BMF HF Vapor Etcher
The National Institute of Standards and Technology (NIST) is conducting market research to identify vendors capable of supplying a BMF HF Vapor Etcher system for its Boulder Micro-Fabrication Facility. This pre-solicitation notice seeks information from both large and small businesses that manufacture this specialized laboratory equipment, with particular emphasis on identifying U.S.-based manufacturers. The primary contract requirement is the procurement of one new hydrofluoric acid vapor etching unit capable of processing substrates up to 150 mm in diameter, meeting strict safety standards for HF handling, and achieving specific etch rate performance of 3-30 mm/hour with 90% typical uniformity. The system must be a tabletop unit compatible with ISO Class 5 cleanroom environments, operate on standard 120V electrical power, and include a minimum one-year warranty covering labor, parts, and equipment. Interested vendors must submit responses by May 8, 2026, and should clearly indicate the country where the BMF HF Vapor Etcher is manufactured. This market research announcement is not a formal Request for Proposals or Quotes, and the Government is not obligated to make any payments for information received or to award a contract in the future.
This procurement carries no set-aside designation at the current stage, though NIST will consider all Small Business Set-aside categories if at least two qualified small businesses are identified during the market research phase. The notice references a potential trade-in credit for the existing Idonus VPE 100 system, suggesting some awareness of current incumbent equipment, though no specific budget or award value is disclosed in this pre-solicitation notice. The required delivery timeline is approximately one year After Receipt of Order (ARO) to NIST's Boulder, Colorado facility on an F.O.B. Destination basis. Payment terms specify 100% upon successful installation, acceptance, and demonstration of technical compliance following Government performance testing and visual inspection within 30 days of receipt. The procurement requires new equipment only in original manufacturer packaging with complete documentation, explicitly excluding used, remanufactured, prototype, or gray market components. All responses must specify the manufacturing country and be submitted through the Systems for Award Management (sam.gov) upon issuance of the formal solicitation.
NB680000-26-01364 Department of Commerce National Institute of Standards and Technology
4/29/26, 10:21 AM NOTICE OF INTENT-BMF HF Vapor Etcher
The National Institute of Standards and Technology (NIST) issued a notice of intent on May 8, 2026 to negotiate a sole-source purchase order with Idonus Sarl (CAGE: SCH63), a Switzerland-based vendor, for a BMF HF Vapor Etcher under FAR 12.102(a) and 41 U.S.C. 3304(a)(1) (only one responsible source). NIST's Boulder Microfabrication Facility requires a new HF vapor etcher capable of processing SEMI spec 150 mm wafers, expanding beyond the current system's 100 mm maximum capacity while retaining all existing silicon dioxide film removal capabilities. The acquisition will use simplified procedures under 41 U.S.C. 1901 and will be awarded as a firm-fixed-price purchase order. Interested parties that can demonstrate capability to meet these requirements must submit written responses by May 18, 2026. Responses will be evaluated solely to determine whether competitive procedures could be used; this notice is not a solicitation. NAICS 334516 (Analytical Laboratory Instrument Manufacturing) applies, with a 1,000-employee size standard.
NB680000-26-01364 Department of Commerce National Institute of Standards and Technology
5/8/26, 6:15 PM