SOW_Final.docx

STATEMENT OF WORK

Title: Primary S-Parameter Standards for Plasma Etching Research Lab: Communications Technology Laboratory RF Technology Division

BACKGROUND & PURPOSE:

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. The research project “RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching” focuses on high-power waveform metrology. High-power RF waveforms are used in semiconductor plasma processing, including etching and deposition processes. NIST will measure RF signals at kilowatt power levels. The planned measurements involve signals at both milliwatt and kilowatt power levels at the device under test (DUT) at a reference plane via a vector network analyzer (VNA). External, high power directional couplers will be used to plumb the attenuated coupling ports into the VNA receivers. This will allow the VNA to monitor both high power and low power travelling waves at a given reference plane, enabling phase and power measurements. The characteristics of the waveforms impact the quality of the resulting chips, but industry lacks the ability to accurately measure these waveforms. NIST aims to close that gap by developing high-power waveform measurement techniques.

SCOPE

The Contractor shall deliver the following inclusive of FOB Destination (or similar INCOTERM such DDP), and 1-year warranty

1. Initial draft of mechanical drawing of devices

2. Intermediate draft of mechanical drawing of devices (if initial draft is not approved)

3. Final draft of mechanical drawing of devices.

4. A quantity of seven (7) DIN 1/16 Offset Shorts

5. A quantity of twenty-eight (28) dimensional measurements.

EQUIPMENT & PROJECT INFORMATION

1. One of the key tools for the NIST approach to waveform metrology are primary S-parameter standards made with the DIN 7/16 connector type. These primary standards establish a traceable link to dimensional metrology for S-parameters in the DIN 7/16 connector type via the well-established technique of an over determined multiple offset short calibration. This traceable S-parameter calibration can then be transferred to measurements of waveguides, couplers, connectors, and other critical components in radiofrequency (RF) measurements via other established techniques like the Short-Open-Load (SOL) calibration using a VNA. These primary standards are therefore critical in establishing S-parameter traceability in the DIN 7/16 connector type, and therefore critical to establishing traceable power and phase measurements of interest for plasma etching tools commonly used by the semi-conductor industry.

2. This project requires primary S-parameter standards in DIN 7/16. DIN 7/16 is a standard type of electrical connector that is widely used by semiconductor manufacturers to deliver RF electrical power to plasma chambers for etching and deposition processes. Manufacturers monitor and control this RF electrical power to ensure that processes are consistent from wafer to wafer. NIST aims to establish traceability for these measurements.

3. The primary S-parameter standards are critical to establish traceability in DIN 7/16. These standards will allow NIST to achieve S-parameter traceability in DIN 7/16, which is crucial to establishing traceability for high-power waveform measurements, which is one of the main goals of the project. NIST anticipates traceability in DIN 7/16 will allow NIST to support the semiconductor industry by disseminating precision RF measurement techniques and allowing us to perform high-quality measurements to inform models of manufacturing processes.

MINIMUM REQUIREMENTS

The Contractor shall submit a firm fixed price quotation for all line items. The offered supplies/system must meet all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable. This requirement is for modified commercial off the shelf items only.

Line Item 0001:

Description: Mechanical drawings of DIN 7/16 offset shorts Quantity: Seven (7) A. Technical Specifications

a. An initial draft of mechanical drawing with (at minimum) approximate external dimensions and an estimate of manufacturing tolerances on the lengths of the offset shorts (see Line Item 002 for expected lengths) shall be submitted for review and approval.

Line Item 0002:

Description: DIN 7/16 offset shorts Quantity: Seven (7) B. Technical Specifications

a. Devices shall be made to the following lengths:

i. 0.631 in, 2.743 in, 4.667 in, 6.021 in, 7.406 in, 13.452 in, and 15.839 in as measured from the short plane to the connector reference plane.

b. All devices shall be male DIN 7/16 connectors made to the IEEE 287.1-2021 metrology grade pin connector specification.

c. For all devices, surfaces relevant to electrical performances shall be gold plated. These include, for example, the surface of the inner conductor and the inner surface of the outer conductor.

d. All devices shall be beadless.

e. All devices shall be delivered with a removable cap to support the beadless center conductor during transit and storage.

Note 1: The DIN 7/16 connector type is the best standard for this application. This connector type has the highest power handling of connectors with IEEE metrology grade connector specifications (IEEE 287.1-2021) and covers the frequency band of interest to plasma etching tools.

Note 2: Traceable S-Parameter metrology in the DIN 7/16 connector type is required to calibrate the VNA to the required reference plane.

Line Item 0003:

Description: Dimensional measurement Quantity: 28 A. Technical Specifications

a. Each device must be delivered along with a measurement of that devices following dimensions:

i. The diameter of the inner conductor.

ii. the diameter of the outer conductor

iii. the length of the outer conductor as measured from the reference plane to the short plane.

iv. The length of the center conductor as measured from the reference plane of the inner conductor to the short plane to.

v. Total 28 measurements (4 per device).

b. Each measurement of dimension must include either a tolerance or an expression of standard uncertainty on the measurement. The method of determining each dimension shall be briefly described including the measurement procedure and how the dimension and its uncertainty were calculated.

DELIVERABLES

No later than 24 weeks after approval of draft

Standards of Acceptance: The NIST TPOC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 4 weeks of receipt of deliverable. The contractor shall submit the revised deliverable no later than eight (8) weeks of notification of the revisions required. This section applies to deliverables which must be reviewed and approved for acceptances - i.e. the initial draft and intermediate drawings.

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology 325 Broadway

C/O TBD

Boulder, CO, 80305

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Inspection via dimensional metrology, where possible, to ensure connectors follow the IEEE 287.1-2021 metrology grade pin connector specification.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC/COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 4 weeks of the receipt of the equipment. The extended test period is required to ensure connectors follow the IEEE 287.1-2021 metrology grade pin connector specification. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

PAYMENT SCHEDULE:

Advanced payment is not authorized. The Contractor shall submit the invoice in the arrears and shall be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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