SSJ Oxford Plasma Pro_Redacted.pdf

This is a Single Source Justification (Simplified Acquisition) document prepared by the Air Force Life Cycle Management Center for a procurement of the PlasmaP​ro 100 Cobra 300 ALE reactive ion etching (RIE) system. The contracting activity is the Installation Contracting Division, Base Support Contracting Office at Wright-Patterson Air Force Base, Ohio. The document justifies the sole-source award to Oxford Instruments based on technical compatibility requirements and demonstrates the rationale for non-competitive procurement procedures under FAR 13.106-1(b)(1).

The acquisition seeks integration of the PlasmaP​ro 100 Cobra 300 ALE RIE system into the Air Force Institute of Technology (AFIT) cleanroom laboratory to support advanced MEMS and semiconductor device fabrication coursework. The justification establishes that Oxford Instruments is the only responsible source capable of meeting requirements, citing the system's critical need for seamless integration with AFIT's existing Oxford Instruments equipment and proprietary software interfaces. Market research included review of GSA schedules, historical contract data, subject matter expert consultation, and a Sources Sought notice published on SAM.gov on June 16, 2026, with a July 2, 2026 closing date that resulted in only one response from Oxford Instruments Plasma Technology. The document emphasizes the system's strategic importance for national defense by enabling student training in advanced semiconductor fabrication techniques and fostering innovation in microelectronics and photonics research directly supporting Air and Space Force technological superiority. The contracting officer's determination confirms that only a single source is reasonably available for this requirement.