Requirements.docx

STATEMENT OF WORK

Inspection microscope components

CTL 672

BACKGROUND INFORMATION

Advanced semiconductor technology has led to continuous performance improvements in transistors. However, many iterations are needed to obtain optimal performance and the yield and reproducibility is incredibly poor. Furthermore, US chip makers are ill-equipped with legacy measurement techniques and underperforming models. We propose a robust path to develop and verify high-frequency transistor models: 1) new on-wafer standards and calibration, 2) precision noise measurements for transistor quality assurance, 3) improved characterizations, 4) optimal models tailored to a given technology, and 5) transistor model verification across frequency with key performance indicators.

The RF technology division is seeking inspection microscope components to build custom manual probe stations dedicated to the characterization of active devices and circuits above 100 GHz. The solution must include 4k cameras, objective lenses of several magnifications, and manual Z focus blocks. This solution will enable transistor large-signal characterization that will be used to extract and validate transistor models under the CHIPS program.

MINIMUM REQUIREMENTS

The equipment shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide microscope components which shall meet or exceed the following minimum requirements, inclusive of FOB Destination shipping and warranty:

Line Item 0001:

Description: 4k resolution microscope camera Quantity: 5 Technical Specifications

· 4k resolution: 3840 x 2160 pixels or greater

· 30 frames per second (fps) readout or higher

· HDMI and USB3 output at full 4k resolution and 30 fps or higher

· RGB color image sensor with size no larger than 8 mm x 5 mm

· Visible wavelength response from 400 nm to 750 nm

· Camera body with tripod mounting thread and volume no larger than 100 mm x 80 mm x 70 mm

· C-mount lens interface

· Computer mouse input

· Software internal to camera for digital zoom and dimensional measurements

· Host computer software included with basic onscreen line drawing and dimensional measurement capability

· Sill image (JPEG, TIFF) and MPEG video recording

Line Item 0002:

Description: 10x long working distance microscope objective lens Quantity: 4 Technical Specifications

· 10x magnification, infinity corrected, plan APO optical design

· Working distance greater than 38 mm

· Numerical aperture (NA) greater than 0.2

· M26 x 0.706 mm mounting thread

· 95 mm parfocal distance

· F = 200 mm tube lens design

· Visible wavelength transmission from 400 nm to 750 nm

· Outer diameter no larger than 34 mm

· Field number of 22 mm or greater

Line Item 0003:

Description: 5x long working distance microscope objective lens Quantity: 2 Technical Specifications

· 5x magnification, infinity corrected, plan APO optical design

· Working distance greater than 36 mm

· Numerical aperture (NA) greater than 0.15

· M26 x 0.706 mm mounting thread

· 95 mm parfocal distance

· F = 200 mm tube lens design

· Visible wavelength transmission from 400 nm to 750 nm

· Outer diameter no larger than 34 mm

· Field number of 22 mm or greater

Line Item 0004:

Description: 2.5x long working distance microscope objective lens Quantity: 2 Technical Specifications

· 2.5x magnification, infinity corrected, plan APO optical design

· Working distance greater than 32.5 mm

· Numerical aperture (NA) greater than 0.05

· M26 x 0.706 mm mounting thread

· 95 mm parfocal distance

· F = 200 mm tube lens design

· Visible wavelength transmission from 400 nm to 750 nm

· Outer diameter no larger than 34 mm

· Field number of 22 mm or greater

Line Item 0005:

Description: 20x long working distance microscope objective lens Quantity: 1 Technical Specifications

· 20x magnification, infinity corrected, plan APO optical design

· Working distance greater than 22 mm

· Numerical aperture (NA) greater than or equal to 0.35

· M26 x 0.706 mm mounting thread

· 95 mm parfocal distance

· F = 200 mm tube lens design

· Visible wavelength transmission from 400 nm to 750 nm

· Outer diameter no larger than 34 mm

· Field number of 22 mm or greater

Line Item 0006:

Description: Manual Z focus block Quantity: 6 Technical Specifications

· Crossed roller bearing stage for Z focusing of inspection microscope

· Rack and pinion manual focusing mechanism with coarse and fine adjustment knobs

· Concentric placement of coarse and fine adjustment knobs

· Fine focus with 0.1 mm motion per revolution

· +/- 25 mm Z travel range

· M4 clearance hole pattern with greater than 4 screw holes and greater than 25 mm hole spacing for mounting inspection microscope

· M4 tapped hole pattern for mounting focus block to XY axis positioner: pole stand mounting is not acceptable as the only mounting for the focus block

· Load capacity of 40 kg or greater for supporting inspection microscope

· Body excluding knobs no larger than 150 mm x 110 mm x 80 mm

DELIVERY TERMS

Delivery shall be F.O.B Destination for domestic shipments or Incoterms Delivered Duty Paid (DDP) for non-domestic shipments and shall occur within 11 weeks from receipt of an order.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The DDP Incoterm, or “Delivery Duty Paid” Incoterm, states that the seller must make the goods available to the buyer at a prearranged location (NIST) and cover all associated expenses including unloading the goods from the carrier and any customs procedure costs and tariffs that may apply.

The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 325 Broadway Boulder, CO 80305

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 3 weeks of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1-year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

PAYMENT SCHEDULE

The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice and upon receipt and approval of the equipment, by the TPOC.

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