Statement of Work.docx

Statement of Work Title: Custom high-vacuum chamber Lab: PML, NDCD 683.13

I. BACKGROUND INFORMATION

The Nanoscale Device Characterization Division (NDCD) develops and advances the measurement and knowledge infrastructure to characterize nano- and atom-scale engineered materials and solid-state devices for innovation in information processing, sensing, and future quantum technologies. The NDCD’s technical activities span atom scale devices, nanoscale spectroscopy, advanced electronics, nanoscale processes and measurements, and alternative computing. This acquisition will allow the NDCD to expand its measurement capabilities using EUV diffractometry and EUV spectroscopic ellipsometry. The problem being solved by these EUV techniques is the non-destructive measurement of nanoscale patterned features in support of the American semiconductor industry.

To meet mission requirements, the NDCD needs to acquire a customized high-vacuum chamber, which will house a new experimental apparatus that will harness short extreme-ultraviolet (EUV) light for the non-destructive measurement of the smallest features of computer chips, their transistors. The application of the required chamber is the accurate reconstruction of dimensional information from the nondestructive reflection and diffraction off a sample under test using polarized EUV light, light which will only propagate in a vacuum.

II. PURPOSE

The Nanoscale Device Characterization Division is developing a new (NIST patent-pending) capability to perform non-destructive optical measurements of the sizes of smallest features in a computer chips (its transistors) for industrial process control. We are using extreme-ultraviolet (EUV) wavelengths, 10x shorter than those used by the industry today, and current optical approaches using visible and UV wavelengths cannot adequately measure future semiconductor transistors. Our CHIPS project is building this EUV instrumentation with the constraint that the apparatus must work in a vacuum, as air absorbs these wavelengths. This procurement is for a required custom vacuum chamber to house this testbed that will demonstrate the feasibility of EUV-based metrologies to the US semiconductor industry.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Custom Vacuum Chamber Quantity: 1 A. Technical Specifications

a. The “custom high-vacuum chamber” shall be comprised of:

i. a top endpiece and

ii. a chamber body and

iii. a bottom endpiece and

iv. the gaskets, blank flanges, and hardware (bolts, washers, nuts, etc.) required for the custom vacuum chamber to hold high vacuum as defined below.

v. The total number of ports requiring blank flanges, gaskets and hardware are

1. (qty 1) 10” Conflat (DN200CF),

2. (qty 13) 6” Conflat (DN100CF),

3. (qty 17) 2.75” Conflat (DN40-CF),

4. (qty 7) ISO160-F ports, and

5. (qty 3) ISO63-F ports.

vi. Two large o-ring gaskets (viton, vulcanized seams not glued) and bolts to connect the endplates to the chamber are to be included.

b. Materials:

i. The top and bottom endpieces are to be made from aluminum.

ii. The chamber body is to be made from stainless steel (304L or 316L).

c. Specifications for the designs of the chamber and for its three custom parts are outlined in the following computer-aided drawings (CAD) files

i. “250514_floor.STEP”,

ii. “25514_body.STEP”,

iii. “250514_roof.STEP”, and

iv. “2501514_floor.STEP”.

v. File “NIST_250514_Chamber Drawings.pdf” is provided for illustration.

vi. Minor adjustments to the original design may be made to the NIST design to better conform to the contractor’s capabilities.

d. Specifications not shown in CAD:

i. Six of the thirteen 6” Conflat ports shall be buttressed to support the weight (6.7 kg / 14.77 lb) of turbomolecular pumps or other accessories.

e. Safety:

i. The clear hole pattern for the bottom flange has four holes in which 5/8-11 Helical Inserts (or mutually agreed-upon equivalent) shall be installed for NIST-supplied Hoist Rings.

ii. The clear hole pattern for the cylindrical body has four holes into which 5/8-11 Helical Inserts (or mutually agreed-upon equivalent) shall be installed for NIST-supplied Hoist Rings.

iii. The top flange has four specially identified holes clear hole pattern for the cylindrical body has four holes into which 1/2 -13 Keensert (or mutually agreed-upon equivalent) shall be installed for NIST-supplied Hoist Rings.

f. Consistent with industry practices, vendor shall generate more highly detailed three-dimensional CAD drawings beyond those provided by NIST. Approval by NIST of these detailed supplier-generated CAD drawings will be required prior to manufacturing components.

g. Finish Specifications:

i. Finish may be brushed, polished, or electropolished

h. Chamber Geometry and Ports/Flanges Specifications:

i. All Ports and flanges must be standard ISO or Conflat sizes as indicated in design drawings.

i. High Vacuum Specifications:

i. Must be leak tight in leak testing down to 1 x 10-9 Torr∙L/s

ii. Welds must be leak tested and exhibit no virtual leaks

iii. Must reach pressure < 7.5 x 10-7 Torr (< 1.0 x 10-4 Pa) in room temperature testing.

j. Industry-standard practices for maintaining vacuum cleanliness of these parts must be maintained through manufacturing and delivery. Blank flanges shall be installed for transport.

Line Item 0002: Hinged Door (Higher confidence rating) Description: Top flange, remove 7 ISO 160 ports with a hinged door Quantity: 1 A. Technical Specifications

a. Rationale: Access to the interior of the chamber from above is a concern.

b. In the initial design drawings (Deliverable 1), vendor shall remove the seven ISO 160 ports from the top flange.

c. In the initial design drawings (Deliverable 1), vendor shall replace those ports with a single opening centered in the flange.

i. Size of opening, minimum: 310 square inches (0.2 m2).

ii. Opening corresponds to approx. 20-inch diameter circle or approx. 18 inch x 18 inch with rounded corners.

iii. Minimum size of opening can be reduced by mutual consent in writing.

d. In the initial design drawings (Deliverable 1), vendor shall include a door to cover the new opening.

e. By the final design drawings (Deliverable 2), vendor shall perform an analysis of the stiffness of the flange and adjust thickness of the top flange, its bolts, etc., to maintain vacuum pressure requirements.

f. When manufactured, top flange with door shall be tested as part of the custom vacuum chamber and meet all High Vacuum Specifications listed above in Line Item 0001. Vendor shall not be responsible for obtaining the seven ISO 160 flanges that were replaced by this Option.

g. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, and manufacture, and testing.

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

(with options, if selected)

Standards of Acceptance: The NIST TPOC shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 5 business days of receipt of deliverable.

V. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 120 days after receipt of order (ARO).

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology 100 Bureau Drive, BLDG 301 (Receiving) C/O Bldg 217/E116 Gaithersburg, MD 20899

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

A. The vacuum chamber must be tested by the manufacturer prior to shipping to ensure that it is leak tight and meets the geometric specifications of the design.

B. The system will be inspected for damage and then inspected for compliance with the machine drawing design.

C. If the manufactured chamber matches the design, the chamber will be blanked off at its ports and pumped out to test if it can reach the required room temperature base pressure of < 7.5 x 10-7 Torr.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 business days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. ATTACHMENTS

1. 250514_body.STEP

2. 250514_chamber.STEP

3. 250514_floor.STEP

4. 250514_roof.STEP

5. NIST_250514_Chamber_Drawings.pdf 2 | Page image1.jpeg