Upgrade existing Superconductor/Insulator/Superconductor DEPosition sputter deposition tool

National Institute of Standards and Technology (NIST)
Acquisition Management Division, Boulder, CO

Sources Sought for Commercial Item Purchase - SISDEP Sputter Tool Upgrade

The Boulder Microfabrication Facility (BMF) of NIST seeks information on small business vendors or large business vendors that can provide an upgrade to an existing Superconductor/Insulator/Superconductor DEPosition sputter deposition tool to enable more uniform processes on larger wafer sizes. This system (referred to as the SISDEP), is used to grow Nb-AlOx-Nb tunnel junctions. While it has served BMF well for more than 10 years, there has been a consistent minor problem with the uniformity of the oxidation of the Al layer.

SPECIFIC REQUIREMENTS
Upgrade to SISDEP sputter deposition system to allow for more uniform substrate oxidation and temperature control
TECHNICAL SPECIFICATIONS:
Load Lock Upgrade:
Fabricate new larger load lock chamber compatible with existing system. The new load lock must include a 150 mm (6 inch) or larger gas showerhead to provide for uniform oxygen dosing at the wafer surface. The new load lock should utilize existing instrumentation (gauges, pumps) where possible. It should include at least 2 additional 2.75 inch conflat ports for possible upgrade to system instrumentation. Integration of this new load lock will be primarily performed by NIST personnel.
Wafer Platen Upgrade:
Fabricate RF biased, water cooled rotating substrate platen compatible with existing system. This platen should utilize existing instrumentation where possible such as RF power supplies, matching networks, shutter pneumatics. The platen must be compatible with 3" and 150 mm (6") wafers. Integration of the new platen (including rotation and z-shift motor control) will be primarily performed by NIST personnel.

This announcement is not a Request for Proposals (RFP) and does not commit the Government to award a contract now or in the future. No solicitation is available at this time. The purpose of this synopsis is to identify small or large businesses with the requisite qualifications to meet the requirements of the item stated herein. After results of this market research are obtained and analyzed and compared with NIST's minimum requirement (see Technical Specifications above), NIST may conduct a small business set-aside competitive procurement and subsequently award a contract. If at least two qualified small businesses are identified during this market research stage, then this acquisition will be solicited as a small business set aside. NIST is seeking responses from all responsible large business and small business sources (SB, SDB, WOSB, HUBZone, SDVOSB and VOSB). This requirement is assigned a NAICS code of 333242 (Semiconductor Machinery Manufacturing).

The specific purpose of this Sources Sought Announcement is to determine if there are small or large businesses, within the parameters identified above, that can provide the product identified.

Interested business organizations that believe they can meet the requirement should submit electronic copies of their capability statement. Please limit responses to three (3) pages or less. Responses should include the following information:
1. Name of company that will provide product.
2. Name of company that will manufacture the product.
3. Spec sheets and examples of products that meet the specifications.
4. Typical lead time to deliver the product after receipt of order.
5. Any other relevant information that is not listed above which the Government should consider in developing our minimum specifications and finalizing our market research.

Any proprietary information should be clearly marked. The written capability statement should be received by the Contract Specialist no later than 2:00 pm MST Aug 21, 2017. The capability statement shall identify the business status of the organization.

Only electronic statements will be accepted. Faxes will not be accepted. Send emails and any inquiries to Michael Fredericks, Contracting Officer, at michael.fredericks@nist.gov

Place of Contract Performance:
Contractor's facility