Statement Of Work.pdf

Statement of Work Acid Wet Bench System

CNST NanoFab

BACKGROUND

The National Institute of Standards and Technology (NIST)/Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development from discovery to production. The Nanofabrication Operations Group of the CNST has the mission of advancing measurement science by developing novel nanofabrication and nanomanufacturing techniques. The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that can provide an acid handling wet bench system to support nanofabrication in the Center for Nanoscale Science and Technology (CNST) user facility.

The system will be sited and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies in the CNST NanoFab. An acid handling wet bench is an exhausted enclosure that contains a well-illuminated, unobstructed horizontal work surface where researchers can safely use concentrated liquid acidic solutions. The NanoFab currently utilizes several acid wet benches, and this system will be a direct replacement for a system that is currently unrepairable.

GENERAL DESCRIPTION

The NanoFab currently utilizes several acid wet benches, and this system will be a direct replacement for a system that is currently unrepairable. As described above, an acid handling wet bench is an exhausted enclosure that contains a well-illuminated, unobstructed horizontal work surface where researchers can safely use concentrated liquid acidic solutions. The work surface is typically equipped with accessories specialized for the specific application of the wet bench. For NIST, the applications are nanofabrication processes. The work surface is mounted over a liquid-tight acid resistant basin that collects all liquids from embedded sink drains.

MINIMUM REQUIREMENTS

The system shall meet or exceed the following technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award.

Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

CLIN 0001

Quantity: One (1) Description: Acid Wet Bench System, which shall meet or exceed the following minimum specifications:

1. GENERAL REQUIREMENT

a. The seller shall supply the installation requirements, utility requirements, and a diagram showing the tool footprint, measurements, and wall penetrations along with quote.

b. The seller shall provide full construction drawings for review by NIST prior to system fabrication.

CNST NanoFab

2. SYSTEM FOOTPRINT

a. The system shall be configured for all single point of entry facilities in the rear panel.

b. The system shall have a width (Left-Right) of 96 inches to accommodate the existing location footprint.

c. The system shall have a depth (Front-Back) of 36 inches to accommodate the existing location footprint.

d. The system shall have a height of 80 inches or less.

3. SYSTEM CONFIGURATION

a. The system base, headcase, and main control console shall be fabricated from FM-4910 chlorinated polyvinyl chloride (CPVC).

b. The system shell shall be made of FM-4910 CPVC.

c. The system frame shall be constructed of 304 stainless-steel that is covered by FM-4910

CPVC.

d. The system shall have a storage space underneath the hood to accommodate standard gallon sized chemical bottles with a height of 14 inches.

e. The system shall be fully exhausted and connect to existing lab exhaust.

f. The system shall contain a single utility sink constructed of natural polypropylene and a gooseneck DI water faucet that will drain to the lab waste system. The sink dimensions shall have a width of 14 inches, a depth of 16 inches and a height of 10 inches. The sink shall be located on the far-right side of the hood.

g. The system’s DI water faucet shall be constructed of polyvinylidene fluoride (PVDF) and contain a needle valve for flow adjustment.

h. The system shall have nitrogen spray guns mounted on each side of the bench.

i. The system shall have DI water spray guns mounted on each side of the bench.

j. The system’s DI water distribution system shall be constructed of perfluoroalkoxy (PFA) or PVDF.

k. The system’s Nitrogen distribution system shall be constructed of PFA.

l. The system’s clean dry air (CDA) distribution system shall be constructed of polyethylene (PE).

m. The system shall have two 15A GFCI duplex receptables located on each side of the bench.

n. The system shall utilize electrical service at 208V, 3-Phase, 5-Wire, 20A.

o. The electrical power and control cabinet shall be purged with nitrogen for anti-corrosion purposes.

p. Electrical wire methods shall be compliant with NFPA 79, NFPA 318, and UL-6-1010-1 standards.

q. The system shall contain leveling pads and casters for ease of installation.

4. SAFETY

a. The system shall contain an alarmed photohelic exhaust monitor.

b. The system tool power must be interlocked with photohelic exhaust monitor.

c. The system shall contain an easily accessible emergency power off button (EMO).

d. All maintenance access doors shall be interlocked with tool power.

e. The system shall have an integrated clear retractable sash.

f. The system shall have an integrated LED light fixture mounted above the working surface.

5. SITE PREPARATION

The CNST NanoFab will require thirty (30) days from delivery to site the system and connect facilities. The CNST NanoFab will be responsible for locating the system in its final position and the final integration and interconnection. The instrument will be placed in the CNST NanoFab cleanroom in building 215. The contractor shall be required to participate in meetings via conference call to provide information regarding electrical supply, exhaust, drain and water requirements.

6. ADDITIONAL REQUIREMENTS

a. The contractor shall provide construction, footprint and facility requirement information within twenty-one (21) days ARO.

i. Standards of Acceptance: The NIST TPOC or COR shall review all the above information and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within seven (7) days of receipt of deliverable.

b. The system shall be delivered no later than 7 months after contract award. Stronger consideration will be given to a vendor that can guarantee delivery in six (6) months or less from date of plans approval.

PERIOD OF PERFORMANCE

The acid wet bench shall be received within seven (7) months after award of the contract. The CNST NanoFab will require thirty (30) days from delivery to site the system and connect facilities. Vendor is responsible for tool startup, confirm all systems are working properly, and training including travel, labor, or any other expense.

Total period of performance shall be eight (8) months ARO.

DELIVERY

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above section.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods

CNST NanoFab occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

c. All shipping arrangements and expenses are handled by the contractor. The contractor shall deliver the system to NIST, building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640 prior to ultimate delivery and installation at Building 215 Room B101.

d. After the system has been installed by NIST, the contractor will be responsible for system startup and confirm all systems are working properly.

e. The contractor will provide in-person training to NIST personnel on system operations and maintenance.

f. Final acceptance shall occur within 30 days after installation.

TRAINING

The contractor shall conduct training session for up to five users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9am to 4pm immediately after installation and demonstration of specifications, but must be completed no later than 30 days after installation.

INSPECTION/ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

After the system has been installed by NIST, the contractor will be responsible for system startup and confirm all systems are working properly.

The CNST NanoFab staff will verify the outlets, the nitrogen spray guns, the water spray guns, the lights and the water faucet are working properly. In addition, the CNST NanoFab staff will verify exhaust, safety interlocks and the emergency power off button are working properly.

NIST may choose at its discretion to forego this part of acceptance testing.

CNST NanoFab

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within thirty (30) days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following: The vendor shall repair or replace at its cost, any defective items without any additional cost to the government including travel, labor, parts, or any other expense.

PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

REQUIREMENTS FOR CONTRACTOR PERSONNEL

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO).

There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.