MFC_APC_diagram.pdf

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Mass Flow Controllers (MFC) & Absolute Pressure Controllers (APC)
Solicitation number
W31P4Q-19-Q-0153
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Atch_05,_Specifications.pdf PDF

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Mass flow controller

80 – 110 psig pressure source

Absolute pressure controller

Vent to atmospheric pressure

Approximately 3 kPa above atmospheric pressure

Flow restriction

Vent to atmospheric pressure

Slide Number 1

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