SATPC0039405 Tab 04 4 SOW..pdf

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Ideal Vacuum, Vacuum Pumps for ENS
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80NSSC25911923Q
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This Statement of Work outlines NASA Langley Research Center's requirements for procuring vacuum pumps and instrumentation for an ultra-high-vacuum chamber used in laboratory-based spectroscopic instruments with charged particle beams. The system must consist of one turbomolecular pump equivalent to the Leybold TURBOVAC 90i (90 L/s pumping rate for N2, ultimate pressure 3.8×10⁻¹⁰ Torr, 4.5" Conflat inlet, including controller, power supply, and cooling system), one roughing pump equivalent to the Leybold Scrollvac 10+ (dry pumping chamber, minimum 10 m³/h pumping rate at 10.5 Torr, KF-25 inlet), one wide-range pressure transducer equivalent to the Leybold ITR90 (measuring 3.8×10⁻¹⁰ Torr to atmospheric pressure with better than 15% accuracy), and one controller/readout equivalent to the Leybold Graphix One with necessary cabling.

All equipment must use standard US 110V single-phase power connections and be delivered within 4 weeks of order receipt to NASA Langley Research Center. The specifications are based on system performance simulations indicating these rates and pressures are necessary for successful operation across the full range needed to meet NASA's mission requirements. The successful vendor must provide capability for technical support and repair services either onsite at NASA or at the vendor location, as the equipment may require maintenance by qualified vacuum system experts after normal use.

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STATEMENT OF WORK

1. Objective/Requirements Procurement of vacuum pumps and instrumentation for an ultra-high-vacuum chamber. The vacuum chamber will be used for laboratory-based spectroscopic instruments, and the supporting vacuum pumps must be able to maintain an environment suitable for use with charged particle beams.

2. Characteristics, Scope, and Specs NASA Langley Research Center is seeking to purchase a vacuum pumping system and associated instrumentation to outfit a vacuum chamber for operation of charged particle beams for laboratory-based spectroscopic measurements. The system shall consist of one (1) turbomolecular pump and associated controller, power supply, and cooling system, one (1) roughing vacuum pump, one (1) wide-range pressure transducer, and one

(1) controller and readout for the wide-range pressure transducer. Note that specifications on pumping rates that follow are based on simulations of system performance, which indicate that these rates and associated pressures are necessary for the successful operation of the system over the full range of pressures needed by NASA to meet mission requirements. Further specifications follow:

o The turbomolecular pump shall be equivalent to the Leybold TURBOVAC 90i, which has he following performance and mechanical specifications:

o Pumping rate of 90 L/s for N2 (see Figure 1 for complete pump curve) o Pump throughput of 7 Torr-L/s for N2 o Ultimate pressure 3.8⋅10-10 Torr o Maximum foreline pressure of 10.5 Torr o 4.5” Conflat inlet o KF-16 outlet (roughing pump connection) o The turbomolecular pump shall include a controller, power supply, and air or water cooling system o The turbomolecular pump or power supply shall use standard US 110

V/single-phase power connections o The roughing (foreline) pump shall be equivalent to the Leybold Scrollvac 10+, which has the following performance and mechanical specifications:

o The pump shall have a dry pumping chamber (scroll pump, roots pump, etc.)

o Pumping rate of at least 10 m3/h at 10.5 Torr (see Figure 2 for pumping curve) o KF-25 inlet o The roughing pump shall use standard US 110 V/single-phase power connections o The wide-range pressure transducer shall be equivalent to the Leybold ITR90, which has the following performance and mechanical specifications:

o The pressure transducer shall measure a pressure range of 3.8⋅10-10

Torr to atmospheric pressure.

o The transducer shall have an accuracy better than 15% across the full pressure range.

o The transducer shall have a repeatability better than 15% across the full pressure range.

o The pressure transducer may use a combination of different sensor technologies (e.g., Pirani gauge and hot-cathode ion gauge).

o The pressure transducer shall have either a 2.75” Conflat or KF-25 inlet connection.

o The controller/readout for the pressure transducer shall be compatible with the wide-range pressure transducer described in the previous point and act as a controller to operate the device and provide a digital readout of the pressure measured by the transducer. The controller/readout shall be the equivalent of the Leybold Graphix One. Cabling necessary for connecting the controller to the pressure transducer shall also be included.

o After normal use, this equipment may require technical support by qualified vacuum system experts and/or service to maintain and/or repair the pumps either onsite at NASA or at the vendor, as needed. The successful vendor shall have the capability to provide technical support and repair services.

3. Place of Performance The items constituting the vacuum chamber will be procured or manufactured by the contractor and shipped to NASA Langley Research Center.

4. Period of Performance The products described shall be delivered within 4 weeks of receipt of order.

Figure 1: Pump curve for the Leybold TURBOVAC 90i

Figure 2: Pump curve for the Leybold SCROLLVAC 10+

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