Semiconductor Process Residual Gas Analyzer
Closed Solicitation Posted
- Solicitation number
- 1333ND26QNB640573
- Agency
-
National Institute of Standards and Technology
Department of Commerce
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- Gaithersburg, Maryland 20899, United States
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology seeks a semiconductor-grade Process Residual Gas Analyzer for use on flow systems including an ALD reactor, with quotations due September 14 at 9:00 AM Eastern Time. This is a Request for Quotation (RFQ) for commercial items under full and open competition with no set-aside.
Place of performance is Gaithersburg, Maryland. The RGA must be compatible with low-volatility organometallic and metal halide precursors and process gases, and will serve as an online process diagnostic for a CHIPS R&D Metrology program focused on developing digital twin technology for semiconductor manufacturing equipment. The flow systems are equipped with in situ and inline sensors to acquire process data on thin film growth characterization. One unit will be procured. Delivery is FOB destination within 16 weeks of award to building 221/A111, during normal business hours Monday through Friday, excluding Federal Holidays.
The NAICS code is 334516, Analytical Laboratory Instrument Manufacturing, with a small business size standard of 1,000 employees. The PSC is 6640, Laboratory Equipment and Supplies. Award will be made to the responsible quoter submitting the lowest priced technically acceptable quotation. All quotations must address each specification in the requirements document and clearly demonstrate that commercial items quoted meet each specification. Quotations must be submitted via email to contract specialist Latish Walker at latish.walker@nist.gov or by phone at 301-975-0474.
Notice text
SOLICITATION 1333ND26QNB640573
Semiconductor Process Residual Gas Analyzer
This is a solicitation for commercial items prepared in accordance with the format in RFO Subpart 12.2, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested, and a separate written document will not be issued.
This solicitation is a Request for Quotation (RFQ).
The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 – Analytical Laboratory Instrument Manufacturing with a Small Business size standard of 1,000 Employees. This requirement will be a Full and Open Competition.
The Chemical Process and Nuclear Measurements Group is seeking a semiconductor-grade Process Residual Gas Analyzer (RGA) for use on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. This program focuses on developing digital twin technology for semiconductor manufacturing equipment. The flow systems, equipped with in situ and inline sensors, are used to acquire process data on thin film growth characterization. The RGA will serve as an online process diagnostic. The RGA must be compatible with low-volatility organometallic and metal halide precursors and process gases. The data and models generated by this project will lead to improvements in process optimization and control, ultimately resulting in cost savings for the US semiconductor industry.
Files
| File | Type | Posted |
|---|---|---|
| 1333ND26QNB640573 - Semiconductor Process Gas Analyzer.pdf |
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