specifications required.docx

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Attached to
2-BM Mirror
Solicitation number
4-B169-Q-00611-00
Issued by

About this file

The document provided is a specifications sheet for a federal contract opportunity to procure 2-BM Mirrors (Qty 6). The key details are:

The required substrate surface geometry includes plane + sag, cylinder material Si dimensions of 1200 x 120 x 75 mm3, and various clear apertures ranging from 1150 x 25 mm2 to 1150 x 25 mm2. The geometry parameters include tangential and sagittal radii, and guaranteed/target surface quality metrics for tangential and sagittal slope errors. Spatial sampling requirements are also specified. The microroughness requirement is a guaranteed MSFR of 0.2 nm (rms) with a target of 0.15 nm (rms).

The applicable coating requirements are 30 ± 5 nm Pt over 5nm Cr for the flat and cylinder (CA1 & CA2), and uncoated Si for the flat (CA3). The solicitation number is 4-B169-Q-00611-00 and it is being issued by the Department of Energy Office of Science. Offerors are requested to provide a published pricelist or customer invoice to support the offered pricing.

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Appendix A-71COM-13-FEB-2023.pdf PDF

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Text version

Substrate

Surface geometry
plane + sag. Cylinder
material
Si <100>
dimensions (L x W x H) / mm³
1200 x 120 x 75 ± 0.2

Optical surface

clear aperture 1, cylinder (L x W) / mm²
1150 x 25
clear aperture 2, flat (L x W) / mm²
1150 x 25
clear aperture 3, flat (L x W) / mm²
1150 x 25
Type of footprint
rectangular

Geometry parameters

tangential radius, CA 1; 2; 3 (all)
> 100 km
sagittal radius, CA 2 & 3 (flat)
>20 km
sagittal radius, CA 1 (cylinder)
125.7 ± 0.5%

Surface quality

tangential slope error, CA 2 &3 (flat)
≤ 0.2 μrad (rms)
tangential slope error, CA 1 (cylinder)
Guaranteed: ≤ 0.5 μrad (rms)

Target: ≤ 0.3 μrad (rms)

Spatial sampling
2 -1150 mm
sagittal slope error, CA 1; 2; 3 (all)
≤ 10 μrad (rms)
Spatial sampling
2 - 25 mm

Microroughness

MSFR (mid spatial frequency roughness)
guaranteed:

≤ 0.2 nm (rms) target:

≤ 0.15 nm (rms)

spatial sampling (ZYGO 50x)
1 μm - 170 μm

Coating

CA1&2 - flat&cylinder: material & thickness
30 ± 5 nm Pt over 5nm Cr
CA3 - flat: material
uncoated Si

Specifications required:

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File details come from the government source that posted it. Updated .