Two semiconductor-process compatible dry pumps
Active Purchase Order Awarded Last action
- Contract number
- 80NSSC26P1416
- Awardee
-
Ebara Technologies Inc. UEI F1RNC7MY8B53
- Awarding agency
-
Shared Services Center
National Aeronautics and Space Administration
- Obligated
- $37,980
Award facts
- Opportunity
-
- Two semiconductor-process compatible dry pumps Solicitation · 80NSSC26938324Q · Posted Jul 16, 2026
- Contract value 100% obligated
- $37,979.67 Current and potential, with all options
- Completion date 57% complete
- Current and potential, with all options
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Set-aside
- No set-aside
- Competition
- Not Competed under SAP · 1 offer Simplified Acquisition
- Pricing
- Firm Fixed Price
- Place of performance
- Greenbelt, MD 20771, USA
Award details come from SAM.gov/FPDS.
About this award
NASA's Shared Services Center issued a purchase order to Ebara Technologies Inc. on August 24, 2026, for two semiconductor-process compatible dry pumps (EBARA Model EV-S20P) valued at $37,979.67, with completion due December 24, 2026.
The order procures two new, unused pumps (Part Number 202179, specifications 1670 L/min, 200–220V, 50/60Hz, NW50 connection) with two power cable assemblies, to be delivered to NASA Goddard Space Flight Center in Greenbelt, Maryland. The pumps will replace malfunctioning equipment in semiconductor etching tools performing fluorine-based reactive ion etching, vapor hydrofluoric acid etching, and chlorine-based reactive ion etching processes. Pumping speed ranges from 58 to 710 CFM with ultimate pressure capability as low as 3 mTorr. Equipment must meet manufacturer specifications and quality standards. Ebara Standard Warranty covers 12 months from shipment, with 2–4 week lead time after order receipt. The order originated from a sole-source solicitation posted July 16, 2026, with a due date of July 20, 2026.
Quick answers
Who was awarded contract 80NSSC26P1416?
80NSSC26P1416 was awarded to Ebara Technologies Inc. by Shared Services Center (National Aeronautics and Space Administration) on August 24, 2026.
How much is contract 80NSSC26P1416 worth?
The government has obligated $37,980 on 80NSSC26P1416.
Was contract 80NSSC26P1416 competed?
The extent of competition for 80NSSC26P1416 was not competed under sap. The government received 1 offer.
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