specifications required.docx
DOCX document 69 KB Posted
- Attached to
- 2-BM Mirror
- Solicitation number
- 4-B169-Q-00611-00
- Issued by
-
Department of Energy Office of Science
About this file
The document provided is a specifications sheet for a federal contract opportunity to procure 2-BM Mirrors (Qty 6). The key details are:
The required substrate surface geometry includes plane + sag, cylinder material Si dimensions of 1200 x 120 x 75 mm3, and various clear apertures ranging from 1150 x 25 mm2 to 1150 x 25 mm2. The geometry parameters include tangential and sagittal radii, and guaranteed/target surface quality metrics for tangential and sagittal slope errors. Spatial sampling requirements are also specified. The microroughness requirement is a guaranteed MSFR of 0.2 nm (rms) with a target of 0.15 nm (rms).
The applicable coating requirements are 30 ± 5 nm Pt over 5nm Cr for the flat and cylinder (CA1 & CA2), and uncoated Si for the flat (CA3). The solicitation number is 4-B169-Q-00611-00 and it is being issued by the Department of Energy Office of Science. Offerors are requested to provide a published pricelist or customer invoice to support the offered pricing.
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| File | Type | Posted |
|---|---|---|
| Appendix A-71COM-13-FEB-2023.pdf |
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Text version
Substrate
| Surface geometry |
| plane + sag. Cylinder |
| material |
| Si <100> |
| dimensions (L x W x H) / mm³ |
| 1200 x 120 x 75 ± 0.2 |
Optical surface
| clear aperture 1, cylinder (L x W) / mm² |
| 1150 x 25 |
| clear aperture 2, flat (L x W) / mm² |
| 1150 x 25 |
| clear aperture 3, flat (L x W) / mm² |
| 1150 x 25 |
| Type of footprint |
| rectangular |
Geometry parameters
| tangential radius, CA 1; 2; 3 (all) |
| > 100 km |
| sagittal radius, CA 2 & 3 (flat) |
| >20 km |
| sagittal radius, CA 1 (cylinder) |
| 125.7 ± 0.5% |
Surface quality
| tangential slope error, CA 2 &3 (flat) |
| ≤ 0.2 μrad (rms) |
| tangential slope error, CA 1 (cylinder) |
| Guaranteed: ≤ 0.5 μrad (rms) |
Target: ≤ 0.3 μrad (rms)
| Spatial sampling |
| 2 -1150 mm |
| sagittal slope error, CA 1; 2; 3 (all) |
| ≤ 10 μrad (rms) |
| Spatial sampling |
| 2 - 25 mm |
Microroughness
| MSFR (mid spatial frequency roughness) |
| guaranteed: |
≤ 0.2 nm (rms) target:
≤ 0.15 nm (rms)
| spatial sampling (ZYGO 50x) |
| 1 μm - 170 μm |
Coating
| CA1&2 - flat&cylinder: material & thickness |
| 30 ± 5 nm Pt over 5nm Cr |
| CA3 - flat: material |
| uncoated Si |
Specifications required:
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