A01_-_Salient_Characteristics.pdf

Salient Characteristics

The Sensors and Electrons Devices Directorate (SEDD) requires one (1) wet bench with the following characteristics. The wet bench shall have the following specified alterations, which are necessary to fit existing equipment:

C.1 General Characteristics

C.1.1 The wet bench shall be fully exhausted and enable the processing of photoresist materials, including coating, baking, developing, and stripping of the photoresist material.

C.1.2 The wet bench shall be constructed of a material and be resistant to organic solvents such as acetone, isopropyl alcohol, Propylene Glycol Methyl Ether Acetate (PGMEA) (2-methoxy-1-methylethylacetate), xylenes, and n-butyl acetate.

C.1.3 The eye shield shall be hinged and composed of clear acrylic.

C.1.4 The maximum overall dimensions of the wet bench shall be 134” (340 cm) in length, 42” (107 cm) in depth, and 73” (185 cm) in height.

C.1.5 The minimum deck dimensions of the wet bench shall be 130” (330 cm) in length, 34” (86 cm) in depth, and 0.5” in thickness.

C.1.6 The lighting inside the wet bench is required to block more than 99% (>99%) of wavelengths below 500 nanometer (nm).

C.1.7 The wet bench shall have three (3) nitrogen spray guns (shown in Figure 1 of A01 - Technical Exhibit). Two (2) nitrogen guns shall be located at both ends and one (1) in the center of deck workspace.

C.1.8 The wet bench shall have seven (7) 20 Amp duplex power receptacles, four

(4) above deck and three (3) below in the bottle storage area.

C.1.9 The nitrogen gas (N2) and vacuum headers connections shall be on top of the fume hood.

C.1.10 Connections from headers for nitrogen and vacuum lines shall be located in wells according to specifications in C.4.3 and have 0.25” tubing run inside the wet bench.

C.1.11 Shall be able to connect to existing 12” round exhaust (adapters are acceptable).

C.1.12 The wet bench shall be made of fire safe materials – meeting FM4910 protocol if composed of polymeric material.

C.1.13 The wet bench shall have rolling casters and leveling pads.

C.1.14 Shall be designed with a pressure drop, at the wet bench’s design airflow, to be equal to or less than the static pressure of the exhaust system at the point of connection (0.425 inches-water gauge).

C.1.15 The wet bench shall have a face velocity of 80 ft/min or greater of air.

C.1.16 The face opening (sash height) shall be at least 12 inches in height.

C.2 Safety Implementations

C.2.1 The wet bench shall have an exhaust monitor interlocked to hood power (e.g.

Magnehelic or Photohelic) and a visual or audio alarm in the event of exhaust failure.

C.2.2 The wet bench shall have one (1) Semiconductor equipment and materials international (SEMI) standards emergency off (EMO) button (SEMI S2 0706).

C.3 Chemical Storage Characteristics

C.3.1 The wet bench shall have a leak tight storage area for chemical bottles and waste containers.

C.3.2 The chemical storage area shall be ventilated and located below the work deck of the fume hood.

C.3.3 The chemical storage area shall have one (1) secondary containment tub for waste bottles made from polypropylene 10” x 10” x 8” recessed.

C.4 Deck Layout and Measurements

C.4.1 The wet bench deck layout schematic shall match Figure 1 in A01 - Technical Exhibit with labelled critical dimensions.

C.4.2 The wet bench deck shall have cutouts for the following (refer to Figure 1):

C.4.2.1 Two (2) spinners

C.4.2.2 Two (2) front panel cutouts for spinner controllers

C.4.2.3 One (1) recessed area 4” deep with side ventilation for a Neslab water bath

C.4.2.4 One (1) 4” recessed area with side ventilation for Brewer 1300 hotplate

C.4.3 The Contractor shall provide a wet bench deck with cutout critical measurements and needs of equipment to go into the hood with length defined as left-to-right and depth as front-to-back if standing in front and facing the hood (see Figure 1).

C.4.3.1 Brewer Hotplate

Dimensions: 13” length x 19” depth x 31” height (w/ top open)

Recessed area: 14” length x 23” depth x 4” recession

Ports in Well: Electrical plugin (1” x 1” hole), nitrogen (0.25” tube hole), vacuum (0.25” tube hole)

C.4.3.2 Neslab Water Bath

Dimensions: 12” length x 18” depth x 25” height

Recessed area: 13” length x 22” depth x 4” recession

Ports in Well: Electrical plugin (1” x 1” hole)

C.4.3.3 Cole Palmer Hotplate (2 total)

Dimensions: 8” length x 11” depth

Ports in Well: Electrical plugin (1” x 1” hole)

C.4.3.4 Brewer Apogee Spinner (flange mounted) (2 total)

Dimensions: 14” length x 15” depth x 12” height (lower side connections 8” below deck mounting flange)

Ports in Well: Electrical plugin (2” diameter hole), vacuum (0.25” tube hole), nitrogen (0.25” tube hole)

C.4.3.5 Brewer Apogee Spinner Control Unit (flange mounted on front of wet bench) (2 total)

Dimensions: 12.5” length x 6.5” height

Ports in Well: Electrical plugin (2” diameter hole) from C.4.3.4 spinner well

C.4.3.6 Sikama Hotplate

Dimensions: 12” length x 19” depth

Ports in Well: Electrical plugin (1” x 1” hole)

C.5 General Qualifications

The Contractor shall ensure that the wet bench meets the following qualifications:

C.5.1 The system shall meet current industry standard requirements for safety as regulated by the Occupational Safety and Health Administration (OSHA) and National Electrical Code (NEC) including the use of EMO (Emergency Off) panic buttons, shielding and interlocks for hazardous areas including high voltages, and moving parts.

C.5.2 The system shall have signage denoting the hazards present.

C.5.3 The Contactor shall provide one (1) spare parts kit consisting of, but not limited to, bulbs, filters, screws, fluids, gaskets, seals, fuses, clips, nuts, and O-rings.

C.5.4 The system shall come with two (2) complete sets of schematics including electrical diagrams, two (2) complete operating manuals written in English, and one

(1) manual on clean room paper.

C.5.5 The Contractor shall provide all electrical components within the wet bench based on voltages, frequency and currents used in the United States of America which include 120, 208, 240, and 480 Volts.

C.6 One (1) Year Warranty

C.6.1 The Contractor shall provide at a minimum a one (1) year warranty on the wet bench with the following minimum requirements:

C.6.2 The warranty shall cover repairs or modifications if the wet bench is no longer functional.

C.6.3 The warranty shall cover all parts excluding consumable parts and materials.