A02 - Salient Characteristics.doc

Salient Characteristics

Commercial Availability Certification:

I have evaluated the commercial marketplace and determined that all of the salient characteristics documented below are available in products/services offered in the commercial marketplace.

Signature (typed name): __Ryan Knight TPOC and COR___________ Technical Point of Contact (TPOC) or Contracting Officer’s Representative (COR)

The Government requires the purchase of one (1) each Vacuum Operated Semi-Auto Wafer prober in accordance with the following Salient Characteristics:

a. Vacuum chamber with view port centrally located above chuck.

b. Vacuum pump port and vacuum gauge port.

c. Electrical feedthroughs for motors, and electrical connection to the chuck

d. >=25 coaxial feedthroughs for probe card cabling, and 25 coaxial cables to connect to the probe card.

e. Pressurized air feedthroughs and internal piping for chuck, baseplate and probe card holder cooling

f. Rated for vacuum of better than or equal to 10^-7 torr when cryopumped

g. Gas port with vent for venting

h. Gate valve between turbo pump and the chamber

i. Overpressure pop-off-valve

j. Vacuum-compatible motorized XY chuck capable of probing >= 150 milimeters (mm) wafer and motion sufficient to move the chuck during backe-out from under the probe card to under the cooled portion of probe card holder, <= 3 mircrometer (µm) resolution, <=+/-6.5 µm repeatability

k. Vacuum-compatible motorized >=12 mm Z chuck motion, <=1 µm resolution, <= +/-2 µm repeatability resolution

l. Vacuum-compatible motorized >= +/-10° Θ (azimuth) rotational motion

m. Communication interface: RS-232

n. Probe card adapter with manual planarization adjustment

o. Active probe card built with Govt provided electrical circuity (integrated circuits, passives, and voltage and current values)

p. Triaxial thermal chuck system for ambient to +400 °C heating, thermal chuck for holding >= 150 mm wafers with set of clamps

q. Cryogenic trap in-line with turbomolecular pump

r. Digital microscope with >= 90X magnification and connected control interface with flat screen monitor

s. Vibration dampening feet

t. Ebara roughing pump

u. 350 liters/second turbo pump with process chamber connection of DN 100 ISO-K or larger

v. >= one (1) year manufacturing warranty Contracting Officer:

Template last updated 07/28/2016