 femtosecond, >0.5 millijoule pulse energy output, user-selected from MHz to lower repetition rates. Highest output power and user-controlled repetition rate from MHz down to single-shot preferred.

b. Optical Parametric Amplifier (OPA) pumped by the ultrafast laser to generate tunable output (within 600 nm to 900 nm and 1200 nm to 2500 nm ranges or larger) with <1 ps pulse duration and 5 W or greater output at the pump laser repetition rate.

c. Pump laser with M-squared TEMoo beam profile <1.2

d. All intermediary directing optics, beam baffles/dumps with laser/OPA cooling units supplied and tested for function and required specifications on site

e. 1 year or longer system warranty

f. Includes computer providing automatic software control of pump and OPA lasers for maximizing output power and wavelength tuning

IV. Site Preparation

NIST will provide appropriate optical table space and power for system installation.

V. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) and shall occur not later than (NLT) 6 months after receipt of order (ARO).

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 220 Gaithersburg, MD 20899-1640 VI. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

1) Contractor will work with NIST Contracting Officer Represetative and other personnel to unpack, install, and test the system for:

a) Total system installation (Laser, OPA and chillers) and measure required output power per specifications using Contractor and NIST power meters for both pump laser and OPA as a function of repetition rate and OPA wavelength tuning

b) Measure Laser and OPA output pulse durations using Contractor-supplied autocorrelator

c) If possible, employ CCD beam profiling camera on adequately reduced laser output

d) Complete optical setup of both laser and OPA with appropriate beam tubes and power baffles

e) Proper laser and OPA optimization functions via computer software control

The Government will test, inspect, and accept the equipment onsite within 30 business days of the receipt of the High Power Laser and OPA System. A visual inspection of the High Power Laser and OPA System will be performed by the NIST TPOC to identify surface defects or any form of indication that the High Power Laser and OPA System was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the High Power Laser and OPA System due to defects and/or nonconformance.

VII. Installation The system shall be installed by the Contractor and meet contract specifications no later than 1 month after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 222 Room A164)

VIII. Training

The contractor shall conduct two or more training sessions for up to two system users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation/set-up and on-site measurements demonstrating that no damage or misalignment issues arose during transportation and installation, but shall be completed no later than two days after installation.

IX. Warranty The contractor shall warrant the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

X. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed

b. TPOC determines the system meets required specifications at time of testing