Cooperative Agreement 70NANB19H045

Award Date 8/1/19
Completion Date 1/31/20
Dollars Obligated $107K
Federal Grant Program
11.620
Assistance Type
Cooperative Agreement
Place of Performance
Ithaca, NY, USA

NANOMACHINE DEVICE FOR SEMICONDUCTOR PROCESS CONTROL MONITORING

Posted 7/15/19, 12:00 AM