Statement_of_Work(5)copy3_20241022135831.515_X.pdf

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Maintenance for KLA Tencor Model P16+ and one and P7 profilometer
Solicitation number
80NSSC252804
Issued by

About this file

This document is a Statement of Work (SOW) for the maintenance of two KLA Tencor profilometers used by NASA at the Goddard Space Flight Center. The SOW outlines the requirements for the contractor to provide on-site maintenance coverage for the P7 and P16+ profilometers, including a 24-hour response time, all parts and labor included, for a 12-month period of performance.

The related federal contract opportunity is a pre-solicitation notice for a sole-source contract to KLA Corporation for the maintenance of these profilometers. The contract will be awarded under the authority of FAR 13.106-1(b)(1)(i) as KLA Corporation is the sole provider of maintenance for these specific models. The NAICS code is 334513, and the procuring center is the NASA Shared Services Center. Interested organizations may submit their capabilities and qualifications by 12 p.m. EST on 11/08/2024, but the government has sole discretion in determining whether to conduct the procurement on a competitive basis.

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STATEMENT OF WORK (Sample)

1. Objective/Requirements

NASA-GSFC owns and operates one KLA Tencor Model P16+ and one KLA Tencor Model

P7 profilometer. These are high precision measurement equipment used to measure thin film thickness deposited on silicon wafers that are processed in the Code 553 Detector

Development Lab. These systems require maintenance by qualified field service engineers on a regular basis. NASA Shared Services Center has a requirement for providing annual maintenance on profilometer metrology equipment.

2. Characteristics, Scope, and Specs

The contractor shall perform the following duties for a P7 UTID 7300282 Profilometer:

• Provide on site coverage for days Monday through Friday (no holidays)

• Provide on site response time of 24 business hours

• Provide all parts included

• Provide all labor included

The contractor shall perform the following duties for a P16+ UTID 7091797

Profilometer:

• Provide on site coverage for days Monday through Friday (no holidays)

• Provide on site response time of 24 business hours

• Provide all parts included

• Provide all labor included

3. Place of Performance

Detector Development Lab, Building 30, Goddard Space Flight Center

4. Period of Performance

Service visits shall be performed 12 months from date of award.

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