Inductively coupled plasma deep reactive ION etching (ICP drie) system
Ended Purchase Order Awarded Last action
- Contract number
- 80GSFC24PA015
- Awardee
-
Samco Inc. UEI YLRNSNYB1SS8
- Awarding agency
-
Goddard Space Center
National Aeronautics and Space Administration
- Obligated
- $901,461
Award facts
- Opportunity
-
- Inductively Coupled RIE Pre-Solicitation · 80GSFC24R0013 · Posted Dec 18, 2023
- Contract value 100% obligated
- $901,461.00 Current and potential, with all options
- Completion date 100% complete
- Current and potential, with all options
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- Set-aside
- No set-aside
- Competition
- Competed under SAP · 2 offers Simplified Acquisition
- Pricing
- Firm Fixed Price
- Place of performance
- Santa Clara, CA 95051, USA
Award details come from SAM.gov/FPDS.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Other Administrative Action | $0 | |
| Supplemental Agreement for work within scope | $0 | |
| Other Administrative Action | $0 | |
| Original award | $901,461 |
About this award
This $901,461 firm fixed price purchase order was awarded by the National Aeronautics and Space Administration (NASA) Goddard Space Flight Center to Samco Inc., a small business semiconductor equipment company based in Santa Clara, California. The contract is for the delivery of an Inductively Coupled Plasma Deep Reactive Ion Etching (ICP DRIE) system, which will be used to etch high-aspect-ratio and nanoscale silicon structures in the Detector Development Laboratory. The system must be capable of handling silicon wafers ranging from 100mm to 200mm in diameter and include automated control software for both blanket and Bosch etching processes. This contract has no set-aside designation. The original pre-solicitation notice was posted in December 2023, seeking capability statements from all interested parties, including small businesses and historically underrepresented groups, to help determine the appropriate level of competition and small business subcontracting goals.
Quick answers
Who was awarded contract 80GSFC24PA015?
80GSFC24PA015 was awarded to Samco Inc. by Goddard Space Center (National Aeronautics and Space Administration) on August 1, 2024.
How much is contract 80GSFC24PA015 worth?
The government has obligated $901,461 on 80GSFC24PA015.
Was contract 80GSFC24PA015 competed?
The extent of competition for 80GSFC24PA015 was competed under sap. The government received 2 offers.
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