3-Axis Motorized Stages

NIST-SS26-CHIPS-82

PLEASE NOTE THIS A SOURCES SOUGHT NOTICE ONLY

Title: 3-Axis Motorized Stages

BACKGROUND

Sensor Science Division, we are developing a magnetic imaging microscope to quantify temperature using magnetic nanoparticle thermometers embedded in semiconductor advanced packages. To perform 3D thermal imaging, we require a 3-axis translational system as the center piece of the magnetic imaging microscope to allow access to 3D spatial information.

Design and build a scanning linear stage system, which includes an integrated 3-axis stage stack, 1 additional linear stage, and a motion controller for at least 4 axes.  The scanning stage system will provide linear motion for a custom-built magnetic scanning microscope we are developing, and it must meet the geometric and performance specifications required by our planned instrument.  The scanning stage bodies must be fabricated with non-magnetic materials (e.g., aluminum or titanium) and include non-magnetic-type encoders to provide location data.  The detailed requirements for the scanning stage system are described below.

Minimum requirements:

The Contractor shall provide the following scanning stage system that meet the following minimum specifications:

1. Linear Motorized Stages of the XYZ Stage Stack
   1. Travel Ranges

1. X-stage: 300 mm travel
2. Y-stage: 100 mm travel
3. Z-stage: at least 50 mm travel
   1. Motion Requirements

1. Accuracy: 2 µm
2. Repeatability: 1.5 µm
3. Smallest step size: £ 1.5 µm
4. Maximum velocity: 10 mm/s
5. Must be possible to execute repeated XY scanning
   1. Z-stage Specific Requirements

1. Z-stage mounted on top 
2. Z-stage must be low profile lift-type stage in order keep stack height small
   1. Assembly and Mapping by Vendor

1. The XYZ stack must be assembled by the vendor
2. The XYZ stack must calibrated (at least for X and Y directions) by the vendor, to show that accuracy and repeatability requirements have been met
   1. Other Stage Requirements

1. Total stack height must be < 375 mm
2. Must operate within specs with payload up to 4 kg (40 N)
3. Must have non-magnetic body (e.g., aluminum)
4. Must have non-magnetic encoders
5. All cables and accessories must be included
6. Must have imperial unit dimensions for mounting holes

1. Additional Linear Stages for the 4th Axis (we will mount these on our own custom frame)

1. Travel range: 75 mm (preferably) or 100 mm (acceptable)
2. Motion Requirements

1. Smallest step size: £ 1.5 µm
2. Maximum velocity: 10 mm/s

1. Other Stage Requirements

1. Multi-axis Stage Controller and Drivers

1. Must be able to control at least 4 axes
2. Ethernet or USB communication port
3. Must be controllable from LabVIEW, MATLAB, or Python
4. All cables and accessories must be included for operating stages from controller

HOW TO RESPOND TO THIS NOTICE

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QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact listed in this notice. Questions should be submitted so that they are received by 5:00 p.m. Eastern Time on March 12, 2026.  Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline.

IMPORTANT NOTES

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