Statement of Work.docx

STATEMENT OF WORK

Title: Vector network analyzer for gas viscosity instrument Lab: MML

NB3050002502668

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

Numerous gases are used in the production of semiconductor chips, and the accurate metering of these gases into the process chamber is critical for maximizing device throughput and yield. Many of these gases are hazardous, and flow standards for hazardous gases do not exist, forcing the industry to rely on approximations and empirical methods. CHIPS project 1.02—“Gas Flow and Properties: Standards and Models for Flow Metering Semiconductor Gases”—will improve this situation by providing standards for the metering of hazardous gases. These will include physical models for meter performance across gas species and the gas thermophysical property data needed in those models; among the gas properties needed, viscosity, density, and heat capacity are the most important.

To provide the thermophysical property data required under CHIPS project 1.02, the Experimental Properties of Fluids Group of the Applied Chemicals and Materials Division of MML is tasked with the design and fabrication of two new instruments to safely measure gas properties to exacting uncertainty requirements. The first instrument is a dual-capillary viscometer capable of 0.1 % uncertainties; this will provide high-accuracy data on less-toxic gases needed to verify the flow models. The second instrument is a combination cylindrical resonator/Greenspan viscometer to measure viscosity (with an uncertainty of 0.5 %) and speed of sound (with an uncertainty of 0.05 %); this will be used to measure more toxic gases for which little to no data currently exist; it will also yield density and heat capacity data needed for the development of thermodynamic equations of state. The group’s extensive experience with the determination of pure gas and gas mixture properties over wide ranges of temperature and pressure makes it uniquely qualified to perform this work.

The present acquisition is concerned with electronic instrumentation needed for the Greenspan viscometer.

II. PURPOSE

Group 647.08 requires a “vector network analyzer” (or “VNA”) as one component of the electronics for a new instrument (known as a “Greenspan viscometer”) being built to measure the viscosity of gases used in the production of semiconductor devices. VNAs are commercial instruments manufactured by multiple companies. There are many variations on a VNA, so that careful consideration of the technical specifications is required. This new viscometer exploits the acoustic (sound) properties of the gases to measure viscosity. A VNA will deliver a source signal of varying frequency into the viscometer; a separate channel in the VNA will then detect the response of the viscometer; by scanning a range of frequencies and detecting acoustic resonances (akin to resonances in an organ pipe) the viscosity can be determined; thus, the VNA provides the central, critical measurement in the entire instrument. Tight control and accurate, low-noise measurement of frequency are crucial requirements if the new instrument is to meet the stringent uncertainty requirements targeted in this project. The viscosity data measured with this instrument will be a critical component of establishing standards for the flow metering of process gases, which in turn will enable the semiconductor industry to maximize semiconductor throughput and yield, ultimately lowering costs.

The measurement of viscosity of the semiconductor process gases is a critical component of establishing standards for the flow metering of process gases (i.e., the overall goal of CHIPS project 1.02). In reviewing all possible techniques for this measurement, only the Greenspan viscometer had the required combination of high accuracy, ability to automate the measurement, and small sample volume (required to minimize the hazard of working with these gases). This type of instrument was developed at NIST in the early 2000’s, and they are not commercially available; thus, we must build our own. By measuring the frequency response of the Greenspan instrument, the vector network analyzer (VNA) provides the central, critical measurement in the entire instrument. Without the VNA, the measurement of viscosity is not possible, and the VNA must be available for testing and validation of the instrument as soon as the main “sample cell” of the instrument has been fabricated by the machine shop; thus, acquisition of the VNA in FY’25 is essential for the success of the overall project. The anticipated outcome is viscosity data for a range of semiconductor process gases; the flow meter models being developed in the project require these data.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a vector network analyzer that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Extensive market research (see separate MRR document) has identified the Keysight model E5061B-3L3 vector network analyzer (with options) as uniquely meeting our technical requirements.

Line Item 0001:

Description: Keysight model E5061B-3L3 with options E5061B-721, E5061B-1E5, and E5061B-1CM Quantity: 1 A. Technical Specifications

a. frequency range of at least 100 Hz to 1 MHz

b. capable of S-parameter measurements over the frequency range 100 Hz to 1 MHz

c. dynamic range of at least 100 dB over the frequency range 100 Hz to 1 MHz

d. trace noise level of 0.010 dB or lower

e. IEEE-488 interface (also known as GPIB interface)

f. time-base stability of 2 ppm (parts per million) or better

g. rack-mountable in standard 19” instrument rack

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Place of Delivery

with options:

E5061B-721, E5061B-1E5, and

E5061B-1CM

to be delivered as a complete instrument

PLACE OF PERFORMANCE

N/A

PERIOD OF PERFORMANCE

N/A

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology c/o TBD 325 Broadway, MS 647.08 Boulder, CO 80305

VI. INSTALLATION

N/A

VII. TRAINING

N/A

VIII. INSPECTION & ACCEPTANCE

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the VNA for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the components by the Government.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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