Statement of Work.pdf

NIST Statement of Work Probe Station for CMOS Measurements

I. Background The National Institute of Standards and Technology (NIST) requires a probe station for characterizing CMOS devices designed for biological measurements. This probe station will be used for parametric characterization of devices enabling new signal test capabilities to interrogate and validate novel electronic devices custom-built for biology.

II. Scope The probe station will be used for DC and low frequency measurements of < 10 MHz. The system will support two types of test classes, current vs. voltage (IV) at DC and capacitance vs. voltage (CV) measurements at frequencies < 10 MHz. The probe station operation shall be semi-automated, for example including at minimum a motorized stage and associated machine vision, scripting and automation tools that can repeat test programs across single die or up to an entire 200 mm diameter wafer in a predetermined path.

This capability assumes that the layout of the device pads remains constant relative to each other. The system should also be programmable (and scriptable, e.g., with Python) to repeat measurements of multiple test structures within a single die by moving a fixed distance from the initial position, assuming the pad layout of each structure remains constant. Critically, to account for the additional sensitivity of biological chips and unique chip structures that may include fluidic layers, the system must have the ability to detect potential collisions and halt actuation of all moving components. This includes the ability to define custom exclusion zones in software.

III. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new.

Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Contract Line Item Number (CLIN) 0001: The Contractor shall provide one (1) 200 mm semi-automatic probe station that meet the following minimum specifications:

1. Chuck: The probe station must include an ambient temperature (or non-thermal) chuck that supports single dies, shards and wafers up to 200 mm diameter.

i. Vacuum zones: 4 or more to allow attachment of samples as small as 10 mm and up to a 200 mm wafer. Vacuum zones must be individually controllable.

ii. Temperature range: Non-thermal ambient

iii. Electrical connection: Triaxial

iv. Electrical leakage: < 25 fA.

v. Planarity: < 25 m at room temperature (25 deg C)

vi. Auxiliary chuck: Single auxiliary steel chuck that supports a sample size of 10 mm 10 mm, for example, to allow probe cleaning.

vii. Sample loading: The probe station shall include a roll out chuck for easy sample loading and to prevent accidental damage to samples or probes. The probe station shall support future automation needs such as automated wafer loaders.

viii. Light Shielding: Complete light shielding of sample chuck with > 100 dB attenuation.

2. Platen: An integrated fixed platen is required with the following specifications:

i. Probe positioners: Support 8 or more DC probe positioners.

ii. Platen mount: Fixed

iii. Material: Steel to support magnetic probe positioners.

iv. Platen interface: Top hat that supports 8 or more manual DC probes simultaneously and provides shielding from electromagnetic interference (EMI).

3. Sample Stage: Motorized 4-axis stage with X, Y, Z and with the following hardware performance specifications:

i. X and Y axis:

a. Resolution: 0.25 m.

b. Travel range: 200 mm or greater.

ii. Z-axis:

a. Resolution: 1 m.

b. Travel range: 25 mm or greater.

iii. Rotation :

a. Resolution: 1 m

b. Range: 5 degrees

4. Probe Station Control: Must include PC and all control software for sample stage and all motorized components.

i. Required interface: GPIB for test instrumentation control

ii. Require interface: USB for instrument control

iii. Software: Software with graphical user interface for system operation

iv. Scripting:

a. The probe station control software shall work in tandem with the machine vision system (CLIN002) to allow the ability to script system functions to allow custom test programs.

Scripting in Python, C or equivalent is required.

b. The probe station control software shall work in tandem with the machine vision system (CLIN002) to be programmable to repeat measurements of multiple test structures within a single die by moving a fixed distance from the initial position, assuming the pad layout of each test structure remains constant.

v. Operating System: Windows 10 to ensure network compatibility.

5. Vibration Isolation Platform: The system must include actively damped vibration isolation platform.

i. Type: Air-damped vibration isolation system

ii. Feet: Leveling feet for installation in final location.

CLIN 0002: The Contractor shall provide one (1) microscope and machine vision system with the following minimum specifications:

1. Optical magnification: 10 or greater.

2. Camera system resolution: 10 megapixels or higher.

3. Illumination: Integrated Light Emitting Diode (LED) illumination.

4. Microscope Mount/Bridge: Integrated microscope mount or bridge with the following specifications:

a. Travel along X and Y axes: > 25 mm.

b. Travel along Z axis: > 50 mm.

c. Microscope motion: Manual

d. Focus: Motorized automatic image focus and refocus with sample height variations.

5. Software: The microscope-based vision system must provide software that is integrated with the probe station and have the following features:

a. Pattern recognition to detect features such as probe pads and work in tandem with the probe station control (CLIN001) to step across dies in a single wafer to repeat measurements.

b. The machine vision software shall work in tandem with the probe station control (CLIN001) to include crash or collision avoidance as a standard feature to avoid contact probes and microscope objective.

i. The crash detection feature must include the ability to define exclusion zones for additional safety.

CLIN 0003: The Contractor shall provide four (4) probe positioners, probe arms and probe tips to support IV and CV that meet the following minimum specifications:

1. Attachment: Magnetic or vacuum.

2. Positioning: Three axis X, Y, and Z

a. Travel: > 10 mm along each axis

b. Resolution: 1 m

3. Probe connections: triaxial.

4. Probe tip size: 5 m radius.

5. Probe frequency: DC to >50 MHz.

6. Probe current leakage: <5 fA.

7. Isolation: 10 T or greater

8. Modularity: Probe holder should be modular and allow upgrades to higher performing probes in the future without requiring a full replacement of positioners.

IV. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 10-12 weeks ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 225 Gaithersburg, MD 20899-6180

V. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance.

Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

We will check the probe station after installation is complete and verify that they meet all the minimum requirements above. A parametric analyzer will be connected to the probe station to perform IV measurements of transistors to verify performance and noise specifications. Semi-automatic tests of multiple devices on a wafer using the included machine vision and automation systems will be performed to verify automation capabilities as outlined in the specifications.

The Government will test, inspect, and accept the equipment onsite within 7 business days of the receipt of the CMOS probe station. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the Probe Station for CMOS measurements system due to defects and/or nonconformance.

VI. Installation The system shall be installed by the Contractor and meet contract specifications no later than 4 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 225.)

VII. Training The contractor shall conduct one basic training session as part of setup and assembly at NIST. The training shall provide a basic demonstration of all system/solution functions, maintenance, and basic troubleshooting. The training shall be completed at NIST immediately as part of installation/set-up.

VIII. Warranty The contractor shall warrant the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

IX. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after inspection and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed.