Attachment 1 SOW.docx

NIST Requirements Document Scanning Stage System

I. Background As part of a new CHIPS project for Thermal 3D Imaging of Advanced Packages in the Sensor Science Division, we are developing a magnetic imaging microscope to quantify temperature using magnetic nanoparticle thermometers embedded in semiconductor advanced packages. To perform 3D thermal imaging, we require a 3-axis translational system as the center piece of the magnetic imaging microscope to allow access to 3D spatial information.

II. Scope Design and build a scanning linear stage system, which includes an integrated 3-axis stage stack, 1 additional linear stage, and a motion controller for at least 4 axes. The scanning stage system will provide linear motion for a custom-built magnetic scanning microscope we are developing, and it must meet the geometric and performance specifications required by our planned instrument. The scanning stage bodies must be fabricated with non-magnetic materials (e.g., aluminum or titanium), and include non-magnetic-type encoders to provide location data. The detailed requirements for the scanning stage system are described below.

III. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following scanning stage system that meet the following minimum specifications:

1. Linear Motorized Stages of the XYZ Stage Stack (Quantity = 1)

a. Travel Ranges

i) X-stage: 300 mm travel

ii) Y-stage: 100 mm travel

iii) Z-stage: at least 50 mm travel

b. Motion Requirements

i) Accuracy: 2 µm

ii) Repeatability: 1.5 µm

iii) Smallest step size: 1.5 µm

iv) Maximum velocity: 10 mm/s

v) Must be possible to execute repeated XY scanning

c. Z-stage Specific Requirements

i) Z-stage mounted on top

ii) Z-stage must be low profile lift-type stage in order keep stack height small

d. Assembly and Mapping by Vendor

i) The XYZ stack must be assembled by the vendor

ii) The XYZ stack must calibrated (at least for X and Y directions) by the vendor, to show that accuracy and repeatability requirements have been met

e. Other Stage Requirements

i) Total stack height must be < 375 mm

ii) Must operate within specs with payload up to 4 kg (40 N)

iii) Must have non-magnetic body (e.g., aluminum)

iv) Must have non-magnetic encoders

v) All cables and accessories must be included

vi) Must have imperial unit dimensions for mounting holes

2. Additional Linear Stages for the 4th Axis (Quantity = 1)

a. Travel range: 75 mm (preferably) or 100 mm (acceptable)

b. Motion Requirements

i) Smallest step size: 1.5 µm

ii) Maximum velocity: 10 mm/s

c. Other Stage Requirements

3. Multi-axis Stage Controller and Drivers (Quantity = 1)

a. Must be able to control at least 4 axes

b. Ethernet or USB communication port

c. Must be controllable from LabVIEW, MATLAB, or Python

d. All cables and accessories must be included for operating stages from controller iii)

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 14 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

V. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 12 weeks ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 221/B205 Gaithersburg, MD 20899 VI. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

1. We will inspect the stage for physical damage.

2. If no physical damage is observed, then we will evaluate performance of translational stages by measuring their scanning range and repeatability.

3. If conditions 1-2 passes, then NIST will accept the purchase order.

The Government will test, inspect, and accept the equipment onsite within 14 business days of the receipt of the scanning stage system. A visual inspection of the scanning stage system will be performed by the NIST TPOC to identify surface defects or any form of indication that the scanning stage system was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the scanning stage system due to defects and/or nonconformance.

VII. Warranty The contractor shall warrant the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

VIII. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed