VIPAs.docx
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- Solicitation number
- NB305000-26-00165
About this file
This is a Notice of Intent to Sole Source a commercial supply contract with Lightmachinery, Inc. The National Institute of Standards and Technology (NIST) Material Measurements Lab, Chemical Sciences Division, Optical Measurements Group intends to procure six virtually imaged phased arrays (VIPAs) across three wavelength ranges: two units operating at 2600–3100 nm with a line width of ≤75 MHz at 2850 nm, two units at 3000–3700 nm with a line width of ≤75 MHz at 3350 nm, and two units at 3600–4600 nm with a line width of ≤75 MHz at 4100 nm. The equipment will support the CHIPS Metrology Program's RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching project, enabling time-resolved frequency comb spectroscopy for in-situ monitoring of plasma chemistry during semiconductor manufacturing processes. The contract will be awarded as a Firm Fixed Price purchase under FAR Part 12 for commercial products, with delivery on an FOB Destination basis (or equivalent INCOTERM) and warranty included.
Interested vendors must submit responses demonstrating how they will meet the technical specifications and minimum requirements through supporting documentation such as brochures, manuals, technical data, demonstration videos, and customer references. Responses must include company name and address, point of contact information, teaming partners if applicable, and commercial product classification. Questions must be submitted by March 26, 2026, at 12:00 p.m. ET, and responses must be received by March 30, 2026, at 6:00 p.m. ET. All submissions must be directed to Contract Specialist Ranae Armstrong (ranae.armstrong@nist.gov) with a copy to Contracting Officer Don Collie (Donald.collie@nist.gov). This notice is not a solicitation or request for quote, and no award will be made as a result of this notice.
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Notice of Intent to Sole Source Commercial Supply Contract Type: Firm Fixed Price Title: Virtually Imaged Phased Arrays (VIPAs) Notice ID Number: NB305000-26-00165
PURPOSE
This is a notice of intent the Acquisition Management Division (AMD) at the National Institute of Standards and Technology Material Measurements Lab, Chemical Sciences Division Optical Measurements Group intends to procure a quantity of two (2) virtually images phase arrays (VIPA) 2600 nm TO 3100 nm, a quantity of two (2) VIPAs 3000 nm to 3700 nm, and a quantity of two (2) VIPAs 3600 nm to 4600 nm on a sole source basis with Lightmachinery, Inc using FAR Part 12, Acquisition of Commercial Products and Commercial Services.
This notice shall not be construed as a Request for Quote. Respondents are advised that the U.S. Government will not pay for information or administrative costs incurred in the response to this notice. All costs associated with responding to the notice will be solely at the interested party’s expense. Not responding to this notice does not preclude participation in any future RFQ or other solicitation (if any are issued). This is a notice of intent to sole source, not a pre-solicitation notice. There is no formal solicitation available at this time. No award will be made as a result of this notice. Respondents will not be notified of the results of this notice, or results of information submitted.
BACKGROUND/OBJECTIVE
The CHIPS Metrology Program includes research in Grand Challenge 5, Modeling/Simulating Semiconductor Manufacturing Processes. To address this Grand Challenge, the project RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching seeks to purchase Virtually Imaged Phased Arrays to perform time-resolved frequency comb spectroscopy on gas-phase samples and plasma samples. The project is led by the Chemical Science Division (CSD) of the NIST Material Measurement Laboratory (MML), the nation’s premier metrology laboratory for measurement science, standards, technology, and intelligent data in the area of chemical sciences.
Purpose: The systems will enable time-resolved frequency comb spectroscopy of plasma etching in a research-grade plasma reactor, enabling reliable in-situ monitoring of plasma chemistry and real-time data generation for intelligent design of next-generation plasma etching processes.
SCOPE
The Contractor shall deliver a quantity of two (2) Virtually Imaged Phased Arrays (VIPA), 2600 nm to 3100 nm, a quantity of two (2) Virtually Imaged Phased Arrays (VIPA), 3000 nm to 3700 nm, and a quantity of two (2) Virtually Imaged Phased Arrays (VIPA), 3600 nm to 4600 nm, inclusive of warranty and FOB Destination delivery terms (or equivalent INCOTERM such as DDP).
REQUIREMENT
Description: Virtually Imaged Phased Arrays (VIPA), 2600 nm to 3100 nm Quantity: Two (2)
1. Salient Characteristics
a. VIPA line width shall be less than or equal to 75 MHz at 2850 nm
Description: Virtually Imaged Phased Arrays (VIPA), 3000 nm to 3700 nm Quantity: Two (2)
1. Salient Characteristics
a. VIPA line width shall be less than or equal to 75 MHz at 3350 nm
Description: Virtually Imaged Phased Arrays (VIPA), 3600 nm to 4600 nm Quantity: Two (2)
1. Salient Characteristics
a. VIPA line width shall be less than or equal to 75 MHz at 4100 nm
NOTICE RESPONSE
Interested firms/companies are encouraged to respond to this notice by submitting documentation that clearly demonstrates how the minimum requirements and technical specifications will be met. Response which merely repeat the minimum requirements, and technical specifications without providing demonstration of how the minimum requirements and technical specifications will be met, will not be considered or evaluated by the government. Responses can demonstrate their capabilities to meet the requirements and specifications described above by providing brochures, manuals, reports, demonstration videos, other technical data, and identification of current customers.
In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. In addition to the technical documentation, the response must include the following:
· Company name and address
· Point of Contact for questions and/or clarifications, including telephone number and email address
· Teaming partners (if applicable)
· For supplies – If the supply is a commercial off the shelf item, modified commercial off the shelf item, or prototype.
· Any additional information as deemed pertinent by the respondent.
Questions for this notice must be submitted to Contract Specialist Ranae Armstrong at ranae.armstrong@nist.gov with a CC to Contracting Officer Don Collie at Donald.collie@nist.gov. no later than 03/26/26, 12:00pm, ET. Telephone and faxed questions will not be accepted.
Interested responses must be submitted to Contract Specialist Ranae Armstrong at ranae.armstrong@nist.gov with a CC to Contracting Officer Don Collie at Donald.collie@nist.gov. no later than 03/30/26, 6:00pm, ET. Telephone and faxed responses will not be accepted.
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