Statment of Work.docx

STATEMENT OF WORK

In-situ plasma semiconductor cleaner Physical Measurement Lab/683

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, NIST will conduct the measurement science or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

A plasma source for processing semiconductor surfaces which is compact as well as high vacuum-compatible is required to enable in-situ measurement of plasma-treated surfaces for photoemission (PES) analysis without ambient exposure. This equipment will be used to serve a CHIPS metrology project to determine chemical structure required for fusion and hybrid bonding in advanced semiconductor packages. Plasma-treating semiconductor and metal surfaces is a common step to bond heterogeneous materials which enables 2.5D and 3D heterogeneous integration in semiconductor manufacturing. The plasma source must be able to run in a “downstream configuration” and must be able to accommodate different input gases that are common in plasma-treated tools in fabrication facilities. The plasma source will be mounted on any NIST-owned PES-analytical vacuum chamber and must have conflat mounting capabilities, operate at high vacuum pressures, and is vacuum leak tight. With this acquisition, these projects will conduct research to develop and advance the measurements needed to understand and evaluate properties of pre-bonded semiconductor materials.

II. SCOPE

The goal of this contract is to supply an in-situ plasma semiconductor cleaner that can be directly mounted onto an ultrahigh vacuum chamber equipped with analytical photoemission capability. The Contractor shall deliver a quantity of (1) plasma cleaning system, inclusive of FOB Destination delivery and warranty.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Contract Line Item Number (CLIN) 0001: The Contractor shall provide one (1) plasma cleaning system with the following minimum requirements within the system, as listed below:

0. Plasma source

a. Shall be mountable on a conflat (CF) 2 ¾” sized flange;

b. When the plasma source is not running and attached to the vacuum chamber, the plasma system shall be compatible with a vacuum chamber that reaches a base pressure of 1E-8 Torr and not degrade the chamber pressure;

c. Plasma shall be generated using radio frequency (rf);

d. RF power for plasma source shall be tunable;

e. RF power for plasma source shall be capable of running at a range of powers. This range must include the region between and including 10 W to 75 W. Stronger consideration given if RF power for plasma source can exceed 100 W.

f. Plasma shall be generated using an inductively coupled plasma source;

g. Plasma generation shall be compatible with air, nitrogen, H2/N2, and O2/Ar as gas input sources;

h. Shall be designed for and capable of operation in a ‘downstream’ configuration;

i. Shall include capability to control and measure the input gas flow;

j. Shall include capability to measure pressure in the plasma system;

k. Plasma shall be able to ignite in pressures compatible with concurrently operating a turbo molecular pump on the attached vacuum chamber;

l. A plasma source with a mechanism for variable constriction of the opening between the plasma chamber and the attached vacuum chamber will be given stronger consideration.

0. Electronics/controller

1. Shall include necessary electronics to operate plasma source;

2. Shall include capability to control plasma rf power and plasma treatment times; stronger consideration given if can control more plasma parameters such as operating plasma pressure;

3. Shall include capability to store “recipes” or process procedures;

4. The system must be powered by 120 VAC at 60 Hz;

5. Capability to communicate with PC via RS232 or similar;

6. Shall include any necessary computer software to control plasma parameters; stronger consideration given if a handheld controller is provided in addition to computer software.

0. The Contractor shall provide one operations and maintenance manual (electronic or hard copy) that includes, at a minimum, proper operation, routine maintenance, troubleshooting the instrument, and controlling software.

0. Shall include a minimum warranty of 2 years for the entire plasma system including electronics.

0. Shall be capable of removing carbon and oxygen species from chamber and/or sample surfaces.

IV. DELIVERABLES

Standards of Acceptance: The NIST SME or COR shall review the plasma system and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

All work shall be performed at the 100 Bureau Dr. Building 221 room A310, Gaithersburg, MD 20899.

VI. DELIVERY TERMS

Delivery shall be F.O.B. Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: Sujitra Pookpanratana (Building 216 room B111) Gaithersburg, MD 20899

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

Inspection tests shall be performed at NIST by a government official. These tests shall include:

the plasma system shall meet the minimum requirements set forth in this statement of work.

A visual inspection of the plasma will be performed by the NIST TPOC to identify surface defects or any form of indication that the plasma system was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the plasma system due to defects and/or nonconformance.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 2 years after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

IX. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. PAST PERFORMANCE

The offeror shall provide past performance information regarding relevant contracts over the past five (5) years with Federal, state, or local governments, or commercial customers. If the offeror intends to subcontract with another firm(s) for part of this requirement, that firm’s past performance information shall also be provided. If the offeror has no relevant past performance, it may include a statement to that effect in its quotation. The government reserves the right to consider data obtained from sources other than those described by the offeror in its quotation. It is recommended that approximately 3-5 contracts be referenced.

The description of each contract/order described in this section shall not exceed one half page in length. For each contract/order, the offeror shall provide the following information:

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