Questions and Answers.pdf
PDF 177 KB Posted
- Solicitation number
- 80NSSC25904091Q
About this file
This document is a Questions and Answers file for a NASA contract opportunity seeking a thin film optical measurement instrument. The technical specifications indicate the desired instrument must measure film thickness, refractive index, and extinction coefficient across multiple coating materials including silicon dioxide, silicon nitride, photoresist, and polycrystalline silicon. The measurement requirements include a precision of 2 Angstrom, a coating thickness range from 50 Angstrom to 100 micrometers, and capability to measure sub-micron features on wafer pieces and up to 6-inch wafer substrates using base materials like silicon, silicon carbide, glass, and sapphire.
The procurement details specify a quantity of 1 instrument to be shipped to NASA/Glenn Research Center in Cleveland, Ohio. The document notes that 4x and 20x magnification options are available, but must meet the measurement thickness range specified in the Statement of Work. Additionally, the vendor is requested to provide a C-mount for a microscope with a 250-micron round aperture. The solicitation number is 80NSSC25904091Q and is being issued by the National Aeronautics and Space Administration Shared Services Center.
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Other files
| File | Type | Posted |
|---|---|---|
| SATPC0038463 Tab 04 4 SOW.pdf | ||
| SATPC0038463 Tab 10 Open Market RFQ.pdf |
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Text version
Could you please confirm the following:
Kindly indicate the parameters or items to be measured.
Answer: Film thickness, refractive index and extinction coefficient What’s the coating material?
Answer: Silicon dioxide, silicon nitride, photoresist, polycrystalline silicon, Hafnium oxide, etc.; at least 3 layers simultaneous measurement What’s the base material?
Answer: silicon, silicon carbide, glass, sapphire Coating thickness range?
Answer: 50 Angstrom to 100 micrometer What sort of precision do you need?
Answer: 2 Angstrom What is the size of the object & place on the object to be measured?
Answer: microscope with optics to measure sub-micron features on wafer pieces and up to 6-inch wafer substrates
Will you Please advise on Quantity and ship-to-address Quantity: 1
Ship To: NASA/Glenn Research Center 21000 Brookpark Road Cleveland OH 44135-3127
4x and 20x is an option, but the measurement thickness range stated in the SOW must be met.
We are looking for a C-mount for a microscope with a 250micron round aperture.
File details come from the government source that posted it. Updated .