Statement of Work.pdf

Statement of Work

The Electromagnetics Technology Branch of the Electronics Science and Technology Division located at the U.S. Naval Research Laboratory (NRL) in Washington, DC, has a requirement to procure a commercial, turnkey, steady-state thermorelectance system capable of measuring thin film, high thermal conductivity, and multilayer thermal conductivity. This instrument will enable NRL to measure the thermal properties of wide-and ultrawide bandgap semiconductor materials, packaging materials and integrated chip components, all of which are necessary for currently funded programs including as independent validation and verification and subject matter experts in external DARPA UWBGS program. The system should be capable of measuring thermal conductivity from 0.05 to 3000 W/mK in sub-micron thick films, with both single point measurement and mapping capabilities. Measurements should be quick (on the order of 10’s of seconds) with automated focusing and alignment of the pump-probe laser system. With these properties, the tool will provide a rapid, user friendly, high-throughput technique that will enable shorter timeframes to evaluate and optimize materials to meet the objectives of our existing and future programs.

Requirements for a SSTR/FDTR Thermal Property Characterization System.

A complete turnkey, automated, mapping fiber-optic based steady-state thermoreflectance (SSTR) system capable of characterizing thin film and bulk materials should have the following specifications, as a minimum:

Thermal Property Characterization: The system should provide fiber-optic based steady-state and frequency-domain thermoreflectance dual capability. This should enable simultaneous, non-contact, non-destructive measurements of thermal conductivity, thermal resistance and heat capacity on metals, semiconductors and ceramics ranging from thin films to bulk materials. The system should be capable of measuring a range of thermal conductivities, both in-plane and cross-plane, from 0.1 to 3000 W/mK for films greater than 200nm thick. It should also be able to measure thermal boundary resistance in films as thin as 2nm.

Basic System: The basic system should be based no a two laser pump-probe set up with a pump laser wavelength of 637nm (at least120mW output power) and probe laser wavelength of 785nm (at least 50mW output power) compatible with Al transducers. It should be equipped with at least two objectives that allow multiple spot sizes between 2-10 microns.

Mapping and Heating Stage: The system should be equipped with a mapping and heating capabilities. The sample stage should have x-y travel range of at least 100 x 100 mm with a resolution of at least 100 nm. Additionally, the system should be able to heat the samples to at least 400°C to enable measurement of temperature-dependent properties.

Automation: The system should be fully automated for turn-key data collection of points and maps.

This automation should enable multi-sample batch testing for up to 10, 1cm2 samples. Fully automation should, include: focusing with an automated z-stage and algorithm in software to determine the focal point at different spots/samples; sample alignment for small angle corrections of < 2 degrees;

switching between at least two objectives (thus two spot sizes); and sample testing routines for precise and repeatable measurements with in 2% variation.

Computer/Software: This should be loaded with Microsoft Windows 11™ and a licensed SSTR acquisition and analysis software compatible with hardware to enable full automation. An additional data system licence for off-line data processing must be included.

System Form and Footprint: The overall footprint of the entire system should be less than 2ft x 2ft x 6ft. The system should be turn key with all electronics and components included within the footprint of the system. The system should be compatible with either 110 or 220V input power.

Installation, Training and Warranty: The system shall include all installation, labor and materials.

The vendor will supply the facilities requirements prior to the system delivery to ensure that all electrical, HVAC, and other needs are met prior to personnel showing up to install the system.

Acceptance testing demonstrating successful operation of all functions and automation will be conducted on-site during installation. A training session for at least 3 people should be included and cover all major functions of the system. A warranty covering all parts and labor for at least 12 months must also be included.

Service Contract: A service contract that includes at least one preventative maintenance visit and all system, safety and software updates during the agreement year. The terms of this contract should cover basic parts servicing, software and troubleshooting with an option for on-site servicing for at least a 12 month period.