Statement of Work Electrochemical workstation.pdf

STATEMENT OF WORK

Title: Electrochemical Workstation Multichannel Potentiostat ACQ0042123

Lab: MML/MSED/224/ B151

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The proposed acquisition will be used in support of CHIPS Act supported project to develop “Electrodeposition of Interconnect Materials and Packaging” at the National Institute of Standards and Technology. In particular, the purpose of this procurement is to acquire a multichannel potentiostat/galvanostat will be used to electrochemically deposit films for microelectronic interconnect, to elucidate mechanistic aspects of the deposition process, and to optimize deposition processes to obtain metallizations, vias and line, with the required electronic properties.

II. PURPOSE

The proposed acquisition will be used to enable a CHIPS Act-supported project to develop “Electrodeposition of Interconnect Materials and Packaging” at the National Institute of Standards and Technology. In particular, the purpose of this procurement is to acquire a multichannel potentiostat/galvanostat that will be used to electrochemically deposit films for microelectronic interconnect, to elucidate mechanistic aspects of the deposition process, and to optimize deposition processes to obtain metallizations, vias and line, with the required electronic properties. Our proposed research work will span a large range of length scales from studies of macroscale cm2 area electrode to submicron microelectrodes will involving phenomena, such as adsorption and charge transfer process that occur over wide range of time scales that determine our need for a device with high temporal and current resolution.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

This contract is to procure of a high-resolution multichannel PC-controlled potentiostat/galvanostat. This instrument will apply a fixed potential or fixed current to

2 | P a g e drive electrodeposition processes and will measure and record the time response of the resulting current or potential. The recorded data will provide an understanding of the kinetic and mass transport effects governing deposition processes. The instrument will have at least two channels which will allow multiple independent processes to be run simultaneously on separate electrochemical cells. The individual processes can be started, stopped, and modified without affecting processes running at the same time on other channels. In a different configuration, the channels can be used together for bipotentiostatic measurements on a single electrochemical cell. This will allow electrochemical analysis of products formed by one electrode using a second electrode.

The instrument will be capable of carrying out electroanalytical measurements including microelectrode measurements, linear sweep voltammetry, and electrochemical impedance spectroscopy. Microelectrodes have at least one micrometer scale dimension to enable measurements under well-defined (steady state) mass transport conditions with negligible iR drop at high current densities. These measurements will require that at least one channel of the instrument has current follower ranges down to the nanoamp to low picoamp scale, i.e. 1 pA. This may necessitate the use of a preamplifier (low current module). Likewise, microelectrodes enable the study of very fast redox processes and thus we seek the highest possible voltametric scan rate The instrument will be able to apply linear potential sweeps. Instruments commonly use a digital staircase waveform to approximate a linear ramp, but due the differing rates of current decay for redox processes for species in solution and capacitive and pseudocapacitive processes, the data measured with such a staircase waveform may not accurately measure the latter. If the instrument does not use a linear potential sweep by default, it should have an internal module to produce linear potential sweeps.

The instrument will be able to carry out electrochemical impedance spectroscopy (EIS), in which a small periodic perturbation is applied to an electrochemical cell and the frequency dependence of the response is characterized. EIS data will be used in determining cell time constants, solution conductivity, and mechanistic details of electrochemical reactions.

A. Technical Specifications The high-resolution PC-controlled potentiostat must meet or exceed these requirements:

Hardware:

The instrument must have at least two channels, with each channel configurable for both potentiostatic and galvanostatic operation. It must be possible to use these separate potentiostat/galvanostat channels for independent measurements which can be started and stopped without affecting measurements in progress on other channels.

It must also be possible to use these channels together in a bipotentiostat configuration.

Coupling of the channels for bipotentiostatic operation must be easily realized with the ability to control and monitor each electrode as one or both electrodes are subject to potential controlled perturbation or floated for potentiometric operation.

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Each channel must have an analog ramp generator, which produces true linear potential sweeps using an analog circuit, as distinct from a staircase approximating a linear sweep.

The wave form generator should provide enable scan rate in excess of 1 MV/s.

At least one channel must be able to perform electrochemical impedance spectroscopy (EIS) in both potentiostatic and galvanostatic configurations over a 10 µHz to 7 MHz frequency range.

At least one channel must have current measurement ranges down to 1 pA and with 100 TΩ electrometer input impedance. The channel may either inherently possess these attributes or use a low current module to measure at these lower current ranges.

One channel must be capable of higher compliance operation +/- 30 V and 2 A.

Each channel must be capable of measuring the measuring counter electrode potential with respect to the reference electrode (and in addition to measuring the working electrode potential and current). Each channel must be able to accomplish this independently, without using an additional channel.

Data acquisition rate: ≥105 samples/second The potentiostat/galvanostat should have an on-instrument data buffer for at least

700,000 data points, but the maximum number of points collected for a given measurement must not be limited by the size of the on-board buffer. The buffer will allow measurements in progress to continue in case of an interruption in communications between the computer and instrument.

Maximum Output Current: ±500 mA or greater Compliance Voltage: ±12 V or greater, One of the channels should have a compliance voltage of +/-30V and output current upto 2A The impedance capability should be associated with the lower power channel.

Applied Potential Range: ±10 V or greater Applied Potential Accuracy: ±0.03% of setting, ±1 mV or better Measured Potential Accuracy: ±0.03% of measured value, ±1 mV or better Current Measurement Ranges: 10 nA to 1 A in 9 ranges or more Current Control: 1 µA to 1 A in 7 ranges or more Applied Current Accuracy: 0.03% of setting and 0.1% of current range or better Applied Current Resolution: 0.03% of current range or better Measured Current Resolution: 0.003% of current range or better Measured Current Accuracy: 0.03% of setting and 0.1% of current range or better Software allows adjustment of bandwidth by user to improve stability of operation.

Potentiostat Risetime: ≤500 ns Electrometer band width: ≥8 MHz Electrometer Input Impedance: ≥1 TΩ iR compensation by hardware feedback Capable of floating mode operation.

Each channel must have externally accessible analog outputs of potential and current signals (i.e. E/I monitor outputs).

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Each channel must have an external analog voltage signal input (with an input range of ±10 V) which can record an additional signal from external instrumentation simultaneously with current and potential measurements. This signal can be used for programmatic flow control of a multi-step process.

Each channel must have an external analog signal input that can be used to control the applied potential using a waveform generated by a separate device.

Each channel must have an analog signal output that can be set to a specified voltage (e.g. for RDE rotator control) with a range of ±10 V.

Each channel must have TTL inputs and outputs to enable synchronization of measurements with actions by other instrumentation.

Must have 16-bit or greater A/D and D/A converters.

USB2 interface for connection to computer.

Software:

Software must allow construction of multi-step protocols (including both galvanostatic and potentiostatic steps), with program flow-control options based upon time, current, working electrode potential, counter electrode potential, charge, derivative of working electrode potential with respect to time, and derivative of current with respect to time limits. It must be possible to include loops in sequences to allow steps to be repeated. It must be possible to save measurement protocols to files which can be reloaded by the software so that the same protocol can be run more than once without requiring the user to manually re-enter and reconfigure all of the steps in the sequence.

The instrument software must allow modification of measurement parameters (including those for the step currently being measured) while a measurement sequence is in progress without interruption of the measurement. Parameters that can be edited once the measurement has been started must include step time limits, charge limits, current setpoints in galvanostatic steps, potential setpoints in potentiostatic steps, potential limits in galvanostatic measurements, current limits in potentiostatic measurements, potential sweep rate in cyclic voltammetry measurements, and data recording time interval. The limits can be used as programmatic flow-control conditions. The user can select whether the program will move to a subsequent step or end the measurement sequence when a flow-control condition is met. It must be possible to specify at least two programmatic flow-control conditions in each step of the protocol. It must be possible for the user to reverse the scan direction during cyclic voltammetry measurements, to pause measurements, and to skip to the next step in multi-step experiments.

Data files for multi-step protocols must have demarcations indicating where different steps begin and end within the files to facilitate automation of data analysis. This could be implemented as an additional column of values in the file denoting the step number associated with each data point, or it could be a list of indices indicating where the transitions between steps occur.

Software should display open circuit potential while measurement sequences are not in progress.

Software compatible with both 32 bit and 64 bit Windows 10 operating systems.

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Instrument software must plot measured values on computer screen while measurements are running. It must be possible to change the axis limits of the plotted data (i.e. zoom in and out) while measurements are in progress.

Software included with each instrument and can be installed on any computer without license for data evaluation and handling.

Software upgrades included free of charge. Installation of previous versions of software (downgrade) is possible.

Software must allow control of the instrument with LabVIEW and/or Python.

Example code should be provided.

Instrument calibration can be performed by the user.

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 High Resolution

Multichannel Potentiostat/Galvanostat

1 90 days NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 14 days of receipt of deliverable.

PLACE OF PERFORMANCE

All work shall be completed at the contractor’s facility.

PERIOD OF PERFORMANCE

The device will be delivered within 12 weeks from the date of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

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The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 POC (Thomas Moffat, 224, B151)

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Electroanalytical tests will be performed using a “equivalent circuit” dummy cell to verify the specified technical performance.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within (14 days) of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

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VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

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Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.