Invitation to bid for ICP-RIE (Fluorine), ICP-RIE (Chlorine), and PECVD cleanroom equipment

Texas State University issued an Invitation for Bid (IFB) on January 23, 2026, seeking procurement of three specialized pieces of cleanroom equipment: an ICP-RIE (Fluorine) system, an ICP-RIE (Chlorine) system, and a PECVD (Plasma-Enhanced Chemical Vapor Deposition) system. All three equipment pieces must be manufactured and supported by a single supplier to ensure vendor integration and unified technical support for these specialized instruments. The equipment must be designed to operate in a particle-controlled cleanroom environment and enable precise operator control of critical chamber conditions including pressure, electrical bias, gas flow, temperature, and sample positioning. These systems will be utilized to perform etching or deposition processes on various substrates and thin films through chemical and/or physical processes. Bids must be submitted electronically through the TXST MarketPlace (Jaggaer) system, with a firm deadline of January 30, 2026, at 12:00 p.m. Central Time. The procurement prioritizes qualified vendors capable of providing integrated technical support across all three equipment platforms and maintaining long-term operational partnerships with the university.

The available documentation does not specify set-aside designations, restrictions on organization types, disadvantaged enterprise requirements, incumbent vendors, current contractors, or specific budget ranges and award values for this procurement. The IFB documentation directs respondents to submit proposals through the TXST MarketPlace online portal and references additional terms and conditions within the complete solicitation materials. Interested vendors should review the full IFB documentation for comprehensive information regarding evaluation criteria, pricing terms, funding sources, technical specifications, and any other requirements necessary for proposal preparation and submission. The single-supplier requirement may effectively restrict competition to manufacturers with the capability to provide all three equipment types or through partnerships enabling unified support structures.