The Department of Energy (DOE) Office of Science awarded a $202,314 Project Grant to Eagle Harbor Technologies, Inc. on February 12, 2024 under the Office of Science Financial Assistance Program (CFDA 81.049). The grant funds research and development of independent electron and ion energy distribution control methods for semiconductor processing. Eagle Harbor Technologies, a small business provider of specialized pulsed power solutions, will apply its expertise in areas such as plasma physics, propulsion systems, and semiconductor technology to advance semiconductor manufacturing techniques through the use of repetitive pulsed power. This work aligns with the DOE Office of Science's mission to drive scientific discoveries and technological innovations that enhance U.S. energy, economic, and national security.
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