Attachment 1 - Statement of Work (SOW).docx

STATEMENT OF WORK

Title: Acquisition of Thermal Gravimetry and Differential Temperature Analysis Coupled with Gas Chromatography and Mass Spectrometry Lab: MML

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST) supports the development of measurement science critical to a resilient and sustainable U.S. semiconductor ecosystem. The semiconductor supply chain is global, specialized, and interconnected, chipmakers depend on thousands of suppliers for highly complex materials and tools. To address gaps in supply chain visibility and R&D infrastructure, NIST conducts metrology to advance new materials, packaging technologies, and production methods essential to semiconductor manufacturing.

The Materials Measurement Laboratory (MML) Materials Science and Engineering Division’s (MSED) Thermodynamics and Kinetics Group (TKG) is developing a vacuum distillation recovery process for critical materials using recycled microelectronics waste. MSED aims to elaborate on separating processes as a function of temperature and vacuum pressure across different phases, which may include chemical gas reactions.

To achieve these objectives, the capabilities of the required instruments should include simultaneous thermal gravimetric measurement, calorimetry, temperature measurements, and quantification of evaporated vapors. This instrument will consist of two components: thermogravimetry and differential thermal analysis (TG-DTA), coupled with gas chromatography and mass spectrometry (GC-MS). Given the demanding nature of the distillation process, the TG-DTA will consist of two compartments based on measurement capabilities, test conditions, and precision: TG-DTA1 for TG and TG-DTA, and TG-DTA2 for TG and TG-DSC. Additionally, the GC-MS should be coupled with both compartments of TG-DTA1 and TG-DTA2.

II. PURPOSE

This procurement aims to acquire TGA and DTA systems coupled with GC-MS in FY2026. It will create a vital laboratory platform for NIST, allowing advanced thermal analysis of complex materials linked to semiconductor manufacturing waste streams. This system aligns directly with the mission of the CHIPS Metrology Program, which is to build essential measurement science capabilities that promote critical material recovery, enhance sustainability, and reinforce the resilience of the U.S. semiconductor supply chain.

The results of this investment include developing a new national capability to assess the thermal decomposition and gas evolution behavior of semiconductor waste, a better understanding of material loss mechanisms, and creating publicly available datasets that encourage industry adoption of efficient recovery processes. Strategically, this capability will establish NIST as a leader in measurement science for circular microelectronics manufacturing and will directly contribute to national goals of reducing foreign dependence, enhancing supply chain visibility, and promoting innovation within the U.S. semiconductor industry.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for the award. Experimental, prototype, or custom items will not be accepted. The use of “gray market” components is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item Number: 0001 Description: TG-DTA coupled with GC-MS Quantity: 1 set

The Contractor shall deliver one (1) set of TG-DTA with GS-MS that shall meet or exceed the minimum requirements identified below.

1. General System Configuration and Requirements:

1.1. The TG-DTA shall consist of two furnaces.

1.1.1 TG-DTA1 shall focus on measuring TG and TG-DTA, with a temperature range of at least 25 ºC to 2000 ºC.

1.1.2 TG-DTA2 shall focus on measuring TG and TG-DSC, with a temperature range of at least 25 ºC to 1600 ºC.

1.2. A set of GC-MS and accessories shall be integrated with both TG-DTA1 and TG-DTA2.

1.3. The sample sensors of TGA and TG-DTA for TG-DTA1, as well as TGA and TG-DSC for TG-DTA2 shall be interchangeable for the relevant measurement mode.

1.4. The temperature variation of the furnaces shall be equal to or less than 0.5 ºC between 300 ºC and 1800 ºC for TG-DTA1, and between 300 ºC and 1500 ºC for TG-DTA2.

1.5. The balance resolution of TGA shall be equal to or less than 0.1 µg.

1.6. The temperature in the TG-DTA1 chamber shall be controllable to ensure accurate isothermal measurements between 300 ºC and 1700 ºC, and the TG-DTA2 chamber shall be controllable to ensure accurate isothermal measurements between 300 ºC and 1400 ºC.

1.7. The pressure in the TG-DTA1 and TG-DTA2 chambers shall be controllable to ensure accurate isobaric measurements between 10 mbar and 1000 mbar of chamber pressure, using an external mechanical pump.

1.8. A turbo molecular vacuum pump system shall be integrated to evacuate the sample chambers on both TG-DTA1 and TG-DTA2.

1.9. The evacuation vacuum pressure shall be equal to or less than 1.0 x 10-4 mbar within 20 minutes.

1.10. TG-DTA1 and TG-DTA2 shall safely transport inert, mixed, or corrosive gases.

1.11. A fully computerized system shall be integrated with software to control the systems and acquire and analyze data.

1.12. The software shall enable the analysis of the comparative results of TG, DTA, DSC, and GC-MS.

1.13. The software shall export all raw and analyzed metadata in Excel, CST, or CSV format.

1.14. The TG-DTA system shall have a solution to absorb the vibrations.

2. Thermal Gravimetry and Differential Thermal Analysis (TG-DTA)

2.1. TG-DTA1

2.1.1 The sample sensors shall be configured to include TGA and TG-DTA.

2.1.2 The maximum temperature of the furnace and sample sensors shall be equal to or higher than 2000 ºC.

2.1.3 The preferred heating elements shall be graphite or tungsten.

2.1.4 The heating element shall be protected up to 2000 ºC, and the protective tube or liner shall be replaceable.

2.1.5 The maximum heating rate shall be equal to or faster than 50 K/min.

2.1.6 The temperature and gas controllers and the power supplier shall be assembled correctly to meet the required specifications.

2.2. TG-DTA2

2.2.1. The configurations of the sample sensors shall be TGA and TG-DSC

2.2.2. The maximum temperature of the furnace and sample sensors shall be equal to or higher than 1600 ºC.

2.2.3. The preferred heating element shall be a silicon-carbide, a platinum, or a platinum-rhodium.

2.2.4. The configuration shall be dedicated to enabling the accurate measurement of thermodynamic and kinetic parameters: e.g., heat capacity and activation energy of thermal events.

2.2.5. The maximum heating rate shall be equal to or faster than 50 K/min.

2.2.6. The temperature and gas controllers and the power supplier shall be assembled correctly to meet the required specifications.

3. Gas Chromatography and Mass Spectrometry (GC-MS)

3.1. GC-MS shall be coupled to evaluate the gases generated by TG-DTA1 and TG-DTA2.

3.2. Both TG-DTA1, TG-DTA2, and GC-MS coupling bundles shall include all necessary adaptors for gas transfer, valve controllers, transfer lines, temperature controllers, and a PC.

3.3. The inlet of the GC shall be equal to or more than 2 ports.

3.4. The temperature range of the GC column oven shall be controllable to at least 300 ºC.

3.5. The temperatures of gas transfer lines shall be adjustable by temperature controllers.

3.6. The maximum temperature of the gas transfer lines shall be equal to or higher than 300 ºC.

3.7. The total gas flow range shall be accurately controllable.

3.8. The pressure range shall be equal to or at least 0 to 650 kPa.

3.9. The chamber temperature of MS shall be controllable at a minimum of 300 °C.

3.10. The range of mass shall be at least 1 u to 1022 u.

3.11. The instrument detection limit shall be equal to or less than 5 fg.

3.12. The GC-MS shall be controlled, analyzed, and quantified using integrated software.

4. Turbo Molecular Vacuum Pump for TG-DTA

4.1. One turbo molecular vacuum pump system shall enable the evacuation of the sample chambers of the two sets of TG-DTA1 and TG-DTA2.

4.2. The pumping speed shall be equal to or faster than 30 l/s.

4.3. The system shall be composed of a two-stage rotary vane pump.

4.4. A valve shall be installed between the turbo pump and the rotary vane pump.

4.5. The pressure gauge shall be installed with a wide-range vacuum gauge.

4.6. The control device shall display the vacuum pressure and the turbo pump operating status.

5. Sample Sensors

5.1. TGA sample sensor 1

5.1.1 The temperature range shall be at least 25 ºC to 2000 ºC.

5.1.2 The temperature shall be measured using a thermocouple capable of withstanding 2000 ºC.

5.1.3 The sample sensor shall be usable under inert, reducing, corrosive, or vacuum conditions.

5.1.4 The sample sensor shall be usable with various volumes of TGA sample crucibles.

5.2. TGA sample sensor 2

5.2.1 The temperature range shall be at least 25 ºC to 1500 ºC.

5.2.2 The temperature shall be measured using an S-type thermocouple.

5.2.3 The sample sensor shall be usable under inert, reducing, corrosive, or vacuum conditions.

5.2.4 The sample sensor shall be usable with various volumes of TGA sample crucibles.

5.3. TG-DTA sample sensor

5.3.1 The temperature range shall be at least 25 ºC to 2000 ºC.

5.3.2 The temperature shall be measured using a thermocouple capable of withstanding 2000 ºC.

5.3.3 The sample sensor shall be usable under inert, reducing, corrosive, or vacuum conditions.

5.3.4 The sample sensor shall enable the temperature measurement of the phase transition.

5.4. TG-DSC sample sensor

5.4.1 The temperature range shall be at least from 25 ºC to 1500 ºC.

5.4.2 The temperature shall be measured using an S-type thermocouple.

5.4.3 The sample carrier shall be usable under inert, reducing, corrosive, or vacuum conditions.

5.4.4 The sample carrier shall enable the accurate measurement of the heat capacity.

6. Gas Control System for TG-DTA1 and TG-DTA2

6.1. The gas controller shall include equal to or more than three mass flow controllers and valves.

6.2. The sample chamber shall have a minimum of two gas inlet ports.

6.3. The flow rate range shall be at least 5 ml/min to 250 ml/min.

6.4. The gas control system shall be assembled correctly to ensure compatibility with corrosive gases.

6.5. The flow rate shall be digitally readable and controllable.

7. Consumables and Accessories

7.1. TGA crucibles for 2000 ºC (tungsten, 0.3 ml, 10 crucibles)

7.2. TGA crucibles and lids for 1500 ºC (alumina, 0.9 ml, 4 sets of crucibles with lids)

7.3. TGA reference materials: calcium oxalate, etc.

7.4. TG-DTA crucibles and lids (tungsten, 2400 ºC, 0.08 ml; 20 crucibles and 10 lids)

7.5. TG-DTA crucibles and lids (alumina, 1500 ºC, 0.3 ml, 100 crucibles and 10 lids)

7.6. TG-DSC crucibles and lids (alumina, 1650 ºC, 85 µl, 20 sets of crucibles and lids)

7.7. O-ring sets to protect the corrosive gas for the base system, TG-DTA1, and TG-DTA2

OPTIONAL ITEMS:

The following are optional items that the Government requests vendors to provide pricing for in response to the solicitation. The Government will determine upon award if the items will be required. Higher confidence rating shall be given to quotations that provide Line items 005.

Line Item Number: 0002 Description: OPTIONAL ITEM 1 CalVet Detector Quantity: 1 Requirements: CalVet Detector

· The 3D CalVet sample sensor.

· The maximum temperature shall be 1600 ºC.

· Accessories for the 3D CalVet detector.

· The 3D sample crucibles and lids (alumina, 1500 ºC, 1.0 ml, 20 crucibles and lids)

· A set of heat capacity standard materials for a 3D sample crucible.

Line Item Number: 0003 Description: OPTIONAL ITEM 2 Drop Calorimetry Detector Quantity: 1 Requirements: Drop Calorimetry Detector

· The drop calorimeter sample sensor.

· The maximum temperature shall be 1500 ºC.

· Accessories for the drop calorimetry detector.

· The crucibles, plain covers, and open covers (alumina, 1500 ºC, 20 crucibles, plain covers, and open covers)

· A set of standard materials for a drop calorimeter.

Line Item Number: 0004 Description: OPTIONAL ITEM 3 Immersive sensor Quantity: 1 Requirements: Immersive sensor

· TGA immersive sensor for measurements in a salt solution bath.

· The temperature range shall be between 25 ºC and 1500 ºC.

· The container shall be made of alumina.

· Including 3 Pt and 5 BN immersion containers.

Line Item Number: 0005 Description: OPTIONAL ITEM 4 Knudsen effusion cells Quantity: 1 Requirements: Knudsen effusion cells

· TGA crucibles and lids for 2000 ºC (molybdenum, 0.9 ml, ϕ 2.9 mm hole, 4 sets of crucibles and lids)

· TGA crucibles and lids for 1500 ºC (alumina, 0.9 ml, 20 sets of crucibles and ϕ 2.9 mm hole lids)

· TGA crucibles and lids for 1500 ºC (alumina, 0.9 ml, 10 sets of crucibles and ϕ 0.3 mm hole lids)

· TGA crucibles and lids for 1500 ºC (alumina, 0.9 ml, 5 sets of crucibles and ϕ 0.1 mm hole lids)

Line Item Number: 0006 Description: OPTIONAL ITEM 5 Miscellaneous and Spares Quantity: 1 Requirements: Miscellaneous and Spares

· DTA crucibles (platinum, 0.3 ml, 6 crucibles).

· DSC crucibles and lids (platinum, 0.12 ml, 6 crucibles and lids).

· One extra set of radiation shields for a maximum temperature of 2000 ºC.

· One extra set of radiation shields for a maximum temperature of 1500 ºC.

· Oxygen getter insert system for Cp measurement.

· Two washers, two plates, and three holders for the sample sensor.

· Sets of O-rings for corrosive gases for TG-DTA1 and TG-DTA2.

IV. SCHEDULE OF DELIVERABLES

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 140 days of receipt of the deliverable.

Regular Business Hours Regular duty hours are Monday to Friday, from 8:30 a.m. to 5:00 p.m., excluding Federal holidays.

V. DELIVERY TERMS

Delivery shall be F.O.B. Destination OR equivalent INCOTERMS of Delivery Duties Paid (DDP) and shall occur according to the delivery due dates provided in the table above.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

VI. INSTALLATION

V-.1. The Contractor shall install the instrument in Building 223, Room A114, at NIST Gaithersburg, MD.

V-.2. Installation shall include, at a minimum, the following services: uncrating and unpacking of all equipment, setup and connection of all system components, initial startup, and a demonstration verifying that the equipment meets the specified performance criteria.

V-.3. The instrument will operate to the manufacturer’s specifications upon installation.

V-.4. Installation will take place during normal business hours, between 8:30 am and 5:00 pm Eastern Time, Monday through Friday, except Federal Holidays, and will be coordinated with the NIST Contracting Officer Representative (COR). Installation is to occur within 10 calendar days of delivery

VII. TRAINING

VI-1. The Contractor shall conduct two (2) days of training for at least three (3) users at NIST.

VI-2. The training shall provide a thorough demonstration of all system/solution functions, routine maintenance, and basic troubleshooting.

VI-3. The training shall be completed in person at NIST following the installation, setup, and on-site measurements that demonstrate no damage or misalignment issues have arisen during transportation and installation. However, it must be completed no later than 15 business days after installation.

VI-4. The training shall include TG-DTA with GC-MS provided by the vendor, during which various instrument features specified in this SOR shall be demonstrated and confirmed by the NIST Subject Matter Expert (SME) and the Contracting Officer Representative (COR).

VI-5. Training will be provided during normal business hours, between 8:30 am and 5:00 pm Eastern Time, Monday through Friday, except Federal Holidays, and will be coordinated with the COR to ensure maximum availability of NIST personnel.

VIII. INSPECTION & ACCEPTANCE

The Government reserves the right to conduct performance tests and evaluations, as defined below, to verify the performance of the TG-DTA-GCMS. These tests and evaluations will take place in the environment where the TG-DTA with GC-MS will be operated. The process will involve demonstrating measurements for various standards required for simultaneous measurements of thermogravimetric analysis, differential temperature analysis, and gas chromatography and mass spectrometry. The SME and COR will review the measurements to ensure they meet the requirements. The Contractor is entitled to attend the tests and evaluations, if conducted, at their own expense. The Government will inspect, test, and accept the onsite materials within 30 business days of receiving the TG-DTA with GC-MS. A visual inspection of the TG-DTA with GC-MS will be conducted by the NIST SME and COR to identify any defects or indications that the TG-DTA with GC-MS was damaged during transport to NIST.

Performance Tests:

1. The vendor shall demonstrate how to analyze similar results with the submitted data using calcium oxalate in the TG-DTA1/GC-MS compartment.

2. The vendor shall measure the heat of fusion of the supplied Ni-Nb alloy in the presence of oxygen using the TG-DTA2/GC-MS compartment.

IX. WARRANTY

The Contractor shall provide a minimum one-year warranty for the equipment. This warranty shall cover all parts (excluding consumables), labor, and travel (when issues cannot be resolved remotely) and will commence upon acceptance by the Government.

X. PAYMENT SCHEDULE

If partial payments are authorized, the contractor shall be paid upon receipt of a proper invoice and upon receipt and acceptance by the Government of all deliverables in accordance with the following schedule. Payment shall not be approved if deliverables have been rejected or are outstanding.

Payment #1 –60% Upon receipt of the equipment at NIST’s Dock;

Payment #2 – 20 % Upon successful completion of installation, acceptance testing, and training.

Payment #3 – 20 % Upon acceptance.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.

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