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Salient Characteristics Consumables and spare parts for the Government-owned and existing PE106 Hot Wall Chemical Vapor Deposition (HWCVD) Silicon Carbide (SiC) reactor 20 June 2018 C.1 Objective
The Contractor shall provide consumables and spare parts for the Government-owned and existing PE106 Hot Wall Chemical Vapor Deposition (HWCVD) Silicon Carbide (SiC) reactor to Army Research Laboratory (ARL). The Contractor shall provide materials, equipment, and components in support of operation, maintenance, and repairs of the PE106 HWCVD Silicon Carbide reactor, in accordance with section C.2.
C.2 Requirements
C.2.1 The Contractor shall provide consumables and spare parts for the Government-owned and existing PE106 Hot Wall Chemical Vapor Deposition (HWCVD) Silicon Carbide reactor to the ARL in accordance with the following Salient Characteristics based on the specific Delivery Order (DO) requirements.
C.2.1.1 The Contractor shall provide consumable and spare parts to Adelphi Laboratory Center (ALC).
The following parts shall be original and supplied by LPE s.p.a. Company for the aforementioned PE106 HWCVD SiC reactor:
Consumable Parts
| Description |
| Group |
| Part Number |
| Susceptor (four (4) inches (") and six (6)") |
| GRAPHITE |
| TS1163WQ |
| Three (3)"Wafer support plate |
| GRAPHITE |
| TS1269WQ |
| Four (4)" Wafer support plate |
| GRAPHITE |
| TS1171WQ |
| Support plate for twenty four (24) pieces |
| GRAPHITE |
| TS1419WQ |
| Six (6)" Support plate - 1/4 76.2 millimeter (mm) |
| GRAPHITE |
| TS1420WQ |
| Six (6)" Wafer support - 4/4 76.2mm |
| GRAPHITE |
| TS1421WQ |
| Six (6)" Wafer support - 1/4 100mm |
| GRAPHITE |
| TS1422WQ |
| Six (6)" Wafer support - 4/4 100mm |
| GRAPHITE |
| TS1423WQ |
| Six (6)" Wafer support ring SiC no side ty b |
| GRAPHITE |
| TS1516WQ |
| Six (6)” graphite Ring SiC coat no side |
| GRAPHITE |
| TS1515WQ |
| Susceptor side wall |
| SiC |
| 4000003 |
| Bottom half moon |
| GRAPHITE |
| TS1162WQ |
| Upper half moon |
| GRAPHITE |
| 4000547 |
| Transition Piece one (1) grade SiC-6 |
| GRAPHITE |
| 4000445 |
| Transition Piece two (2) |
| GRAPHITE |
| TS1161WQ |
| Insulation Plug |
| GRAPHITE |
| 4000552/T |
| Purge Connection |
| GRAPHITE |
| 4000553/T |
| Rotation Plug - TaC Coated |
| GRAPHITE |
| 4000557/T |
| Rotation Connection-TaC Coated |
| GRAPHITE |
| 4000558/T |
| Up Stream Insulation |
| CALCARB |
| 6000361 |
| Four (4)” to six (6)” Down Stream Insulation |
| CALCARB |
| TS1129WQ |
| Main Insulation Upper |
| CALCARB |
| 6000363 |
| Main Insulation Lower |
| CALCARB |
| 6000363 |
| Gas Liner Support |
| CALCARB |
| SWR20154 |
| Six (6)” Left Upstream Protection Cover |
| GRAPHITE |
| TS1165WQ |
| Six (6)” Right Upstream Protection Cover |
| GRAPHITE |
| TS1166WQ |
| Six (6)” Long Left Protection Cover |
| GRAPHITE |
| TS1337WQ |
| Six (6)” Long Right Protection Cover |
| GRAPHITE |
| TS1338WQ |
| Six (6)” Central Protection Cover |
| GRAPHITE |
| TS1167WQ |
| Centering Pin |
| GRAPHITE |
| TS1133WQ |
| O-Ring Shield |
| CALCARB |
| SWR20069 |
| Centering Bush |
| GRAPHITE |
| TS1079WQ |
| Bursting Disk |
| VACUUM |
| 4RA35004 |
| Upstream Lid O-ring |
| VITON |
| 4GU81400 |
| Main Quartz Tube O-ring |
| VITON |
| 4GU81100 |
| Downstream Drum O-Ring |
| VITON |
| 5GU81200 |
| Injection Flange O-Ring |
| VITON |
| GU0219 |
| Ultra Torr Fitting O-Ring |
| VITON |
| 4RA0303 |
| M8 Screw O-Ring |
| VITON |
| 4GU2043 |
| Articulation Bush |
| TEFLON |
| SWR30404 |
| XFER Chamber O-Ring |
| VITON |
| 3GU8220 |
| Nickel Gasket 3/8" |
| NICKEL |
| RA0050 |
| Nickel Gasket 1/4" |
| NICKEL |
| RA0047 |
| O-Ring Kit for Item Number 3VA0197 |
| VITON |
| 3VA0197_KIT |
| O-Ring for Slit Valve 3VA0221 |
| VITON |
| 3GU4625 |
| O-Ring for Slit Valve 5VA0141 |
| VITON |
| 5VA0141KIT |
| O-Ring Kit for Valve 4VA0111 |
| VITON |
| 4VA0111KIT |
| Copper Gasket Conflat (CF) sixty-three (63) |
| COPPER |
| 4RA1672 |
| Copper Gasket CF thirty-eight (38) |
| COPPER |
| 4RA1671 |
| O-Ring for Butterfly Valve DN50 |
| VITON |
| TS1247 |
| O-Ring for Butterfly Valve DN40 |
| VITON |
| TS1265 |
Spare Parts
| Description |
| Group |
| Part Number |
| Safety Relay Pilz |
| REACTOR |
| 3RL0025 |
| M12 Devicenet Connector |
| GASPANEL |
| 3CT0756 |
| CIRC. T M12 Devicenet Connector |
| GASPANEL |
| 3CT0758 |
| Y five (5) Poles A M12 |
| GASPANEL |
| 3CT0767 |
| Silicone Tube Ø 10mm X 2.5mm |
| ROBOT |
| MP0060/A |
| Turbine Flow Meter 10-140 Liters Per Minute (LPM) |
| COOLING |
| 3FQ0056 |
| Display for Turbine Flow Meter |
| COOLING |
| 3FQ0057 |
| EBARA Cooling Pump Repair Kit |
| COOLING |
| 3MV0125G1 |
| EBARA Cooling Pump 230 volts (V) sixty (60) Hertz (HZ) |
| COOLING |
| 3MV0124 |
| Loadlock Sensor Omron E3ZLS66 |
| REACTOR |
| 3OE0674 |
| Cable for 3OE0674 95A251430 |
| REACTOR |
| 3OE0675 |
| Pyrometer Fiber Optic OF-2S-BLBP |
| PYROMETER |
| 4OE8607 |
| Analog Output Module IO-IFA5 |
| PYROMETER |
| 4OE8608 |
| Laser Target Illuminator |
| PYROMETER |
| 4OE8315 |
| Newport Vacuum-Gimbal Mount |
| PYROMETER |
| 4OE3112 |
| Support Pyrometer U200-G2K-NL |
| PYROMETER |
| 4OE3113 |
| Pyrometer Rayomatic fourteen (14) for Quartz |
| PYROMETER |
| 3OE0014 |
| Vacuum ninety degrees (90°) Valve NC KF50 |
| VACUUM |
| 3VA0197 |
| Vacuum 90° Valve NC KF40 |
| VACUUM |
| 5VA0409 |
| DN50 Butterfly Valve |
| VACUUM |
| SWR60068 |
| DN50 Butterfly Valve Controller Cable |
| VACUUM |
| MV0652 |
| Pressure Baratron 229A 0-100 millimeters of Mercury (mmHg) |
| GASPANEL |
| MN0095 |
| Centering Ring DN100 ISOK |
| Stainless Steel (SS) |
| 5RA15432 |
| O-Ring 6162 Viton 75SH (V145) 4VA0102 |
| VITON |
| GU0330 |
| Centering Ring DN40 (centering and O-Ring) |
| SS & VITON |
| RA0004 |
| Centering Ring DN50 Kwik-flange (KF) (centering and O-Ring) |
| SS & VITON |
| RA0136 |
| Centering Ring DN63 ISOK (centering and O-Ring) |
| SS & VITON |
| RA0010 |
| Centering Ring DN25 KF (centering and O-Ring) |
| SS & VITON |
| 4RA1083 |
| Centering Ring DN16 KF (centering and O-Ring) |
| SS & VITON |
| 4RA1081 |
| Reducing Centering Ring KF16 to KF10 |
| SS |
| RA0142 |
| Centering Ring DN10 KF |
| SS |
| RA0141 |
Gas Liner Support
SWR20106
| Main Quartz |
| TUBE |
| SWR20001 |
Light End Effector
TS1464WQ
Reaction chamber pusher
SWR30304
| Inspection |
| QUARTZ |
| SWR30213 |
Load Lock Cover
SWR30212
Load Lock Chuck
TS1144WQ
| Left Quartz Shield |
| QUARTZ |
| TS1103WQ |
| Right Quartz Shield |
| QUARTZ |
| TS1102WQ |
| Viewing Quartz one (1) |
| QUARTZ |
| SWR30317 |
4” to 6" Wafer Support Spacer one (1)
TS1145WQ
C.3 Packaging and Logistics
C.3.1 The Contractor shall deliver all spare parts, and consumables in accordance with the delivery requirements defined in each DO.
C.3.3 The Contractor shall ensure all spare parts, and consumables are packaged in accordance with the terms defined in each DO.
C.3.4 The Contractor shall label and seal the spare parts, and consumables in accordance with the terms defined in each DO.
C.3.5 The Contractor shall enclose a company generated packing list in accordance with the terms defined in each DO.
Template last updated 02/27/2015
