STATEMENT OF WORK.pdf
PDF 289 KB Posted
- Attached to
- Pfeiffer Vacuum Pumps Federal contract opportunity
- Solicitation number
- 80NSSC2587259
About this file
This document is a Statement of Work for the upgrade and procurement of a spare vacuum pump for a Deep Reactive Ion Etch (DRIE) system at the NASA Goddard Space Flight Center.
The key requirements are to replace one obsolete foreline pump on the Oxford Instruments Plasma Pro100 Estrelas, SN 220276 DRIE system with a Pfeiffer Model A604H ELT Dry pump, and to obtain a spare pump of the same model. The pump must meet several technical specifications including high energy efficiency, wide operating temperature range, corrosion resistance, high MTBF, and extended monitoring functionalities. The deliverables include one primary pump for installation and startup, one spare pump, and a one-year warranty. The delivery is required within 6 months after receipt of order, with a best effort to deliver within 3 months.
The related federal contract opportunity is a NASA pre-solicitation for the procurement of the Pfeiffer vacuum pumps. It indicates that NASA intends to issue a sole source contract to Oxford Instruments America, Inc. under the authority of FAR 13.106-1(b)(1)(i), as they are the sole provider of the products currently in use. Interested organizations may submit their capabilities to the contracting officer by 11/8/2024 for consideration of a competitive procurement.
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Text version
Statement of Work: Plasma Pro 100 foreline pump upgrade and spare pump
Overview:
The Goddard Space Flight Center has a requirement to replace one obsolete foreline pump on the Oxford Instruments Plasma Pro100 Estrelas, SN 220276 Deep Reactive Ion Etch (DRIE) system, with a Pfeiffer Model A604H ELT Dry pump, and to obtain a spare pump of the same model.
Following are the minimum required features of the vacuum pump:
A. High energy efficiency with multi-stage Roots technology, high efficiency motors and limited use of electrical heaters
B. Wide operating temperature range protects the pump against precursor cracking or condensable deposition
C. Full corrosion resistant materials for increased lifetime D. High MTBF and low cost of ownership E. High particle tolerance to increase tool uptime F. Extended monitoring functionalities that provide control of pump conditions (water sensor, vibration box) G. Integrated hot N2 injection to prevent exhaust clogging H. 560 cubic meters per hour flow
Deliverables:
1. One each Pfeiffer A604H ELT pump including delivery, installation by a trained service engineer, and startup on the DRIE located in the Detector Development Laboratory at NASA Goddard Space Flight Center.
2. One spare, identical Pfeiffer A604H ELT pump, including delivery.
3. One year warranty on items 1 and 2 above.
Delivery within 6 months after receipt of order, with best effort to deliver within 3 months.
File details come from the government source that posted it. Updated .