Tab 4 SOW.pdf
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- Solicitation number
- 80NSSC866740Q
About this file
This document is a Statement of Work (SOW) for the Fabrication of Pressure and Temperature Sensors in SiC federal contract opportunity.
The SOW outlines the requirements for the design, fabrication, and testing of pressure and temperature sensors using silicon carbide (SiC) material for NASA applications. Key objectives include developing SiC sensor prototypes that can withstand high-temperature, high-pressure, and harsh environments. The SOW specifies the technical requirements for the sensor design, materials, manufacturing processes, testing, and delivery of working sensor prototypes. Pricing should be provided based on the required quantities and delivery schedule. The contract is unrestricted, with no set-asides indicated. The anticipated award date is not provided.
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| File | Type | Posted |
|---|---|---|
| Tab 7 Capability Statement SAM.pdf |
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Statement of Work for the Fabrication of Pressure and Temperature Sensors in SiC
Objective:
Fabricate hierarchical layers of metallization and silicon dioxide to realize functional silicon carbide pressure and temperature sensors. The SiC wafers will be 4” diameter, 350 um thick single crystal.
The fabrication steps will be derived from the technical interaction with the vendor. However, the generic processes and number of sequences leading to the realization of the product are provided below.
Steps Process Description Process Number of Sequences
1. Aluminum deposition 4 microns 3
2. Deposit Quartz 2 microns 3
3. Spin photoresist. 6
4. Soft bake 6
5. UV Expose 6
6. Develop 6
7. Hard bake 6
8. Wet etch Al 3
9. Dry etch SiO2 3
10. Plasma Clean 3
11. Solvent clean 6
12. Ti (200 A)/Pt (3 microns)/Ti (1000 A)/TaSi2 (3000 A) 1
13. Ti (2000 A)/TaSi2 (3000 A)/ Ti (1000 A)/Pt (3000 A) 1
14. Ti (500 A)/Pt (1 micron)/Ti (200 A)/TaSi2 (1000 A) 1
15. Ti (100 A)/Pt (3000 A)/ Ti (200 A)/Pt (1000 A)/Au (.5 um) 1
16. Metal Etches 6
Delivery of final products to customer shall be within 16 weeks upon receipt of purchase order.
File details come from the government source that posted it. Updated .