NIST_SPM_Lab_Chambers.pdf

PDF 555 KB Posted

Attached to
UHV Chambers Federal contract opportunity
Solicitation number
1333ND24QNB680331
Issued by
Department of Commerce National Institute of Standards and Technology

About this file

This document appears to be a detailed layout drawing and port configuration for several interconnected ultra-high vacuum (UHV) chambers, including a FIM chamber, loadlock chamber, and sample preparation chamber, that are required for a new scanning probe microscopy (SPM) laboratory at the National Institute of Standards and Technology (NIST).

The key details include the specific port configurations, focal point coordinates, flange types, and tube sizes for each chamber. This information is provided to support a federal contract opportunity solicitation for the procurement of these UHV chamber components. The solicitation, numbered 1333ND24QNB680331, is seeking nine vacuum chambers/components to be interconnected for the SPM laboratory to perform sample and probe preparation, as well as SPM measurements. The Department of Commerce's National Institute of Standards and Technology is the responsible federal agency for this requirement.

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UHV_chamber_STEP_files.zip ZIP file
Requirements.docx DOCX document
1333ND24QNB680331.docx DOCX document

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Text version

FIM chamber Port configuration, Layout drawing on page 1 of Chambers_all.pdf

Port # CF flange

OD

Flange type/bolt holes

Tube Size OD (inches) focal point focal length

(inches) azimuthal angle

(degrees) polar angle (degrees) Comments (flange use)

1 12 fixed / tapped 10 A 6.62 NA 180 evap source 2 2.75 fixed / blind tapped 2.75 A 8.435 270 90 wobblestick 3 6 fixed/ tapped 4 A 10.03 270 50 viewport 4 8 fixed / tapped 6 A 7.38 315 90 FIM flange/ xlator 5 2.75 rotatable/ clearance 1.75 A 7 0 90 tip heater z xlator 6 6 fixed/ tapped 4 A 10.03 0 50 viewport 7 2.75 fixed/ tapped 1.75 A 7 45 90 8 2.75 fixed/ tapped 1.75 B 7 45 90 9 6 rotatable/ clearance 4 A 9.25 90 90 to prevac chamber 10 2.75 fixed/ tapped 1.75 A 10.5 90 45 11 6 fixed/ tapped 4 A 6.95 135 90 turbo port 12 2.75 fixed/ tapped 1.75 B 7 135 90 gauge 13 4.5 rotatable/ clearance 2.75 A 7 180 90 14 6 rotatable/ clearance 4 A 7.5 225 90 15 2.75 fixed/ tapped 1.75 B 7 225 90 16 8 fixed / clearance 6 B 6.63 NA 0 ion pump

Focal Pt. Coordinates (X, Y, Z) (inches)

A (0, 0, 6.62) B (0, 0, 11.62)

Loadlock chamber Port configuration, Layout drawing on page 4 of Chambers_all.pdf

Port # CF flange

OD

Flange type/bolt holes

Tube Size OD (inches) focal point focal length

(inches) azimuthal angle

(degrees) polar angle (degrees) Comments (flange use)

1 8 rotatable/clearance 6 A 4.5 NA 180 ion pump 2 6 fixed / clearance 4 A 7.012 90 90 to 1st loadlock 3 2.75 fixed / clearance 1.75 A 5 0 90 extra 4 2.75 fixed / blind tapped 2.75 A 7 135 90 wobblestick 5 6 rotatable/ clearance 4 A 5 270 90 to rotary chamber 6 2.75 fixed/ clearance 1.75 A 5 200 90 extra 7 6 fixed / tapped 4 B 8.887 45 50 viewport 8 6 fixed / tapped 4 B 8.887 135 50 viewport 9 2.75 fixed / clearance 1.75 C 5 315 90 gauge port 10 4.5 fixed / clearance 2.75 C 5 225 90 getter pump?

11 8 fixed/ clearance 6 C 5 NA 0 manipulator

Focal Pt. Coordinates (X, Y, Z) (inches)

A (0, 0, 4.5) B (0, 0, 6.232) C (0, 0, 10.5)

FIM_chamber
FIM_source_flange
Loadlock_chamber
Sample_Prep_chamber
Sample_Prep_pump_nipple
sample_prep_source_flange
Sample_Prep_top_flange
STM_chamber
STM_pump_nipple

File details come from the government source that posted it. Updated .